公开(公告)号：WO2012070021A1

公开(公告)日：2012-05-31

申请号：PCT/IB2011/055309

申请日：2011-11-25

Applicant: STMICROELECTRONICS S.R.L. ,  POLITECNICO DI MILANO ,  COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

IPC: G01P15/097 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

Abstract: A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (a x , a y ); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N 1 , N 2 ) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).

Abstract translation: 用于MEMS共振双轴加速度计（16）的微机电检测结构（1; 1'）设置有：惯性块（2; 2'），其通过弹性元件（8）锚固到基底（30） 一种悬挂在基板（30）上方的方式，弹性元件（8）使惯性质量（2; 2'）沿着第一检测轴（x）和第二检测轴线 y），其响应于相应的线性外部加速度（ax，ay）属于所述惯性质量（2; 2'）的主延伸的平面（xy）; 以及至少一个第一谐振元件（10a）和一个第二谐振元件（10b），它们分别具有沿着第一检测轴（x）和第二检测轴（y）的相应的纵向延伸，并且机械耦合 通过所述弹性元件（8）中的相应弹性元件（8）的惯性质量块（2; 2'）以当所述惯性质量分别沿着所述第一检测轴线移动时经受相应的轴向应力（N1，N2） x）和第二检测轴（y）。

公开(公告)号：EP2643702B1

公开(公告)日：2015-08-05

申请号：EP11799844.3

申请日：2011-11-25

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

IPC: G01P15/097 ,  G01P15/18 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

公开(公告)号：EP2643702A1

公开(公告)日：2013-10-02

申请号：EP11799844.3

申请日：2011-11-25

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

IPC: G01P15/097 ,  G01P15/18

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

Abstract: A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (a
x , a
y ); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N
1 , N
2 ) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).

Abstract translation: 一种用于MEMS谐振双轴加速度计（16）的微机电检测结构（1; 1'）设有：惯性质量块（2; 2'），借助于弹性元件（8）固定在基板（30） （30）上方悬挂的方式，弹性元件（8）能够使惯性质量块（2; 2'）沿着第一检测轴线（x）和第二检测轴线 y）;响应于相应的线性外部加速度（ax，ay），所述惯性质量（2; y'）属于所述惯性质量（2; 2'）的主延伸的平面（xy）; 和至少一个第一谐振元件（10a）和一个第二谐振元件（10b），其分别沿着第一检测轴（x）和第二检测轴（y）具有各自的纵向延伸， （2; 2'）通过相应的一个弹性元件（8），以便当惯性质量分别沿着第一轴线（X 1，X 2）移动时经历相应的轴向应力（N 1，N 2） 检测（x）和第二检测轴（y）。

公开(公告)号：WO2008012846A1

公开(公告)日：2008-01-31

申请号：PCT/IT2006/000576

申请日：2006-07-26

Applicant: STMICROELECTRONICS S.R.L. ,  MERASSI, Angelo ,  CORTESE, Mario, Francesco ,  VIOLA, Fultio ,  SIMONI, Barbara ,  RUSCONI CLERICI BELTRAMI, Andrea

Inventor： MERASSI, Angelo ,  CORTESE, Mario, Francesco ,  VIOLA, Fultio ,  SIMONI, Barbara ,  RUSCONI CLERICI BELTRAMI, Andrea

IPC: B81B7/00 ,  G01P15/08

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0828

Abstract: Described herein is a microelectromechanical device (10) having a mobile mass (12) that undergoes a movement, in particular a spurious movement, in a first direction (z) in response to an external event; the device moreover has a stopper structure (14, 20) configured so as to stop said spurious movement. In particular, a stopper element (20) is fixedly coupled to the mobile mass (12) and is configured so as to abut against a stopper mass (14) in response to the spurious movement, thereby stopping it. In detail, the stopper element (20) is arranged on the opposite side of the stopper mass (14) with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass (12) and extends in the space occupied by the stopper mass, in the first direction (z).

Abstract translation: 这里描述的是具有响应于外部事件在第一方向（z）上经历移动，特别是杂散运动的移动质量块（12）的微机电装置（10）。 该装置还具有构造成停止所述杂散运动的止动结构（14,20）。 特别地，止动元件（20）固定地联接到移动质量块（12），并且被配置为响应于伪运动而抵靠止动块（14），从而停止它。 详细地说，止动元件（20）相对于杂散运动的方向设置在止动块（14）的相对侧上，从可移动质量块（12）所占据的空间突出，并在占据的空间 通过止动块在第一方向（z）上。