公开(公告)号：JPH03282394A

公开(公告)日：1991-12-12

申请号：JP32874890

申请日：1990-11-27

Applicant: TENCOR INSTRUMENTS

Inventor： UIRIAMU AARU UIIRAA ,  AAMAN PII NIYUUKAAMANZU ,  GURAHAMU JIEI SHIDAARU

IPC: G12B5/00

Abstract: PURPOSE: To position a transducer(TD) accurately with respect to a substrate through a simple and stabilized structure using an X-Y-Z motion stage which can be engaged with a carrier including a substrate. CONSTITUTION: In order to inspect a substrate 35, the substrate 35 is roughly positioned with respect to a transducer(TD) 31 on an X-Y stage 19 and then a vacuum chuck 25 mounting the substrate 35 is lifted to an upper basic level plane 15 by means of a Z stage 21 while leaving a slight gap on a pad 37. After a TD 31 is offset by a reticle or the like, the TD 31 is positioned immediately above a measuring region by corrective displacement according to a program. A chuck 25 is then evacuated through the pad 27 and sucked to the surface 16 to the level plane 15. The chuck 25 is held through a vacuum line 39 and the stage 21 is lowered slightly. Consequently, the structural loop between the TD 31 and the substrate 35 is shortened while reinforcing the structure and since they move in harmony, effect of vibration can be reduced. This structure increases stability between the substrate 35 and the TD 31 thus reducing relative fluctuation.