公开(公告)号：CA2229717A1

公开(公告)日：1997-02-13

申请号：CA2229717

申请日：1996-07-25

Applicant: CENTER FOR ADVANCED FIBEROPTIC

Inventor： SOAVE ROBERT J ,  TASKER G WILLIAM ,  THEN ALAN M ,  SHANK STEVEN M

IPC: H01J9/12 ,  B44C1/22 ,  C03B15/00 ,  H01L21/00

Abstract: Manufacture of a microchannel plate may be improved using photoelectrochemic al etching and thin film activation such as CVD and nitriding and oxidizing wal l surface portions (28) of pores (12) formed in the substrate (10). The pore pattern may be changed by oxidizing and etching the substrate prior to activation.

公开(公告)号：CA2229731A1

公开(公告)日：1997-02-13

申请号：CA2229731

申请日：1996-07-25

Applicant: CENTER FOR ADVANCED FIBEROPTIC

Inventor： BENTLEY SCOTT T ,  THEN ALAN M

IPC: H01J9/12 ,  H01J9/02 ,  H01J43/18

Abstract: A method for manufacturing a discrete dynode electron multiplier includes employing micromachining and thin film techniques to produce tapered apertures in an etchable substrate, bonding the substrates together and activating the internal surfaces of the etched substrate using chemical vapor deposition or oxidizing and nitriding techniques.

公开(公告)号：EP0846332A4

公开(公告)日：1998-12-09

申请号：EP96925463

申请日：1996-07-25

Applicant: CENTER FOR ADVANCED FIBEROPTIC

Inventor： THEN ALAN M ,  BENTLEY SCOTT T

IPC: H01J9/12 ,  H01J9/02 ,  H01J43/18

CPC classification number: H01J9/125 ,  H01J2201/32

Abstract: A method for manufacturing a discrete dynode electron multiplier includes employing micromachining and thin film techniques to produce tapered apertures in an etchable substrate, bonding the substrates together and activating the internal surfaces of the etched substrate using chemical vapor deposition or oxidizing and nitriding techniques.