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公开(公告)号:HK1055508A1
公开(公告)日:2004-01-09
申请号:HK03107752
申请日:2003-10-28
Applicant: IBM
Inventor: CULP JAMES , NAYAK JAWAHAR , RAUSCH WERNER , SHERONY MELANIE , VOLDMAN STEVEN , ZANDMER NOAH
IPC: H01L21/822 , H01L27/04 , H01L29/10 , H01L29/49 , H01L29/78 , H01L29/786 , H01L29/861 , H01L
Abstract: A semiconductor chip includes a semiconductor substrate having a rectifying contact diffusion and a non-rectifying contact diffusion. A halo diffusion is adjacent the rectifying contact diffusion and no halo diffusion is adjacent the non-rectifying contact diffusion. The rectifying contact diffusion can be a source/drain diffusion of an FET to improve resistance to punch-through. The non-rectifying contact diffusion may be an FET body contact, a lateral diode contact, or a resistor or capacitor contact. Avoiding a halo for non-rectifying contacts reduces series resistance and improves device characteristics. In another embodiment on a chip having devices with halos adjacent diffusions, no halo diffusion is adjacent a rectifying contact diffusion of a lateral diode, significantly improving ideality of the diode and increasing breakdown voltage.