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公开(公告)号：DE3063331D1
公开(公告)日：1983-07-07
申请号：DE3063331
申请日：1980-08-12
Applicant: IBM
Inventor： HORNG CHENG TZONG , LILLJA HAROLD VINELL , SETO DAVID KENROKU
IPC: H01L29/73 , H01L21/033 , H01L21/266 , H01L21/316 , H01L21/331 , H01L21/76 , H01L29/10 , H01L21/00
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