公开(公告)号：CA2851160C

公开(公告)日：2020-08-18

申请号：CA2851160

申请日：2012-10-25

Applicant: FEI CO

Inventor： BARRETT MATTHEW ,  SMITH MICHAEL D ,  GERYK MICHAL ,  SCAGNETTI PAUL ,  TOVEY RICHARD

IPC: G01N23/2204 ,  G01N23/2251

Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

公开(公告)号：AU2012328841B2

公开(公告)日：2015-08-13

申请号：AU2012328841

申请日：2012-10-25

Applicant: FEI CO

Inventor： BARRETT MATTHEW ,  SMITH MICHAEL D ,  GERYK MICHAL ,  SCAGNETTI PAUL ,  TOVEY RICHARD

IPC: G01N1/36 ,  G01N23/225

Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

公开(公告)号：AU2012328841A1

公开(公告)日：2014-04-24

申请号：AU2012328841

申请日：2012-10-25

Applicant: FEI CO

Inventor： BARRETT MATTHEW ,  SMITH MICHAEL D ,  GERYK MICHAL ,  SCAGNETTI PAUL ,  TOVEY RICHARD

IPC: G01N1/36 ,  G01N23/225

Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

公开(公告)号：CA2851160A1

公开(公告)日：2013-05-02

申请号：CA2851160

申请日：2012-10-25

Applicant: FEI CO

Inventor： BARRETT MATTHEW ,  SMITH MICHAEL D ,  GERYK MICHAL ,  SCAGNETTI PAUL ,  TOVEY RICHARD

IPC: G01N1/36 ,  G01N23/225

Abstract: A sample holder assembly includes a sample tray, a base plate, a stage mount, and a calibration standard mounted onto the stage mount. Three mating structures on the bottom of the base plate mate with corresponding structures on a stage mount that is attached to the sample stage of the SEM. An optional contacting conductor provides electrical contact between the stage mount and the base plate so that charge generated on the sample by the electron beam can leave the sample through the sample conductive layer to the sample tray, to the base plate, to the stage mount, and through the grounded stage.

公开(公告)号：EP2771665A4

公开(公告)日：2016-01-06

申请号：EP12844105

申请日：2012-10-25

Applicant: FEI CO

Inventor： BARRETT MATTHEW ,  SMITH MICHAEL D ,  GERYK MICHAL ,  SCAGNETTI PAUL ,  TOVEY RICHARD

IPC: G01N1/36 ,  G01N23/225 ,  H01J37/20

CPC classification number: H01J37/20 ,  G01N2223/307 ,  G01N2223/418 ,  G01N2223/616 ,  H01J37/16 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/28 ,  H01J2237/2826