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公开(公告)号：AT436088T
公开(公告)日：2009-07-15
申请号：AT02731605
申请日：2002-04-30
Applicant: IBM
Inventor： GATES STEPHEN , MURRAY CHRISTOPHER , NITTA SATYANARAYANA , PURUSHOTHAMAN SAMPATH
IPC: H01L21/316 , H01L21/312 , H01L21/768 , H01L23/522 , H01L23/532
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