Thickness measuring apparatus and thickness measuring method

    公开(公告)号:US09927224B2

    公开(公告)日:2018-03-27

    申请号:US14988332

    申请日:2016-01-05

    Abstract: A thickness measuring apparatus and a thickness measuring method. The thickness measuring apparatus includes a light source outputting an extended monochromatic light with coherence; a collimating lens converting output light of the light source into incident beam of parallel ray; a beam splitter reflecting and providing the incident beam to a measurement target and transmitting first reflection light reflected on a top surface of the measurement target and second reflection light reflected on a bottom surface of the measurement target; an imaging lens disposed between the measurement target and the beam splitter with a predetermined focal distance to receive and provide the incident beam to a measurement position of the measurement target disposed on the focal distance; a camera photographing an interference fringe formed by the first and second reflection lights and outputting an interference fringe image; and a processing part.

    THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD
    6.
    发明申请
    THICKNESS MEASURING APPARATUS AND THICKNESS MEASURING METHOD 有权
    厚度测量装置和厚度测量方法

    公开(公告)号:US20160202038A1

    公开(公告)日:2016-07-14

    申请号:US14988332

    申请日:2016-01-05

    Abstract: A thickness measuring apparatus and a thickness measuring method. The thickness measuring apparatus includes a light source outputting an extended monochromatic light with coherence; a collimating lens converting output light of the light source into incident beam of parallel ray; a beam splitter reflecting and providing the incident beam to a measurement target and transmitting first reflection light reflected on a top surface of the measurement target and second reflection light reflected on a bottom surface of the measurement target; an imaging lens disposed between the measurement target and the beam splitter with a predetermined focal distance to receive and provide the incident beam to a measurement position of the measurement target disposed on the focal distance; a camera photographing an interference fringe formed by the first and second reflection lights and outputting an interference fringe image; and a processing part.

    Abstract translation: 厚度测量装置和厚度测量方法。 厚度测量装置包括:输出具有相干性的扩展单色光的光源; 准直透镜将光源的输出光转换为入射光束的平行光线; 将入射光束反射并提供给测量对象并透射在测量对象的顶表面上反射的第一反射光和在测量对象的底表面上反射的第二反射光的分束器; 成像透镜,其设置在所述测量对象物和所述分束器之间,具有预定的焦距,以接收并将所述入射光束提供给设置在所述焦距上的所述测量对象的测量位置; 拍摄由第一和第二反射光形成的干涉条纹并输出干涉条纹图像的相机; 和处理部。

    ABSOLUTE POSITION MEASUREMENT METHOD, ABSOLUTE POSITION MEASUREMENT APPARATUS AND SCALE
    7.
    发明申请
    ABSOLUTE POSITION MEASUREMENT METHOD, ABSOLUTE POSITION MEASUREMENT APPARATUS AND SCALE 有权
    绝对位置测量方法,绝对位置测量装置和尺寸

    公开(公告)号:US20150069225A1

    公开(公告)日:2015-03-12

    申请号:US14540743

    申请日:2014-11-13

    Abstract: Provided are an absolute position measurement method, an absolute position measurement apparatus, and a scale. The scale includes a scale pattern formed by replacing repeatedly arranged pseudo-random-codes with a sequence of a linear feedback shift register of N stages using a first symbol with first width representing a first state and a second symbol with second width representing a second state. The first is divided into two or more first symbol areas of different structures, and the second symbol is divided into two or more second symbol areas of different structures. There is at least one overlap area in which the first symbol and the second symbol overlap each other to have the same structure.

    Abstract translation: 提供绝对位置测量方法,绝对位置测量装置和刻度。 标度包括通过使用具有表示第一状态的第一宽度的第一符号和代表第二状态的第二宽度的第二符号将具有N级的线性反馈移位寄存器的序列的重复排列的伪随机码替换的比例模式 。 第一符号区域分为两个或更多个不同结构的第一符号区域,第二符号被划分为两个或更多个不同结构的第二符号区域。 存在至少一个重叠区域,其中第一符号和第二符号彼此重叠以具有相同的结构。

Patent Agency Ranking