中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

6 records (took 0.017 seconds)

    A TRI-AXIS ACCELEROMETER
    2.
    发明专利
    A TRI-AXIS ACCELEROMETER 未知

    公开(公告)号：CA2595755A1

    公开(公告)日：2007-05-31

    申请号：CA2595755

    申请日：2006-11-16

    Applicant: KIONIX INC

    Inventor： EPSTEIN KEITH ,  ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE

    IPC: G01P15/18 ,  G01P15/125 ,  H01L21/00

    Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

    A TRI-AXIS ACCELEROMETER
    3.
    发明专利
    A TRI-AXIS ACCELEROMETER 未知

    公开(公告)号：CA2595755C

    公开(公告)日：2012-02-07

    申请号：CA2595755

    申请日：2006-11-16

    Applicant: KIONIX INC

    Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

    IPC: G01P15/18 ,  G01P15/125 ,  H01L21/00

    Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor. In another embodiment, the MEMS accelerometer can include a third sensor configured to measure the acceleration along the axis perpendicular to the plane of the substrate. A MEMS accelerometer according to an embodiment of the invention can be insensitive to changes in temperature and/or stresses imposed on the packaging unit.

    4.
    发明专利
    未知

    公开(公告)号：NO20073803L

    公开(公告)日：2007-10-17

    申请号：NO20073803

    申请日：2007-07-20

    Applicant: KIONIX INC

    Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

    IPC: G01P15/125 ,  G01P15/18

    Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

    A TRI-AXIS ACCELEROMETER
    5.
    发明申请
    A TRI-AXIS ACCELEROMETER 审中-公开
    三轴加速度计

    公开(公告)号：WO2007061756A2

    公开(公告)日：2007-05-31

    申请号：PCT/US2006044517

    申请日：2006-11-16

    Applicant: KIONIX INC ,  ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

    Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

    IPC: G01P15/18 ,  G01P15/125 ,  H01L21/00

    CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0828

    Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

    Abstract translation: 在本发明的一个实施例中，提供了一种微机电（MEMS）加速计，其包括衬底，第一传感器和第二传感器。 第一传感器被配置为测量沿平行于衬底平面的第一轴的加速度。 第二传感器配置为测量沿垂直于基板平面的轴的加速度。 第二传感器包括第一梁，第二梁和单个支撑结构。 单个支撑结构相对于衬底支撑第一和第二梁，其中第一和第二梁包围第一传感器。

Patent Agency Ranking