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    Method to establish the endpoint during the delineation of oxides on semiconductor surfaces and apparatus therefor
    1.
    发明授权
    Method to establish the endpoint during the delineation of oxides on semiconductor surfaces and apparatus therefor 失效
    在半导体表面氧化物分解期间建立端点的方法及其设备

    公开(公告)号：US3874959A

    公开(公告)日：1975-04-01

    申请号：US39966873

    申请日：1973-09-21

    Applicant: IBM

    Inventor： HOEKSTRA JAN P ,  DILL FREDERICK H

    IPC: H01L21/66 ,  H01L21/306 ,  H01L21/311 ,  B29C17/08

    CPC classification number: H01L21/31111

    Abstract: A semiconductor device having a dielectric coating on at least one surface is mounted in a special holder which will allow the etching solution to contact only one oxide coated surface of the semiconductor to etch the same according to a predetermined pattern. A first electrical lead is connected either directly or indirectly to the opposite surface of the semiconductor and a second electrical lead is connected to an electrode disposed in the etching solution. Both of these are connected to a meter or detector for sensing any current between the two leads through the semiconductor. A chopped d.c. light source is focused to provide a spot of light at at least one etching point so that upon removal of the dielectric, the pulsating light beam will generate an a.c. signal on the semiconductor which will be detected by the meter to signal the etching endpoint.

    Automatic ellipsometer
    4.
    发明授权
    Automatic ellipsometer 失效
    自动椭偏仪

    公开(公告)号：US3880524A

    公开(公告)日：1975-04-29

    申请号：US37354073

    申请日：1973-06-25

    Applicant: IBM

    Inventor： DILL FREDERICK H ,  HAUGE PETER S

    IPC: G01J4/04 ,  G01B11/06 ,  G01B11/27 ,  G01N21/21 ,  G02B5/30 ,  G01N21/40

    CPC classification number: G01B11/272 ,  G01B11/065 ,  G01N21/211

    Abstract: An automatic ellipsometer is disclosed which comprises a mechanical-optical, an electrical, and a digital (computer) component. The mechanical-optical component includes a light source, various polarizing elements (one of which spins continuously), necessary apertures, and a light detector. The electrical component includes a signal from the light detector, trigger pulses from an angular shaft encoder, and an analogdigital converter, and produces a string of digitized data in a form which can be read and analyzed by digital logical circuitry. The digital (computer) component comprises logic circuitry in sufficient quantity to store and execute a relatively simple data analysis program, there being suitably associated with the digital component, one or more print-out and/or display devices. To facilitate automation of ellipsometric operation, there is provided a sample alignment system which includes a spot-defining aperture in the incident light beam, a sample holder with capability for rotation about two perpendicular axes intersecting at the intersection of the axis of the light beam source and the axis of the detector, and a four-quadrant beam deviation detector located a convenient distance from the sample along the detector axis. In the operation of the system, the sample is properly oriented about two axes of rotation, and data in the form of light intensity transmitted through a continuously spinning analyzer in the reflected beam path is sampled at convenient angular intervals to provide data which is digitally coded, and the data then is numerically Fourier analyzed to enable extrapolated properties of the sample to be displayed or typed out. The entire sequence of operations, i.e., from sample insertion to type out or display is on the order of about 5-10 seconds.

    Abstract translation: 公开了一种自动椭偏仪，其包括机械光学，电气和数字（计算机）部件。 机械光学部件包括光源，各种偏振元件（其中一个连续旋转），必需的孔和光检测器。 电气部件包括来自光检测器的信号，来自角轴编码器的触发脉冲和模拟数字转换器，并且以数字逻辑电路读取和分析的形式产生一串数字化数据。 数字（计算机）组件包括足够数量的逻辑电路来存储和执行相对简单的数据分析程序，其中适当地与数字组件，一个或多个打印输出和/或显示设备相关联。 为了促进椭圆运算的自动化，提供了一种样本对准系统，其包括入射光束中的点限定孔，具有能够围绕与光束源的轴线交叉的两个垂直轴旋转的能力的样本保持器 和检测器的轴线，以及一个四象限的光束偏移检测器，位于沿着检测器轴线的样品方便的距离处。 在系统的操作中，样品被适当地定向在两个旋转轴上，并且以反射光束路径中的连续纺丝分析仪传输的以光强度形式的数据以适当的角度间隔进行采样，以提供数字编码的数据 ，然后对数据进行数字傅里叶分析，以使样品的外推特性能够显示或输出。 整个操作顺序，即从样本插入到输出或显示，大约5-10秒左右。

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