公开(公告)号：JPH08148432A

公开(公告)日：1996-06-07

申请号：JP30654494

申请日：1994-12-09

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： BOKU YASUHIRO ,  KAWA MASATOSHI ,  BOKU SEICHIYUU ,  RI KAZUTSUNE

IPC: H01L21/203 ,  C01B3/00 ,  C23C16/00 ,  C23C16/452 ,  G21K5/00

Abstract: PURPOSE: To provide a hydrogen atomic surface-adsorbing device using a nozzle, having a maximum efficiency which makes hydrogen molecules collide with the heated nozzle in a superhigh vacuum to separate them into hydrogen atoms and makes a semiconductor or metal adsorb the atoms on the surface thereof with high efficiency. CONSTITUTION: An electron beam acceleration system is changed into a direct electrical resistance system to simplify a structure, and a shape of a nozzle 120 for passing hydrogen molecules to separate them into hydrogen atoms is improved from a simple cylindrical shape to a zigzag shape for maximizing a collision rate, and a tantalum cover 300 is provided in front of the nozzle 120 to prevent the surface of a specimen from being heating by the heat radiated by the heated nozzle 120.