公开(公告)号：EP4105167A1

公开(公告)日：2022-12-21

申请号：EP22176138.0

申请日：2022-05-30

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  GATTERE, Gabriele ,  RIANI, Manuel ,  CARMINATI, Roberto

IPC: B81B3/00 ,  G01B11/02 ,  G01S17/88

Abstract: The MEMS actuator (100) is formed by: a substrate (105); a mobile mass (120) that is suspended over the substrate in a first direction (Z) and extends mainly in a plane that defines a second direction (Y) and a third direction (X) perpendicular to the first direction; elastic elements (123A, 123B) arranged between the substrate and the mobile mass and having a first compliance, in a direction parallel to the first direction, lower than a second compliance, in a direction parallel to the second direction; and piezoelectric actuation structures (130A-130D, 135) having a portion fixed with respect to the substrate and a portion configured to deform in the first direction in the presence of an actuation voltage. The MEMS actuator is further formed by movement-transformation structures (126A-126D) coupled to the piezoelectric actuation structures and having an elastic movement-conversion structure (160) arranged between a piezoelectric actuation structure and the mobile mass. The elastic movement-conversion structure is compliant in a plane (YZ) formed by the first and the second directions and has a first principal axis of inertia (Ii) and a second principal axis of inertia (I 2 ) transverse to the first and the second directions.

公开(公告)号：EP4365603A1

公开(公告)日：2024-05-08

申请号：EP23204864.5

申请日：2023-10-20

Applicant: STMicroelectronics S.r.l.

Inventor： RIANI, Manuel ,  GATTERE, Gabriele ,  RIZZINI, Francesco

IPC: G01P15/125 ,  G01P15/097 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P2015/081420130101 ,  G01P2015/087120130101 ,  G01P2015/085720130101

Abstract: The MEMS device (20) is formed by a substrate (21) and a movable structure (22) suspended on the substrate. The movable structure has a first mass (28), a second mass (29A) and a first elastic group (30A) mechanically coupled between the first and the second masses. The first elastic group is compliant along a first direction (Y). The first mass is configured to move with respect to the substrate along the first direction. The MEMS device also has a second elastic group (23) mechanically coupled between the substrate and the movable structure and compliant along the first direction; and an anchoring control structure (33A, 40A) fixed to the substrate, capacitively coupled to the second mass and configured to exert an electrostatic force on the second mass along the first direction. The anchoring control structure controls the MEMS device in a first operating state, wherein the second mass is free to move with respect to the substrate along the first direction, and in a second operating state, wherein the anchoring control structure applies a pull-in force on the second mass which anchors the second mass to the anchoring control structure.

公开(公告)号：EP4223691A1

公开(公告)日：2023-08-09

申请号：EP23153332.4

申请日：2023-01-25

Applicant: STMicroelectronics S.r.l.

Inventor： OPRENI, Andrea ,  ZEGA, Valentina ,  FRANGI, Attilio ,  GATTERE, Gabriele ,  RIANI, Manuel

IPC: B81B3/00

Abstract: MEMS actuator (20) including: a substrate (21); a first and a second semiconductive layer (31,32); a frame (27) including transverse regions (62) formed by the second semiconductive layer (32), elongated parallel to a first direction (X) and offset along a second direction (Y), the frame (27) being movable parallel to the second direction (Y). The MEMS actuator (20) includes, for each transverse region (62): corresponding front rotor regions (65), which are fixed to the transverse region (62) and are suspended above the substrate (21); a first and a second stator region (70,72), which are formed by the first semiconductive layer (31) in such a way that, when the frame (27) is in rest position, the transverse region (62) is laterally offset with respect to the first and the second stator regions (70,72) and a first front rotor region (65') partially faces the first stator region (70), and in such a way that, during a translation of the frame (27) along the second direction (Y), the first and/or a second front rotor region (65', 65") at least partially face the second stator region (72), when the transverse region (62) begins to superimpose on the first stator region (70).

公开(公告)号：EP4152010A1

公开(公告)日：2023-03-22

申请号：EP22195322.7

申请日：2022-09-13

Applicant: STMicroelectronics S.r.l.

Inventor： ZEGA, Valentina ,  GATTERE, Gabriele ,  FRANGI, Attilio ,  OPRENI, Andrea ,  RIANI, Manuel

IPC: G01P15/097 ,  G01P15/08

Abstract: A detection structure (1) for a vertical-axis resonant accelerometer (32) is provided with: an inertial mass (2), suspended above a substrate (8) and having a window (5) provided therewithin and traversing it throughout a thickness thereof, the inertial mass (2) being coupled to a main anchorage (4), arranged in the window and integral with the substrate, through a first and a second anchoring elastic element (6a, 6b) of a torsional type and defining a rotation axis (A) of the inertial mass, such that they allow the inertial mass an inertial movement of rotation in response to an external acceleration (a ext ) acting along a vertical axis (z); and at least a first resonator element (10a), having longitudinal extension, coupled between the first elastic element and a first constraint element (12a) arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element (14a) which extends below the first resonator element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage (4).