公开(公告)号：WO2004097671A3

公开(公告)日：2005-03-24

申请号：PCT/EP2004050409

申请日：2004-04-01

Applicant: IBM ,  IBM DEUTSCHLAND ,  HOLT ALEXANDER ,  MORAN MICHAEL ,  VELDERMAN PAT ,  GATES STEPHEN

Inventor： HOLT ALEXANDER ,  MORAN MICHAEL ,  VELDERMAN PAT ,  GATES STEPHEN

IPC: G06F7/00 ,  G06F17/30

CPC classification number: G06F17/30864 ,  Y10S707/99933 ,  Y10S707/99935

Abstract: A system and method for providing a set of refinement categories for a set of search results generated in response to a search query. The system comprises: a category identifier system that analyzes each search result and identifies at least one category from a hierarchy of categories for each search result, thereby providing a list of identified categories; a ranking system that ranks each category in the list of identified categories; and a selection system that selects a predetermined number of the highest ranking categories from the list of identified categories to generate the set of refinement categories, wherein the selection system eliminates categories from the set of refinement categories if the category has a parent in the set of refinement categories.

Abstract translation: 一种用于为响应于搜索查询生成的一组搜索结果提供一组细化类别的系统和方法。 该系统包括：类别标识符系统，其分析每个搜索结果并且从每个搜索结果的类别的层次中识别至少一个类别，从而提供所识别的类别的列表; 一个排名系统，将所列类别列表中的每个类别排列; 以及选择系统，其从所识别的类别的列表中选择预定数量的最高排名的类别以生成一组细化类别，其中如果所述类别具有所述一组细化类别中的父类，则所述选择系统从所述一组细化类别中消除类别 细化类别。

公开(公告)号：JP2011061228A

公开(公告)日：2011-03-24

申请号：JP2010247790

申请日：2010-11-04

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： FITZSIMMONS JOHN ,  GRECO STEPHEN ,  LEE JIA ,  GATES STEPHEN ,  SPOONER TERRY ,  ANGYAL MATTHEW ,  HICHRI HABIB ,  STANDAERT THEORDORUS ,  BIERY GLENN

IPC: H01L21/768 ,  H01L21/312 ,  H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  H01L23/522 ,  H01L23/532

CPC classification number: H01L21/76832 ,  H01L21/76801 ,  H01L21/76807 ,  H01L21/76835 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

Abstract: PROBLEM TO BE SOLVED: To provide an advanced back-end-of-line (BEOL) interconnect structure provided with a hybrid dielectric body. SOLUTION: Inter layer dielectric body (ILD) for a via level is preferably different from an ILD for a line level. In a preferable embodiment, the ILD the via level is formed with a low-k SiCOH material, and the ILD for the line level is formed with a low-k polymer thermosetting material. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供具有混合电介质体的高级后端（BEOL）互连结构。 解决方案：用于通孔电平的层间电介质体（ILD）优选地不同于线路电平的ILD。 在优选的实施方案中，ILD通过低k SiCOH材料形成通孔层，并且用低k聚合物热固性材料形成线水平的ILD。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：AT479729T

公开(公告)日：2010-09-15

申请号：AT04757577

申请日：2004-03-17

Applicant: IBM

Inventor： GATES STEPHEN ,  GRILL ALFRED

IPC: C09C1/00 ,  H01L21/312 ,  H01L21/316

Abstract: The present invention provides a multiphase, ultra low k film which exhibits improved elastic modulus and hardness as well as various methods for forming the same. The multiphase, ultra low k dielectric film includes atoms of Si, C, O and H, has a dielectric constant of about 2.4 or less, nanosized pores or voids, an elastic modulus of about 5 or greater and a hardness of about 0.7 or greater. A preferred multiphase, ultra low k dielectric film includes atoms of Si, C, O and H, has a dielectric constant of about 2.2 or less, nanosized pores or voids, an elastic modulus of about 3 or greater and a hardness of about 0.3 or greater. The multiphase, ultra low k film is prepared by plasma enhanced chemical vapor deposition in which one of the following alternatives is utilized: at least one precursor gas comprising siloxane molecules containing at least three Si-O bonds; or at least one precursor gas comprising molecules containing reactive groups that are sensitive to e-beam radiation. Electronic structures including the multiphase, ultra low k film are also disclosed.

