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公开(公告)号：DE3374485D1
公开(公告)日：1987-12-17
申请号：DE3374485
申请日：1983-01-26
Applicant: IBM
Inventor： ANDERSON NATHANIEL CARL , DABY LARRY EUGENE , GRAVDAHL VINCENT DEAN , MCCAFFREY PATRICK MICHAEL , MURRAY BRUCE ALLEN , WRIGHT BRUCE WAYNE
IPC: C23F4/00 , C23F1/00 , G03F7/00 , G11B5/127 , G11B5/133 , G11B5/193 , G11B5/31 , H01F41/34 , H01F41/14
Abstract: A process for producing a reactive ion-etched structure with height and width dimensions of the order of 25 microns or less on a ferrite substrate (12) surface is disclosed. A mask (18) of positive water saturated photoresist is formed on the substrate. A metal taken from the group consisting of nickel and a nickel-iron alloy is plated through the mask. The photoresist mask is removed to leave a pattern (20) in the plated metal. The ferrite substrate surface that is exposed by the pattern is reactive ion etched with a power density of more than 1w/cm 2 and a bias voltage less than -100 volts.
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公开(公告)号：DE3770514D1
公开(公告)日：1991-07-11
申请号：DE3770514
申请日：1987-03-10
Applicant: IBM
Inventor： ANDERSON NATHANIEL CARL , CHESNUTT ROBERT BLAIR
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公开(公告)号：DE3472319D1
公开(公告)日：1988-07-28
申请号：DE3472319
申请日：1984-03-05
Applicant: IBM
Inventor： ANDERSON NATHANIEL CARL , DABY LARRY FUGENE , JOHNSON GENE ALVIN , MCCAFFREY PATRICK MICHAEL
Abstract: A film transducer head design is formed on a substrate where the first yoke layer and electric terminal strip that connects the coil center pad to the head exterior are formed at the same time followed by successive layers that form the transducer gap, coil insulation, coil, coil insulation and the second yoke layer. This sequence allows the coil to be tested immediately after deposition of the coil material and at a time in the fabrication sequence when it can be reworked or replaced if a discontinuity (open) or shorted turn(s) is (are) identified.
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