公开(公告)号：DE2439795A1

公开(公告)日：1975-04-03

申请号：DE2439795

申请日：1974-08-20

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  HOEKSTRA JAN PIETER

IPC: H01L21/66 ,  H01L21/306 ,  H01L21/311 ,  H01L21/316

Abstract: 1448048 Etching INTERNATIONAL BUSINESS MACHINES CORP 30 July 1974 [21 Sept 1973] 33499/74 Heading B6J [Also in Division H1] An insulating layer 22 is etched from the surface of a photo-electric semi-conductor substrate 18 using a conductive etching solution 10, by a method comprising illuminating an area of the substrate 18 and detecting when a current path is established between the solution 10 and the substrate 18 through the area being etched. The substrate 18 may be silicon which is coated with silicon oxide layers 20, 22. A gasket 28 in a holder 14 ensures that only the layer 22 is exposed to the solution 10. One electrode 34 contacting the substrate 18 capacitively, or directly if the oxide layer 20 is absent, and another electrode 38 contacting the solution 10, are coupled to a current detector 40 which registers an output when the solution 10 reaches the substrate 18, whereupon the substrate 18 is removed either manually or by a servomechanism. The illumination consists of a chopped D.C. light beam.

公开(公告)号：FR2285648A1

公开(公告)日：1976-04-16

申请号：FR7521493

申请日：1975-07-04

Applicant: IBM

Inventor： DILL FREDERICK H ,  HOEKSTRA JAN PIETER

IPC: G02B7/00 ,  G03F9/00 ,  H01L21/30 ,  H01L21/027 ,  G05D3/02 ,  H01L21/70

Abstract: A method and apparatus for locating target patterns with reference to a fixed axis. The apparatus includes a collimated light source providing a light beam to a rotating prism and optical flat producing a rotating light beam. A lens whose axis is the fixed axis focuses the beam to a spot on a surface containing a pattern comprising regularly spaced light scattering surfaces. A light sensor detects light from the rotating beam scattered by the target. An incremental shaft encoder provides a real time indication of spot position. The light sensor output provides a measure of target location and orientation with reference to the lens axis. The encoder can be used to control sampling apparatus and an A/D converter to provide regular digital samples of the light sensor output.

公开(公告)号：DE2536263A1

公开(公告)日：1976-03-25

申请号：DE2536263

申请日：1975-08-14

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  HOEKSTRA JAN PIETER

IPC: H01L21/30 ,  G02B7/00 ,  G03F9/00 ,  H01L21/027 ,  G01B11/14 ,  H01L21/70

Abstract: A method and apparatus for locating target patterns with reference to a fixed axis. The apparatus includes a collimated light source providing a light beam to a rotating prism and optical flat producing a rotating light beam. A lens whose axis is the fixed axis focuses the beam to a spot on a surface containing a pattern comprising regularly spaced light scattering surfaces. A light sensor detects light from the rotating beam scattered by the target. An incremental shaft encoder provides a real time indication of spot position. The light sensor output provides a measure of target location and orientation with reference to the lens axis. The encoder can be used to control sampling apparatus and an A/D converter to provide regular digital samples of the light sensor output.