公开(公告)号：AT346345T

公开(公告)日：2006-12-15

申请号：AT04725069

申请日：2004-04-01

Applicant: IBM

Inventor： HOLT ALEXANDER ,  MORAN MICHAEL ,  VELDERMAN PAT ,  GATES STEPHEN

IPC: G06F7/00 ,  G06F17/30

Abstract: A system and computer readable medium for providing a set of refinement categories for a set of search results generated in response to a search query. The system comprises: a category identifier system that analyzes each search result and identifies at least one category from a hierarchy of categories for each search result, thereby providing a list of identified categories; a ranking system that ranks each category in the list of identified categories; and a selection system that selects a predetermined number of the highest ranking categories from the list of identified categories to generate the set of refinement categories, wherein the selection system eliminates categories from the set of refinement categories if the category has a parent in the set of refinement categories.

公开(公告)号：AU2002360420A1

公开(公告)日：2003-07-30

申请号：AU2002360420

申请日：2002-11-22

Applicant: IBM

Inventor： WANG YUN YU ,  GATES STEPHEN ,  AGARWALA BIRENDRA N ,  FITZSIMMONS JOHN A ,  LEE JIA ,  LUSTIG NAFTALI E

IPC: H01L21/314 ,  H01L21/316 ,  H01L21/768 ,  H01L23/532 ,  H01L23/48 ,  H01L21/469 ,  H01L21/4763

Abstract: An advanced back-end-of-line (BEOL) metallization structure is disclosed. The structure includes a diffusion barrier or cap layer having a low dielectric constant (low-k). The cap layer is formed of amorphous nitrogenated hydrogenated silicon cabride, and has a dielectric constant (k) of less than about 5. A method for forming the BEOL metallization structure is also disclosed, where the cap layer is deposited using a plasma-enhanced chemical vapor deposition (PE CVD) process. The invention is particularly useful in interconnect structure comprising low-k dielectric material for the inter-layer dielectric (ILD) and copper for the conductors.

公开(公告)号：DE602004003361T2

公开(公告)日：2007-10-04

申请号：DE602004003361

申请日：2004-04-01

Applicant: IBM

Inventor： HOLT ALEXANDER ,  MORAN MICHAEL ,  VELDERMAN PAT ,  GATES STEPHEN

IPC: G06F17/30 ,  G06F7/00

Abstract: A system and computer readable medium for providing a set of refinement categories for a set of search results generated in response to a search query. The system comprises: a category identifier system that analyzes each search result and identifies at least one category from a hierarchy of categories for each search result, thereby providing a list of identified categories; a ranking system that ranks each category in the list of identified categories; and a selection system that selects a predetermined number of the highest ranking categories from the list of identified categories to generate the set of refinement categories, wherein the selection system eliminates categories from the set of refinement categories if the category has a parent in the set of refinement categories.

公开(公告)号：AU2003279460A1

公开(公告)日：2004-06-03

申请号：AU2003279460

申请日：2003-11-07

Applicant: IBM

Inventor： HICHRI HABIB ,  STANDAERT THEORDORUS ,  BIERY GLENN ,  FITZSIMMONS JOHN ,  GRECO STEPHEN ,  LEE JIA ,  GATES STEPHEN ,  SPOONER TERRY ,  ANGYAL MATTHEW

IPC: H01L21/768 ,  H01L23/532

Abstract: An advanced back-end-of-line (BEOL) interconnect structure having a hybrid dielectric is disclosed. The inter-layer dielectric (ILD) for the via level is preferably different from the ILD for the line level. In a preferred embodiment, the via-level ILD is formed of a low-k SiCOH material, and the line-level ILD is formed of a low-k polymeric thermoset material.

公开(公告)号：AT436088T

公开(公告)日：2009-07-15

申请号：AT02731605

申请日：2002-04-30

Applicant: IBM

Inventor： GATES STEPHEN ,  MURRAY CHRISTOPHER ,  NITTA SATYANARAYANA ,  PURUSHOTHAMAN SAMPATH

IPC: H01L21/316 ,  H01L21/312 ,  H01L21/768 ,  H01L23/522 ,  H01L23/532

公开(公告)号：DE602004003361D1

公开(公告)日：2007-01-04

申请号：DE602004003361

申请日：2004-04-01

Applicant: IBM

Inventor： HOLT ALEXANDER ,  MORAN MICHAEL ,  VELDERMAN PAT ,  GATES STEPHEN

IPC: G06F17/30 ,  G06F7/00

Abstract: A system and computer readable medium for providing a set of refinement categories for a set of search results generated in response to a search query. The system comprises: a category identifier system that analyzes each search result and identifies at least one category from a hierarchy of categories for each search result, thereby providing a list of identified categories; a ranking system that ranks each category in the list of identified categories; and a selection system that selects a predetermined number of the highest ranking categories from the list of identified categories to generate the set of refinement categories, wherein the selection system eliminates categories from the set of refinement categories if the category has a parent in the set of refinement categories.