Thickness measuring apparatus and thickness measuring method

    公开(公告)号:US09927224B2

    公开(公告)日:2018-03-27

    申请号:US14988332

    申请日:2016-01-05

    Abstract: A thickness measuring apparatus and a thickness measuring method. The thickness measuring apparatus includes a light source outputting an extended monochromatic light with coherence; a collimating lens converting output light of the light source into incident beam of parallel ray; a beam splitter reflecting and providing the incident beam to a measurement target and transmitting first reflection light reflected on a top surface of the measurement target and second reflection light reflected on a bottom surface of the measurement target; an imaging lens disposed between the measurement target and the beam splitter with a predetermined focal distance to receive and provide the incident beam to a measurement position of the measurement target disposed on the focal distance; a camera photographing an interference fringe formed by the first and second reflection lights and outputting an interference fringe image; and a processing part.

    THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD
    4.
    发明申请
    THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD 有权
    厚度测量装置和厚度测量方法

    公开(公告)号:US20160202038A1

    公开(公告)日:2016-07-14

    申请号:US14988332

    申请日:2016-01-05

    Abstract: A thickness measuring apparatus and a thickness measuring method. The thickness measuring apparatus includes a light source outputting an extended monochromatic light with coherence; a collimating lens converting output light of the light source into incident beam of parallel ray; a beam splitter reflecting and providing the incident beam to a measurement target and transmitting first reflection light reflected on a top surface of the measurement target and second reflection light reflected on a bottom surface of the measurement target; an imaging lens disposed between the measurement target and the beam splitter with a predetermined focal distance to receive and provide the incident beam to a measurement position of the measurement target disposed on the focal distance; a camera photographing an interference fringe formed by the first and second reflection lights and outputting an interference fringe image; and a processing part.

    Abstract translation: 厚度测量装置和厚度测量方法。 厚度测量装置包括:输出具有相干性的扩展单色光的光源; 准直透镜将光源的输出光转换为入射光束的平行光线; 将入射光束反射并提供给测量对象并透射在测量对象的顶表面上反射的第一反射光和在测量对象的底表面上反射的第二反射光的分束器; 成像透镜,其设置在所述测量对象物和所述分束器之间,具有预定的焦距,以接收并将所述入射光束提供给设置在所述焦距上的所述测量对象的测量位置; 拍摄由第一和第二反射光形成的干涉条纹并输出干涉条纹图像的相机; 和处理部。

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