公开(公告)号：WO2008121739A8

公开(公告)日：2010-02-18

申请号：PCT/US2008058522

申请日：2008-03-27

Applicant: KIONIX INC ,  KIM DONG YOON ,  MILLER SCOTT A

Inventor： KIM DONG YOON ,  MILLER SCOTT A

IPC: G01P15/18

CPC classification number: G01P15/0891 ,  G11B19/043

Abstract: A system (10) and method detect freefall associated with an object that is spinning or tumbling as it falls. Two tri-axis accelerometers (14, 16) provide inputs to an algorithm (28) that detects the freefall of a spinning object that would not otherwise be detected by a conventional freefall detection system, due to the centrifugal and centripetal forces being placed on the falling object as it spins. The system can be used to detect the freefall of portable devices with onboard memory or hard disk drives, allowing the devices to have time to park the read/write head and reduce the potential of losing data that can be damaged by impact. This freefall detection system may be applied to such portable devices as notebook computers, PDAs, MP3 players, digital cameras, mobile phones and even automobiles.

Abstract translation: 一种系统（10）和方法，用于检测与下降时正在旋转或翻滚的对象相关联的自由落体。 两个三轴加速度计（14,16）为算法（28）提供输入，该算法（28）检测纺丝物体的自由落体，由于离心力和向心力被放置在 坠落的物体，因为它旋转。 该系统可用于检测具有板载内存或硬盘驱动器的便携式设备的自由落体，从而允许设备有时间停放读/写头，并减少丢失可能受到影响而损坏的数据的可能性。 这种自由落体检测系统可以应用于诸如笔记本电脑，PDA，MP3播放器，数码相机，移动电话甚至汽车的便携式设备。

公开(公告)号：WO03036305A3

公开(公告)日：2003-10-16

申请号：PCT/US0232993

申请日：2002-10-16

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  JOHNSON WENDY JO H

IPC: G01P9/04 ,  G01P15/125 ,  G01P15/08 ,  H01L29/00

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: An accelerometer (100) comprising a silicon wafer is etched to form a fixed portion (400), a movable portion (300), and a resilient coupling (120) between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

Abstract translation: 蚀刻包括硅晶片的加速度计（100），以形成固定部分（400），可移动部分（300）以及通常设置在晶片平面中的固定部分和可移动部分之间的弹性联接件（120） 活动部分的质量集中在弹性联轴器的一侧。 硅结构的固定和可移动部分之一包括第一电极。 固定和可移动部分中的另一个包括平行于加速轴定向的第二电极，和作为共面的第三电极电连接并与第二电极机械耦合的导电层。 第二电极和第三电极与第一电极电容地相对配置，第一电极和第三电极之间的电容随着可移动部分沿着加速轴相对于固定部分的方向移动而增加，并且随着可移动部分移动 在相反的方向。 弹性联接器保持第一和第三电极跨过电容间隙彼此电容地相对，同时响应于沿垂直于晶片平面的加速轴的加速度，允许第一电极相对于第二和第三电极的运动， 并且当加速停止时，将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时，第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量。

公开(公告)号：HK1076653A1

公开(公告)日：2006-01-20

申请号：HK05108572

申请日：2005-09-29

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  JOHNSON WENDY JO H

IPC: G01P20060101 ,  G01P9/04 ,  G01P15/125 ,  H01L20060101

Abstract: An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

公开(公告)号：AU2002368527A1

公开(公告)日：2004-07-22

申请号：AU2002368527

申请日：2002-12-26

Applicant: KIONIX INC

Inventor： MILLER SCOTT A ,  ADAMS SCOTT G

IPC: B81B3/00 ,  H01L21/762 ,  H01H51/22

Abstract: A relay for switching an electrical signal includes switching elements, an actuator for closing the switch, and an actuator for opening the switch, the latter two of which are mechanically decoupled when the relay is in a mechanical rest position. When a relay close signal is applied, the closing actuator electrostatically drives the switching elements to complete a signal path between two terminals for the switched signal. In the process of closing the switch, the opening actuator remains stationary, i.e., no mass is displaced. Application of a switch open signal electrostatically drives the opening actuator, optionally in combination with a mechanical restoring force on the closing actuator, to open the switch to break the signal conduction path for the switched signal.

