公开(公告)号：WO2012070021A1

公开(公告)日：2012-05-31

申请号：PCT/IB2011/055309

申请日：2011-11-25

Applicant: STMICROELECTRONICS S.R.L. ,  POLITECNICO DI MILANO ,  COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

IPC: G01P15/097 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

Abstract: A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (a x , a y ); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N 1 , N 2 ) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).

Abstract translation: 用于MEMS共振双轴加速度计（16）的微机电检测结构（1; 1'）设置有：惯性块（2; 2'），其通过弹性元件（8）锚固到基底（30） 一种悬挂在基板（30）上方的方式，弹性元件（8）使惯性质量（2; 2'）沿着第一检测轴（x）和第二检测轴线 y），其响应于相应的线性外部加速度（ax，ay）属于所述惯性质量（2; 2'）的主延伸的平面（xy）; 以及至少一个第一谐振元件（10a）和一个第二谐振元件（10b），它们分别具有沿着第一检测轴（x）和第二检测轴（y）的相应的纵向延伸，并且机械耦合 通过所述弹性元件（8）中的相应弹性元件（8）的惯性质量块（2; 2'）以当所述惯性质量分别沿着所述第一检测轴线移动时经受相应的轴向应力（N1，N2） x）和第二检测轴（y）。

公开(公告)号：WO2013030798A1

公开(公告)日：2013-03-07

申请号：PCT/IB2012/054497

申请日：2012-08-31

Applicant: STMicroelectronics S.r.l. ,  POLITECNICO DI MILANO ,  COMI, Claudia ,  CORIGLIANO, Alberto ,  ZERBINI, Sarah

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  ZERBINI, Sarah

IPC: G01P15/097

CPC classification number: G01P15/0975 ,  G01P15/097

Abstract: A detection, structure (1) for a z-axis resonant accelerometer (24) is provided with an inertial mass (2) anchored to a substrate (20) by means of elastic anchorage elements (6) so as to be suspended above the substrate (20) and perform an inertial movement of rotation about a first axis of rotation (A) belonging to a plane (xy) of main extension of the inertial mass (2), in response to an external acceleration (a-) acting along a vertical axis (z) transverse with respect to the plane (xy); and a first resonator element (10a) and a second resonator element (10b), which are mechanically coupled to the inertial mass (2) by respective elastic supporting elements (16), which enable a movement of rotation about a second axis of rotation (B) and a third axis of rotation (C), in a resonance condition. In particular, the second axis of rotation (B) and the third axis of rotation (C) are parallel to one another, and are moreover parallel to the first axis of rotation (A) of the inertial mass (2).

Abstract translation: 用于z轴共振加速度计（24）的检测结构（1）具有通过弹性锚定元件（6）锚定到基底（20）上的惯性质量块（2），以悬浮在基底上方 （20），并且响应于沿着惯性质量（2）的主延伸的平面（xy）的旋转的第一旋转轴线（A），沿着沿着惯性质量 垂直轴（z）相对于平面（xy）横向; 以及通过相应的弹性支撑元件（16）机械耦合到惯性块（2）的第一谐振器元件（10a）和第二谐振元件（10b），其使得能够围绕第二旋转轴线旋转 B）和第三旋转轴（C）。 特别地，第二旋转轴线（B）和第三旋转轴线（C）彼此平行，并且平行于惯性质量块（2）的第一旋转轴线（A）。

公开(公告)号：EP3312559A1

公开(公告)日：2018-04-25

申请号：EP17177405.2

申请日：2017-06-22

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  FALORNI, Luca Giuseppe ,  COMI, Claudia ,  ZEGA, Valentina

IPC: G01C19/574

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope (10), having two mobile masses (11A, 11B); a first and a second driving body (31A, 31B) coupled to the mobile masses (11A, 11B) through elastic elements (41A, 41B) rigid in a first direction (X) and compliant in a second direction transverse to the first direction (Y); and a third and a fourth driving body (32A, 32B) coupled to the mobile masses through elastic elements (42A, 42B) rigid in the second direction and compliant in the first direction (X). A first and a second driving element (59A) are coupled to the first and second driving bodies (31A, 31B) for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element (63A) are coupled to the third and fourth driving bodies (32A, 32B) for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element (68A) is coupled to the first and second mobile masses for causing a translation in a third direction (Z), in phase opposition. Movement-sensing electrodes (60A, 64A, 69A) generate frequency signals as a function of external angular velocities.

Abstract translation: 一种频率调制MEMS三轴陀螺仪（10），具有两个移动质量块（11A，11B）; 第一和第二驱动体（31A，31B），其通过在第一方向（X）上刚性且在横向于第一方向（X）的第二方向上柔性的弹性元件（41A，41B） Y）; 以及通过在第二方向上刚性且在第一方向（X）上柔性的弹性元件（42A，42B）联接到移动质量块的第三和第四驱动体（32A，32B）。 第一和第二驱动元件（59A）联接到第一和第二驱动体（31A，31B），用于使可动质量块在第一方向上反相平移。 第三和第四驱动元件（63A）联接到第三和第四驱动体（32A，32B），用于使可动质量块在第二方向上平移并且反相。 平面外驱动元件（68A）联接到第一和第二可动质量块上，用于在第三方向（Z）上进行反相的平移。 运动感测电极（60A，64A，69A）产生作为外部角速度的函数的频率信号。

公开(公告)号：EP2643702B1

公开(公告)日：2015-08-05

申请号：EP11799844.3

申请日：2011-11-25

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

IPC: G01P15/097 ,  G01P15/18 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

公开(公告)号：EP2643702A1

公开(公告)日：2013-10-02

申请号：EP11799844.3

申请日：2011-11-25

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

IPC: G01P15/097 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

Abstract: A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (a
x , a
y ); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N
1 , N
2 ) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).

Abstract translation: 一种用于MEMS谐振双轴加速度计（16）的微机电检测结构（1; 1'）设有：惯性质量块（2; 2'），借助于弹性元件（8）固定在基板（30） （30）上方悬挂的方式，弹性元件（8）能够使惯性质量块（2; 2'）沿着第一检测轴线（x）和第二检测轴线 y）;响应于相应的线性外部加速度（ax，ay），所述惯性质量（2; y'）属于所述惯性质量（2; 2'）的主延伸的平面（xy）; 和至少一个第一谐振元件（10a）和一个第二谐振元件（10b），其分别沿着第一检测轴（x）和第二检测轴（y）具有各自的纵向延伸， （2; 2'）通过相应的一个弹性元件（8），以便当惯性质量分别沿着第一轴线（X 1，X 2）移动时经历相应的轴向应力（N 1，N 2） 检测（x）和第二检测轴（y）。