公开(公告)号：AU2020384654A1

公开(公告)日：2022-05-12

申请号：AU2020384654

申请日：2020-11-10

Applicant: IBM

Inventor： ADIGA VIVEKANANDA ,  WYMORE BENJAMIN ,  FOGEL KEITH ,  SANDBERG MARTIN

IPC: H01L39/24 ,  G06N10/00 ,  H01L27/18 ,  H01L39/02 ,  H01L39/22

Abstract: A method of making a Josephson junction for a superconducting qubit includes providing a substructure (500) having a surface with first and second trenches (306 and 308) perpendicular to each other defined therein. The method further includes evaporating a first superconducting material (700) to deposit the first superconducting material and evaporating a second superconducting material (701) to deposit the second superconducting material in the first trench to provide a first lead (710), and forming an oxidized layer (800) on the first and second superconducting materials. The method includes evaporating a third superconducting material (900) at an angle substantially perpendicular to the surface (502) of the substructure to deposit the third superconducting material in the second trench without rotating the substructure to form a second lead (910). A vertical Josephson junction is formed at the intersection of the first and second trenches electrically connected through the first lead and through the second lead.