公开(公告)号：WO2007061756A2

公开(公告)日：2007-05-31

申请号：PCT/US2006044517

申请日：2006-11-16

Applicant: KIONIX INC ,  ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

IPC: G01P15/18 ,  G01P15/125 ,  H01L21/00

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0828

Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

Abstract translation: 在本发明的一个实施例中，提供了一种微机电（MEMS）加速计，其包括衬底，第一传感器和第二传感器。 第一传感器被配置为测量沿平行于衬底平面的第一轴的加速度。 第二传感器配置为测量沿垂直于基板平面的轴的加速度。 第二传感器包括第一梁，第二梁和单个支撑结构。 单个支撑结构相对于衬底支撑第一和第二梁，其中第一和第二梁包围第一传感器。

公开(公告)号：CA2467503C

公开(公告)日：2009-12-22

申请号：CA2467503

申请日：2002-10-16

Applicant: KIONIX INC

Inventor： MILLER SCOTT A ,  JOHNSON WENDY JO H ,  ADAMS SCOTT G

IPC: G01P15/125 ,  G01P9/04 ,  G01P15/08 ,  H01L29/00

Abstract: An accelerometer (100) comprising a silicon wafer is etched to form a fixed portion (400), a movable portion (300), and a resilient coupling (120) between, the fixed and movable portions generally arranged in the plane of t he wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restor es the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of t he first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

公开(公告)号：NO20073803L

公开(公告)日：2007-10-17

申请号：NO20073803

申请日：2007-07-20

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

IPC: G01P15/125 ,  G01P15/18

Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.

公开(公告)号：EP1446671A4

公开(公告)日：2009-02-18

申请号：EP02789205

申请日：2002-10-16

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  JOHNSON WENDY JO H

IPC: G01P9/04 ,  G01P15/125 ,  G01P15/08 ,  H01L29/00

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: An accelerometer. A silicon wafer is etched to form a fixed portion, a movable portion, and a resilient coupling between, the fixed and movable portions generally arranged in the plane of the wafer, the mass of the movable portion being concentrated on one side of the resilient coupling. One of the fixed and moveable portions of the silicon structure includes a first electrode. The other of the fixed and moveable portions includes a second electrode oriented parallel to the axis of acceleration, and an electrically-conductive layer electrically connected as a third electrode coplanar and mechanically coupled with the second electrode. The second and third electrodes are arranged in capacitive opposition to the first electrode, the capacitance between the first electrode and third electrode increasing as the movable portion moves in a direction along the axis of acceleration relative to the fixed portion and decreasing as the movable portion moves in an opposite direction. A resilient coupling retains the first and third electrodes in capacitive opposition to each other across a capacitance gap while allowing motion of the first electrode relative to the second and third electrodes in response to acceleration along an axis of acceleration perpendicular to the plane of the wafer, and resiliently restores the first electrode to an equilibrium position when the acceleration ceases. The second electrode is in opposition to a majority of the surface area of the first electrode when the electrodes are in the equilibrium position. Capacitance between the first and third electrodes is measured to obtain a measurement of acceleration along the axis.

Abstract translation: 加速度计。 蚀刻硅晶片以形成固定部分，可移动部分以及通常布置在晶片的平面内的固定部分和可移动部分之间的弹性耦合，可移动部分的质量集中在弹性耦合件的一侧上 。 硅结构的固定部分和可移动部分之一包括第一电极。 固定部分和可移动部分中的另一个包括平行于加速轴取向的第二电极和作为与第二电极机械耦合的共面的第三电极电连接的导电层。 第二电极和第三电极与第一电极电容性地相对设置，第一电极与第三电极之间的电容随着可移动部分相对于固定部分沿着加速度轴线的方向移动而增加并且随着可移动部分移动而减小 在相反的方向。 弹性联接器保持第一和第三电极跨越电容间隙彼此电容性地相反，同时响应于沿着垂直于晶片平面的加速轴的加速度允许第一电极相对于第二和第三电极的运动， 并且在加速停止时将第一电极弹性恢复到平衡位置。 当电极处于平衡位置时，第二电极与第一电极的大部分表面区域相对。 测量第一和第三电极之间的电容以获得沿轴的加速度的测量结果。

公开(公告)号：CA2681413A1

公开(公告)日：2008-10-09

申请号：CA2681413

申请日：2008-03-27

Applicant: KIONIX INC

Inventor： MILLER SCOTT A ,  KIM DONG YOON

IPC: G01P15/18

Abstract: A system (10) and method detect freefall associated with an object that i s spinning or tumbling as it falls. Two tri-axis accelerometers (14, 16) pro vide inputs to an algorithm (28) that detects the freefall of a spinning obj ect that would not otherwise be detected by a conventional freefall detectio n system, due to the centrifugal and centripetal forces being placed on the falling object as it spins. The system can be used to detect the freefall of portable devices with onboard memory or hard disk drives, allowing the devi ces to have time to park the read/write head and reduce the potential of los ing data that can be damaged by impact. This freefall detection system may b e applied to such portable devices as notebook computers, PDAs, MP3 players, digital cameras, mobile phones and even automobiles.

公开(公告)号：NO20073803A

公开(公告)日：2007-10-17

申请号：NO20073803

申请日：2007-07-20

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

IPC: G01P15/18 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0828