公开(公告)号：DE2309615A1

公开(公告)日：1973-09-06

申请号：DE2309615

申请日：1973-02-27

Applicant: IBM

Inventor： KENNEDY THOMAS NOLAN

IPC: C23C14/06 ,  C23C14/00 ,  C23C14/10 ,  C23C14/34 ,  H01L21/314 ,  H01L21/316 ,  C23C15/00

Abstract: 1387774 Forming glass on substrates INTERNATIONAL BUSINESS MACHINES CORP 18 Jan 1973 [1 March 1972] 2602/73 Heading ClM [Also in Division C7] Phosphosilicate glass is RF sputtered on to a substrate in a reduced pressure inert gas atmosphere by using a target of silica-containing material and introducing P 2 O 5 vapour into the glow discharge region. As shown, semi-conductor wafer substrates 62 and Nb boats 60 containing solid P 2 O 5 stand on substrate electrode 28 cooled by coolant in pipe 38. Target electrode 22 is connected to RF source 50, as shown, is cooled by coolant 31, 32 and bears a target, which is typically quartz; pipe 42 and valve 44 serve to admit inert gas such as Ar. The energy of the discharge heats boats 60 to, e.g. 300-450‹ C., producing a P 2 O 5 partial pressure of 2 to 5 Î 10 -3 Torr; the resulting phosphosilicate glass film may contain 3 to 5 mole per cent P 2 O 5 , and serves to getter mobile positive charges in the semi-conductor.

公开(公告)号：DE3064449D1

公开(公告)日：1983-09-01

申请号：DE3064449

申请日：1980-11-26

Applicant: IBM

Inventor： KENNEDY THOMAS NOLAN

IPC: B01J19/08 ,  C23C14/34 ,  H01J37/34 ,  C23C15/00

公开(公告)号：DE2964758D1

公开(公告)日：1983-03-17

申请号：DE2964758

申请日：1979-12-14

Applicant: IBM

Inventor： KENNEDY THOMAS NOLAN ,  MCDONOUGH GEORGE WILLIAM ,  LESTER WILLIAM CARL ,  MICHAELSON JOHN DANIEL

IPC: C23C14/34 ,  C23C14/35 ,  C23C14/38 ,  H01J37/34 ,  H01L21/203 ,  C23C15/00

公开(公告)号：DE2960790D1

公开(公告)日：1981-11-26

申请号：DE2960790

申请日：1979-12-10

Applicant: IBM

Inventor： ALBERT PAUL ANDRE ,  KENNEDY THOMAS NOLAN

IPC: G11B5/265 ,  G11B5/31 ,  G11B5/12 ,  G11B5/42

公开(公告)号：DE2807456A1

公开(公告)日：1978-10-05

申请号：DE2807456

申请日：1978-02-22

Applicant: IBM

Inventor： HEAD NEPHI LAWRENCE ,  HEMPSTEAD ROBERT DOUGLAS ,  KENNEDY THOMAS NOLAN ,  LIEU FRED YET

IPC: G11B5/187 ,  G11B5/255 ,  G11B5/31 ,  G11B5/60 ,  G11B5/12 ,  G11B5/42

Abstract: A slider element includes a thin film transducer deposited onto a slider along at least one of the rails forming the flying air bearing surface with a magnetic media. A portion of the end tips of the pole pieces and gap of the thin film inductive transducer and a portion of the slider rail adjacent to the transducer is etched by a sputter etching process. A layer of a passivation material such as chromium is sputter deposited into the etched portion such that the leading portion of the rail protects the passivation material from wear. The passivation material over the pole tips of the transducer prevents the corrosion of the iron-nickel alloy comprising the pole tips.