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1.发明公开POST DEPOSITION METHOD FOR REGROWTH OF CRYSTALLINE PHASE CHANGE MATERIAL 审中-公开NACHABLAGERUNGSVERFAHREN对于新品种的晶相变材料
公开(公告)号：EP2534710A4
公开(公告)日：2015-05-06
申请号：EP11742594
申请日：2011-01-10
Applicant: IBM
Inventor： CHUNG LAM H , ROSSNAGEL STEPHEN M , SCHROTT ALEJANDRO G
IPC: H01L45/00
CPC classification number: H01L45/06 , H01L45/1233 , H01L45/143 , H01L45/144 , H01L45/1641 , H01L45/1683
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