公开(公告)号：KR20200124620A

公开(公告)日：2020-11-03

申请号：KR20200049099

申请日：2020-04-23

Applicant: CANON KK

Inventor： YAMASHITA KEIJI

IPC: G03F7/16 ,  G03F7/00 ,  G03F7/20 ,  H01L21/027

Abstract: 기판상의조성물과몰드를접촉시킨상태에서상기조성물을경화시킴으로써상기조성물을성형하도록동작가능한성형장치가제공된다. 상기성형장치는, 상기기판상에상기조성물의액적을이산적으로공급하도록구성되는공급부와, 각액적의적하량및 적하위치를나타내는공급패턴에따라서상기공급부를제어하도록구성되는제어부를포함하며, 상기제어부는, 상기공급부에의해상기기판상에공급된인접하는액적사이의최소거리가상기조성물이공급되는영역의최외주변의중앙부보다구석부에서작아지도록, 상기공급패턴을결정한다.

公开(公告)号：EP3000120A4

公开(公告)日：2017-03-15

申请号：EP14818394

申请日：2014-06-18

Applicant: CANON KK

Inventor： ITO TOSHIKI ,  YOSHIDA TAKASHI ,  SATO HITOSHI ,  KAWASAKI YOUJI ,  IIMURA AKIKO ,  YAMASHITA KEIJI ,  UENO TAKEHIKO

IPC: G03F7/00 ,  B29C59/02 ,  H01L21/027

CPC classification number: G03F7/0002 ,  B29C59/002 ,  B29C59/005 ,  B29C59/022 ,  B29C59/026 ,  B29K2033/08 ,  B29K2105/0005

公开(公告)号：EP3000122A4

公开(公告)日：2016-12-28

申请号：EP14818779

申请日：2014-06-19

Applicant: CANON KK

Inventor： HONMA TAKESHI ,  ITO TOSHIKI ,  YONEZAWA SHIORI ,  CHIBA KEIKO ,  YAMASHITA KEIJI

IPC: H01L21/027 ,  B29C33/60 ,  B29C59/02 ,  C08F2/44 ,  C08F2/50 ,  C08F220/18 ,  C08K5/05

CPC classification number: B29C59/026 ,  B29C33/62 ,  B29C59/002 ,  B29C59/005 ,  B29K2033/08 ,  B29K2105/0005 ,  C08F2/44 ,  C08F2/50 ,  C08F220/18 ,  C08F222/1006 ,  C08K2201/00 ,  C08L33/08 ,  G03F7/0002 ,  H01L21/0271 ,  H01L21/266 ,  C08F2220/1875 ,  C08F2222/1013

Abstract: In an imprint method in a condensable gas atmosphere, the force (mold releasing force) required to separate a mold from a resist cured film (mold release) has been large. A photocurable composition for performing imprint in an atmosphere containing a condensable gas includes a component (A) which is a (meth)acrylate monomer, a component (B) which is a photopolymerization initiator; and a component (C) which is a mold releasing agent. The saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 50% by weight or more, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.

公开(公告)号：EP3000121A4

公开(公告)日：2016-12-28

申请号：EP14818475

申请日：2014-06-19

Applicant: CANON KK

Inventor： YONEZAWA SHIORI ,  ITO TOSHIKI ,  YAMASHITA KEIJI ,  CHIBA KEIKO ,  KAWASAKI YOUJI

IPC: H01L21/027 ,  B29C59/02 ,  C08F2/44 ,  C08F2/50 ,  C08F20/50 ,  C08K5/05

CPC classification number: B29C59/005 ,  B29C59/002 ,  B29C59/022 ,  B29C59/026 ,  B29C2059/023 ,  B29K2033/08 ,  B29K2105/0005 ,  C08F2/44 ,  C08F2/50 ,  C08L33/08 ,  G03F7/0002 ,  C08F2220/1875 ,  C08F2222/1013

Abstract: An imprint method that uses a condensable gas process has a problem in that the surface of a resist cured film is rough. This is resolved by a photocurable composition used for performing imprint in an atmosphere containing a condensable gas. The photocurable composition contains a component (A) which is a (meth)acrylate monomer, a component (B) which is a photopolymerization initiator, and a component (C) which is a mold releasing agent. A saturated solubility of the component (C) in the condensable gas at 5 degrees (Celsius) and 1 atm is 5% by weight or less, the condensable gas being in a liquid state at 5 degrees (Celsius) and 1 atm.

Abstract translation: 使用可冷凝气体工艺的压印方法存在抗蚀剂固化膜的表面粗糙的问题。 这通过用于在含有可冷凝气体的气氛中进行印迹的光固化性组合物来解决。 光固化性组合物含有作为（甲基）丙烯酸酯单体的组分（A），作为光聚合引发剂的组分（B）和作为脱模剂的组分（C）。 5℃（1摄氏度）和1个大气压下的可冷凝气体中的成分（C）的饱和溶解度为5重量％以下，可冷凝气体在5℃（1摄氏度）和1个大气压下为液态。

公开(公告)号：EP2907156A4

公开(公告)日：2016-07-13

申请号：EP13858407

申请日：2013-11-26

Applicant: CANON KK

Inventor： CHIBA KEIKO ,  ITO TOSHIKI ,  IIMURA AKIKO ,  KAWASAKI YOUJI ,  YAMASHITA KEIJI ,  KATO JUN

IPC: H01L21/027 ,  B29C59/02 ,  B29K33/04 ,  C08F20/18 ,  G03F7/031

CPC classification number: C08F222/20 ,  B29C59/005 ,  B29C59/02 ,  B29C59/022 ,  B29C59/16 ,  B29K2033/12 ,  B29L2011/00 ,  B29L2031/3406 ,  C08F220/18 ,  C08F222/10 ,  C08F222/1006 ,  C08F2222/1013 ,  C08L33/08 ,  C08L2312/00 ,  C09D133/08 ,  G03F7/0002 ,  G03F7/027 ,  G03F7/028 ,  G03F7/029 ,  C08F2220/1891 ,  C08F2220/1875 ,  C08F2220/301

Abstract: An imprinting method for forming a pattern of a cured product by irradiating a curable composition for imprinting disposed on a substrate with light while the curable composition is in contact with a mold having surface asperities and removing the mold from a cured product of the curable composition. The method includes bringing the mold into contact with the curable composition in a condensable gas atmosphere, wherein the curable composition for imprinting has a viscosity in the range of 1 cP to 40 cP in air at 23° C., and the condensable gas is introduced between the mold and the curable composition such that the curable composition for imprinting has a condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4.

Abstract translation: 用于压缩在可冷凝气体气氛中的可固化组合物，其中最大可冷凝气体溶解度（气体/（可固化组合物+气体））（g / g）为0.1以上且0.4以下，并且用于压印的固化性组合物的粘度 在23℃下为40cP或更低。最大可冷凝气体溶解度是通过用3g可固化组合物装入9ml棕色瓶子来测定的，可固化组合物的重量在23℃，1atm之前和 以0.1L / min的流速使可冷凝气体鼓泡15分钟后，将由起泡产生的重量增加除以可固化组合物和可冷凝气体的总重量。