METHODS FOR MANUFACTURING A MICROSTRUCTURE
    2.
    发明申请
    METHODS FOR MANUFACTURING A MICROSTRUCTURE 审中-公开
    制造微结构的方法

    公开(公告)号:WO2009048321A3

    公开(公告)日:2009-06-04

    申请号:PCT/NL2008000217

    申请日:2008-10-03

    Abstract: Methods for manufacturing a microstructure, wherein use is made of powder blasting and/or etching and a single mask layer with openings and structures of varying dimensions, characterized in that the mask layer at least at one given point in time has been wholly worn away within at least one region by mask erosion while the microstructure is not yet wholly realized. Use can be made of a combination of 'vertical' erosion, i.e. parallel to the thickness direction, and 'horizontal' erosion, i.e. perpendicularly of the thickness direction, of the mask layer. The horizontal mask erosion occurs at the edges of the mask structure. By selecting the size of the mask openings and the mask structures in a correct manner the mask layer in a region with smaller mask structures will be fully worn away at a given point in time, while in another region with larger structures the mask layer still has sufficient thickness to serve as protection against the powder blasting or etching.

    Abstract translation: 用于制造微结构的方法,其中使用粉末喷射和/或蚀刻以及具有不同尺寸的开口和结构的单个掩模层,其特征在于,至少在一个给定时间点的掩模层已经完全磨损在内部 至少一个区域通过掩模侵蚀而微结构尚未完全实现。 使用可以由掩模层的“垂直”侵蚀,即平行于厚度方向和“水平”侵蚀,即垂直于厚度方向的侵蚀的组合。 在掩模结构的边缘处发生水平掩模腐蚀。 通过以正确的方式选择掩模开口和掩模结构的尺寸,具有较小掩模结构的区域中的掩模层将在给定时间点被完全磨损,而在具有较大结构的另一区域中,掩模层仍具有 足够的厚度以作为防止粉末爆破或蚀刻的保护。

    METHOD OF BONDING TWO SUBSTRATES AND DEVICE MANUFACTURED THEREBY
    4.
    发明申请
    METHOD OF BONDING TWO SUBSTRATES AND DEVICE MANUFACTURED THEREBY 审中-公开
    结合两个基板的方法和由其制造的器件

    公开(公告)号:WO2013095147A1

    公开(公告)日:2013-06-27

    申请号:PCT/NL2012050922

    申请日:2012-12-21

    Abstract: The invention relates to method for bonding at least two substrates, for example made from glass, silicon, ceramic,aluminum, or boron, by using an intermediate thin film metal layer for providing the bonding, said method comprising the following steps of: a) providing said two substrates; b) depositing said thin film metal layer on at least a part of a surface of a first substrate of the two substrates; c) bringing a surface of the second substrate into contact with said thin film metal layer on said surface of the first substrate such that a bonding between the second substrate and the thin film metal layer on the first substrate is provided; and d) at least locally strengthening the bonding between the second substrate and the thin film metal layer on the first substrate. The invention also relates to a device comprising two substrates, for example made from glass, silicon, ceramic, aluminum, or boron, and an intermediate thin film metal layer.

    Abstract translation: 本发明涉及用于通过使用用于提供结合的中间薄膜金属层来结合例如由玻璃,硅,陶瓷,铝或硼制成的至少两个基板的方法,所述方法包括以下步骤:a) 提供所述两个衬底; b)在所述两个衬底中的第一衬底的至少一部分表面上沉积所述薄膜金属层; c)使第二衬底的表面与第一衬底的所述表面上的所述薄膜金属层接触,使得提供第二衬底和第一衬底上的薄膜金属层之间的结合; 以及d)至少局部地加强第二衬底和第一衬底上的薄膜金属层之间的结合。 本发明还涉及包括例如由玻璃,硅,陶瓷,铝或硼制成的两个基板和中间薄膜金属层的器件。

    DEVICE AND METHOD FOR ACTIVATING A CAPILLARY-STOP VALVE OF A DEVICE.

    公开(公告)号:NL2009517C2

    公开(公告)日:2014-03-27

    申请号:NL2009517

    申请日:2012-09-25

    Abstract: The invention relates to a device (20), comprising: a liquid container (21) for containing a liquid; a capillary-stop valve (22) that is in medium through flow connection with said liquid container (21) for stopping said liquid in said container from flowing out of said container via said capillary-stop valve (22); a first electrode (7) being arranged such that in use said first electrode is in contact with said liquid in said liquid container; a second electrode (2) that is spaced apart from said capillary-stop valve by an electrically insulating medium gap (24), and a voltage source (V) connected to said first and second electrode which is activatable for applying an electric potential difference at the first and second electrode such that the liquid in the liquid container is attracted in the direction of said second electrode so as to allow the liquid to overcome the stopping effect of the capillary-stop valve for discharging liquid from said liquid container via said capillary-stop valve. The invention also relates to a method for activating a capillary-stop valve of a device.

    DEVICE AND METHOD FOR MEASURING A VOLUME OF A LIQUID AND METHOD AND DEVICE FOR CALIBRATING A LIQUID DISPENSING SYSTEM.

    公开(公告)号:NL2012023C2

    公开(公告)日:2015-06-26

    申请号:NL2012023

    申请日:2013-12-24

    Abstract: The invention relates to a device for measuring a volume of a liquid, said device comprising:—a receptacle for receiving said liquid, said receptacle comprising an inlet opening and an outlet opening, and—a capillary channel having capillary action, which capillary channel has a predetermined internal transverse cross-section, wherein an inlet opening of the capillary channel at an first end thereof is in liquid through flow connection with the outlet opening of the receptacle and wherein the other, second end of the capillary channel comprises an opening; wherein:—the inlet opening of the receptacle has a larger transverse cross-section than the inlet opening of said capillary channel, and—a length of a liquid slug in the capillary channel is a measure for said volume. The invention further relates to a method for measuring a volume of a liquid using such a device, a method for calibrating a liquid dispensing system using such a device, a calibrating system for calibrating a liquid dispensing system using such a device and a support for supporting a plurality of such devices.

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