公开(公告)号：EP1435533A1

公开(公告)日：2004-07-07

申请号：EP02425811.3

申请日：2002-12-30

Applicant: STMicroelectronics S.r.l.

Inventor： Montanini, Pietro ,  Di Turi, Luigi ,  Favretto, Ivana ,  Mottura, Marta

IPC: G02B6/12

CPC classification number: G02B6/136 ,  G02B6/122 ,  G02B6/13 ,  G02B6/132 ,  G02B2006/12173

Abstract: A method of producing a waveguide (20) with a rounded core integrated in a substrate (1), including phases of:

forming a lower cladding (3) of the guide supported by the substrate;
etching said lower cladding to define a concave region delimited by a curved surface (11) and extending along the axis of propagation;
providing on a free surface (12) of said lower cladding a layer (13) of doped material filling the concave region (4) to form a first portion (17) of the core in contact with the curved surface;
etching the layer of doped material so that only sufficient volume of doped material for the waveguide core remains;
heating the doped material so that it forms a rounded core due to surface tension and the concave region of the cladding.

Abstract translation: 一种制造具有集成在衬底（1）中的圆形芯的波导（20）的方法，包括：形成由衬底支撑的引导件的下包层（3）; 蚀刻所述下部包层以限定由弯曲表面（11）限定并沿着传播轴线延伸的凹形区域; 在所述下包层的自由表面（12）上提供填充所述凹区（4）的掺杂材料层（13），以形成与所述弯曲表面接触的所述芯的第一部分（17）; 蚀刻掺杂材料层，使得仅剩余足够体积的用于波导芯的掺杂材料; 加热掺杂的材料，使得它由于表面张力和包层的凹形区域而形成圆形芯。