MICROFLUIDIC DEVICE WITH INTEGRATED MICROPUMP, IN PARTICULAR BIOCHEMICAL MICROREACTOR, AND MANUFACTURING METHOD THEREOF
    1.
    发明申请
    MICROFLUIDIC DEVICE WITH INTEGRATED MICROPUMP, IN PARTICULAR BIOCHEMICAL MICROREACTOR, AND MANUFACTURING METHOD THEREOF 审中-公开
    具有综合微生物的微流体装置,特别是生物化学微生物及其制造方法

    公开(公告)号:WO2006120221A1

    公开(公告)日:2006-11-16

    申请号:PCT/EP2006/062224

    申请日:2006-05-10

    Abstract: A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body (13), and a micropump (11). The microfluidic circuit (10) includes a sample preparation channel (18) formed on the monolithic semiconductor body (13) and at least one microfluidic channel (20, 22) buried in the monolithic semiconductor body (13). The micropump (11), includes a plurality of sealed chambers (40) provided with respective openable sealing elements (41) and having a first pressure therein that is different from a second pressure in the microfluidic circuit (10). In addition, the micropump (11) and the microfluidic circuit (10) are configured so that opening the openable sealing elements (41) provides fluidic coupling between the respective chambers (40) and the microfluidic circuit (10). The openable sealing elements (41) are integrated in the monolithic semiconductor body (13).

    Abstract translation: 用于核酸分析的微流体装置包括至少部分地容纳在单片半导体本体(13)中的单片半导体本体(13),微流体电路(10)和微型泵(11)。 微流体回路(10)包括形成在单片半导体本体(13)上的样品制备通道(18)和埋在单片半导体本体(13)中的至少一个微流体通道(20,22)。 微型泵(11)包括多个密封室(40),其设置有相应的可开启的密封元件(41),并且其中具有与微流体回路(10)中的第二压力不同的第一压力。 此外,微型泵(11)和微流体回路(10)构造成使得可打开的密封元件(41)的打开在各个腔室(40)和微流体回路(10)之间提供流体耦合。 可打开的密封元件(41)集成在单片半导体本体(13)中。

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