Method of forming oxide based nano structures

    公开(公告)号:GB2444586A

    公开(公告)日:2008-06-11

    申请号:GB0718766

    申请日:2007-09-26

    Abstract: A method of forming an oxide-based nano-structured material by growing a nano-structured material using a nano-nucleus having the same composition as the desired oxide-based nano-structured material. A solution is coated on a substrate by dipping, spin or spray coating. The solution includes an organic precursor containing a transition metal or a semi metal and an organic solvent in which the organic precursor is dissolved. A metal oxide nano-nucleus is then formed on the substrate by annealing the substrate. A metal oxide nano-structured material is formed by growing the nano-nucleus while supplying a reaction precursor containing the same metal as the formed oxide into the nano-nucleus. Methods used for this step include PVD, CVD and sol gel processes. The nano-structured material is finally annealed. The structure can be used in an electronic device such as a diode, a display, FET, SET or a battery.

    METHOD OF FORMING OXIDE-BASED NANO-STRUCTURED MATERIAL

    公开(公告)号:SG143122A1

    公开(公告)日:2008-06-27

    申请号:SG2007089683

    申请日:2007-09-28

    Abstract: METHOD OF FORMING OXIDE-BASED NANO-STRUCTURED MATERIAL Provided is a method of forming an oxide-based nano-structured material including growing a nano- structured material using a nano-nucleus having the same composition as the desired oxide-based nano- structured material. A solution is coated on a substrate, the solution including: an organic precursor containing M which is a transition metal or a semi metal; and an organic solvent in which the organic precursor is dissolved. A nano-nucleus having a composition of MxOy is formed on the substrate by annealing the substrate. A nano-structured material having a composition of MxOy is formed by growing the nano-nucleus while supplying a reaction precursor containing M into the nano-nucleus, and the nano- structured material is annealed.

    3.
    发明专利
    未知

    公开(公告)号:AT370505T

    公开(公告)日:2007-09-15

    申请号:AT05105264

    申请日:2005-06-15

    Abstract: Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb (10) fixed on a substrate; a movable comb (11) disposed separately from the substrate; and a spring (12) connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer (111d) in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.

    Structure for optical device and method of fabricating the same

    公开(公告)号:SG122872A1

    公开(公告)日:2006-06-29

    申请号:SG200504085

    申请日:2005-06-24

    Abstract: Provided are a structure for an optical device and method of fabricating the same. The structure includes: a light scattering layer producing nanoparticles due to externally provided thermal energy; a protective layer protecting the light scattering layer; and a capping layer disposed between the light scattering layer and the protective layer. As the light scattering layer is formed of nitride-oxide, an energy gap is increased to make the structure suitable for a high-speed electronic circuit, and a desired stoichiometric ratio can be easily obtained. Also, the capping layer prevents crystalline mismatch, thus the non-uniformity of elements is inhibited to maintain a stoichiometric state. As a result, a high-integrated high-speed electronic circuit, which is excellent in uniformity and reproducibility, can be easily embodied.

    5.
    发明专利
    未知

    公开(公告)号:DE602005002010T2

    公开(公告)日:2008-05-15

    申请号:DE602005002010

    申请日:2005-06-15

    Abstract: Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb (10) fixed on a substrate; a movable comb (11) disposed separately from the substrate; and a spring (12) connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer (111d) in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.

    6.
    发明专利
    未知

    公开(公告)号:DE602005002010D1

    公开(公告)日:2007-09-27

    申请号:DE602005002010

    申请日:2005-06-15

    Abstract: Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb (10) fixed on a substrate; a movable comb (11) disposed separately from the substrate; and a spring (12) connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer (111d) in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.

    Microelectromechanical system actuator

    公开(公告)号:SG123655A1

    公开(公告)日:2006-07-26

    申请号:SG200504101

    申请日:2005-06-24

    Abstract: Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb (10) fixed on a substrate; a movable comb (11) disposed separately from the substrate; and a spring (12) connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer (111d) in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.

    Image sensor and manufacturing method at the same
    8.
    发明公开
    Image sensor and manufacturing method at the same 审中-公开
    图像传感器及其制造方法

    公开(公告)号:KR20120063855A

    公开(公告)日:2012-06-18

    申请号:KR20100125013

    申请日:2010-12-08

    CPC classification number: H01L27/14625

    Abstract: PURPOSE: An image sensor and a manufacturing method thereof are provided to prevent distortion of light due to spherical aberration by forming a prism between a photoelectric conversion element and a color filter layer. CONSTITUTION: A plurality of photoelectric conversion elements(20) is formed on a substrate(10). A optical waveguide layer(50) is formed on the plurality of photoelectric conversion elements. The plurality of photoelectric conversion elements changes light applied through the optical waveguide layer into an electric signal. A color filter layer(70) is formed on the optical waveguide layer. A plurality of prisms(60) is formed between the color filter layer and the optical waveguide layer. The plurality of prisms is formed into an inverted pyramid shape or reversed trapezoidal shape.

    Abstract translation: 目的:提供一种图像传感器及其制造方法,以通过在光电转换元件和滤色器层之间形成棱镜来防止由于球面像差引起的光的变形。 构成:在基板(10)上形成多个光电转换元件(20)。 在多个光电转换元件上形成光波导层(50)。 多个光电转换元件将通过光波导层施加的光改变为电信号。 滤光层(70)形成在光波导层上。 在滤色器层和光波导层之间形成多个棱镜(60)。 多个棱镜形成倒棱锥形或倒梯形。

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