公开(公告)号：JPH1031084A

公开(公告)日：1998-02-03

申请号：JP4163397

申请日：1997-02-10

Applicant: TENCOR INSTRUMENTS

Inventor： SAMSAVAR AMIN ,  WHEELER WILLIAM R ,  EATON STEVEN G ,  ZHUANG JIAN-PING

IPC: G01Q70/06 ,  G01B3/00 ,  G01B5/28 ,  G01B7/34 ,  G01B21/30 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/00 ,  G01Q90/00 ,  G12B5/00

Abstract: PROBLEM TO BE SOLVED: To provide a double stage device for scanning a sample as well as a sample detection method using a sensor for detecting a sample to detect a sample parameter. SOLUTION: A double stage scanning device 100 includes a sensor 60 for detecting a parameter of a sample 90, as well as a rough adjustment stage 80 (80a to 80b) and a fine adjustment stages 70 for causing a relative motion between the sensor 60 and the sample 90. The rough adjustment stage 80 has a resolving power of approximately 1 micrometer, and the fine adjustment stage 70 has a resolving power of 1 nanometer or more. Furthermore, the sensor 60 is used to detect the aforementioned parameter, when both of the stages 70 and 80 causes a relative motion between the sensor 60 and the sample 90. The sensor 60 has the capability of detecting a change in height of the surface of the sample 90 or the heat thereof, as well as the electrostatic, magnetic and light reflectance and transmission parameters of the sample surface, concurrently with the variation of the height. A long scanning process with a rough resolution power is implemented, while a short scanning process with a high resolving power is implemented by use of the end of the same probe, or the ends of two probes fixed and kept at a constant positional relationship. Data obtainable from both of the aforementioned long and short scanning processes can be accurately correlated to each other.

公开(公告)号：DE69734413T2

公开(公告)日：2006-07-27

申请号：DE69734413

申请日：1997-02-07

Applicant: TENCOR INSTRUMENTS

Inventor： SAMSAVAR AMIN ,  WHEELER WILLIAM R ,  EATON STEVEN G ,  ZHUANG JIAN-PING

IPC: G01B7/34 ,  G01Q70/06 ,  G01B3/00 ,  G01B5/28 ,  G01B21/30 ,  G01N27/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/00 ,  G01Q90/00 ,  G12B5/00

Abstract: A dual stage scanning instrument includes a sensor (60) for sensing a parameter of a sample (90) and coarse and fine stages (80,70) for causing relative motion between the sensor (60) and the sample (90). The coarse stage (80) has a resolution of about 1 micrometer and the fine stage (70) has a resolution of 1 nanometer or better. The sensor (60) is used to sense the parameter when both stages cause relative motion between the sensor assembly (60) and the sample (90). The sensor (60) may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing a long scan at a coarser resolution and short scans at high resolution using the same probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

公开(公告)号：EP0673498A4

公开(公告)日：1996-12-11

申请号：EP93922797

申请日：1993-09-30

Applicant: TENCOR INSTRUMENTS

Inventor： WHEELER WILLIAM R

IPC: G01B21/30 ,  G01B7/34 ,  G01B7/28

CPC classification number: G01B7/34

Abstract: A stylus profilometer having a counterbalanced stylus with a motion transducer using a vane (41) moving between parallel, spaced-apart, conductive plates (35 and 37) which damp the motion of the vane by means of trapped air. The vane forms an electrode with the plates so that the combination is a pair of capacitors in a balanced bridge arrangement. Motion of the stylus causes an unbalance of the bridge indicative of the extent of stylus motion. A lever arm (59) associated with the stylus has a tip (57) influenced by a magnetic field which biases the stylus or controls force on a surface to be measured. The entire assembly has a very low moment of inertia to reduce the effects of vibration on the stylus and thereby increase resolution of the device and reduce damage to the substrate.

Abstract translation: 一种具有带有运动传感器的平衡触针的触针表面轮廓仪，该触针使用在平行的，间隔开的导电板（35和37）之间移动的叶片（41），所述导电板借助于捕获的空气阻尼叶片的运动。 叶片与平板形成一个电极，因此该组合是平衡桥布置中的一对电容器。 手写笔的运动导致桥梁的不平衡，指示手写笔运动的程度。 与触针相关联的杠杆臂（59）具有受磁场影响的尖端（57），所述磁场偏置触针或控制待测表面上的力。 整个组件具有非常低的惯性矩，以减小振动对触针的影响，从而提高设备的分辨率并减少对基板的损坏。