公开(公告)号：EP4242724A1

公开(公告)日：2023-09-13

申请号：EP23158195.0

申请日：2023-02-23

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano

IPC: G02B26/10 ,  G02B26/08

Abstract: A microelectromechanical mirror device (1) has a fixed structure (4) defining an external frame (4') which delimits a cavity (3); an internal frame (7), arranged above the cavity and defining a window (8); a tiltable structure (2) with a reflective surface (2'), arranged in the window and elastically coupled to the internal frame by a first and a second coupling elastic elements (9a, 9b); an actuation structure (10), coupled to the internal frame to cause the rotation, in a decoupled manner, of the tiltable structure around a first and a second rotation axis (SA, FA). The actuation structure has a first pair of driving arms (12a, 12b), elastically coupled to the internal frame and carrying piezoelectric material regions to cause a rotation of the tiltable structure around the first rotation axis; and a further pair of driving arms (12e, 12f), carrying piezoelectric material regions to cause a rotation of the tiltable structure around the second rotation axis and interposed between the fixed structure and the internal frame, to which they are elastically coupled by a first and a second suspension elastic elements (14e, 14f), yielding to torsion around the first rotation axis.

公开(公告)号：EP4082962A1

公开(公告)日：2022-11-02

申请号：EP22169585.1

申请日：2022-04-22

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano

IPC: B81B3/00 ,  G02B26/08

Abstract: A microelectromechanical mirror device (1) is provided with: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting surface (2'), elastically suspended above the cavity and having a main extension in a horizontal plane (xy); a first pair of driving arms (12a, 12b), carrying respective piezoelectric material regions (13) designed to be biased to cause a rotation of the tiltable structure around at least one first rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane, elastically coupled to the tiltable structure; and elastic suspension elements (6a, 6b), which couple the tiltable structure to the fixed structure at the first rotation axis, stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, extending between the tiltable structure and the fixed structure. The elastic suspension elements comprise a first and a second elastic suspension element, wherein a first torsional stiffness of the first elastic suspension element is different from a second torsional stiffness of the second elastic suspension element.

公开(公告)号：EP4261592A9

公开(公告)日：2024-01-10

申请号：EP23164580.5

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano ,  PRELINI, Carlo Luigi ,  AFIFI AFIFI, Tarek

IPC: G02B26/08

Abstract: A microelectromechanical mirror device (20) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity (3) and having a main extension in a horizontal plane (xy); at least one first pair of driving arms (12a, 12b), carrying respective piezoelectric structures (13) which can be biased to generate a driving force such as to cause a rotation of the tiltable structure (2) about a rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane; elastic suspension elements (6a, 6b), which elastically couple the tiltable structure (2) to the fixed structure (4) at the rotation axis (X) and are rigid to movements out of the horizontal plane (xy) and compliant to torsion about the rotation axis (X). In particular, the driving arms (12a, 12b) of the first pair are magnetically coupled to the tiltable structure (2) so as to cause its rotation about the rotation axis (X) by magnetic interaction, following biasing of the respective piezoelectric structures (13) .

公开(公告)号：EP4261592A1

公开(公告)日：2023-10-18

申请号：EP23164580.5

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano ,  PRELINI, Carlo Luigi ,  AFIFI AFIFI, Tarek

IPC: G02B26/08

Abstract: A microelectromechanical mirror device (20) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity (3) and having a main extension in a horizontal plane (xy); at least one first pair of driving arms (12a, 12b), carrying respective piezoelectric structures (13) which can be biased to generate a driving force such as to cause a rotation of the tiltable structure (2) about a rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane; elastic suspension elements (6a, 6b), which elastically couple the tiltable structure (2) to the fixed structure (4) at the rotation axis (X) and are rigid to movements out of the horizontal plane (xy) and compliant to torsion about the rotation axis (X). In particular, the driving arms (12a, 12b) of the first pair are magnetically coupled to the tiltable structure (2) so as to cause its rotation about the rotation axis (X) by magnetic interaction, following biasing of the respective piezoelectric structures (13) .

公开(公告)号：EP4105167A1

公开(公告)日：2022-12-21

申请号：EP22176138.0

申请日：2022-05-30

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  GATTERE, Gabriele ,  RIANI, Manuel ,  CARMINATI, Roberto

IPC: B81B3/00 ,  G01B11/02 ,  G01S17/88

Abstract: The MEMS actuator (100) is formed by: a substrate (105); a mobile mass (120) that is suspended over the substrate in a first direction (Z) and extends mainly in a plane that defines a second direction (Y) and a third direction (X) perpendicular to the first direction; elastic elements (123A, 123B) arranged between the substrate and the mobile mass and having a first compliance, in a direction parallel to the first direction, lower than a second compliance, in a direction parallel to the second direction; and piezoelectric actuation structures (130A-130D, 135) having a portion fixed with respect to the substrate and a portion configured to deform in the first direction in the presence of an actuation voltage. The MEMS actuator is further formed by movement-transformation structures (126A-126D) coupled to the piezoelectric actuation structures and having an elastic movement-conversion structure (160) arranged between a piezoelectric actuation structure and the mobile mass. The elastic movement-conversion structure is compliant in a plane (YZ) formed by the first and the second directions and has a first principal axis of inertia (Ii) and a second principal axis of inertia (I 2 ) transverse to the first and the second directions.