公开(公告)号：JPH1031084A

公开(公告)日：1998-02-03

申请号：JP4163397

申请日：1997-02-10

Applicant: TENCOR INSTRUMENTS

Inventor： SAMSAVAR AMIN ,  WHEELER WILLIAM R ,  EATON STEVEN G ,  ZHUANG JIAN-PING

IPC: G01Q70/06 ,  G01B3/00 ,  G01B5/28 ,  G01B7/34 ,  G01B21/30 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/00 ,  G01Q90/00 ,  G12B5/00

Abstract: PROBLEM TO BE SOLVED: To provide a double stage device for scanning a sample as well as a sample detection method using a sensor for detecting a sample to detect a sample parameter. SOLUTION: A double stage scanning device 100 includes a sensor 60 for detecting a parameter of a sample 90, as well as a rough adjustment stage 80 (80a to 80b) and a fine adjustment stages 70 for causing a relative motion between the sensor 60 and the sample 90. The rough adjustment stage 80 has a resolving power of approximately 1 micrometer, and the fine adjustment stage 70 has a resolving power of 1 nanometer or more. Furthermore, the sensor 60 is used to detect the aforementioned parameter, when both of the stages 70 and 80 causes a relative motion between the sensor 60 and the sample 90. The sensor 60 has the capability of detecting a change in height of the surface of the sample 90 or the heat thereof, as well as the electrostatic, magnetic and light reflectance and transmission parameters of the sample surface, concurrently with the variation of the height. A long scanning process with a rough resolution power is implemented, while a short scanning process with a high resolving power is implemented by use of the end of the same probe, or the ends of two probes fixed and kept at a constant positional relationship. Data obtainable from both of the aforementioned long and short scanning processes can be accurately correlated to each other.

公开(公告)号：DE69734413T2

公开(公告)日：2006-07-27

申请号：DE69734413

申请日：1997-02-07

Applicant: TENCOR INSTRUMENTS

Inventor： SAMSAVAR AMIN ,  WHEELER WILLIAM R ,  EATON STEVEN G ,  ZHUANG JIAN-PING

IPC: G01B7/34 ,  G01Q70/06 ,  G01B3/00 ,  G01B5/28 ,  G01B21/30 ,  G01N27/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/00 ,  G01Q90/00 ,  G12B5/00

Abstract: A dual stage scanning instrument includes a sensor (60) for sensing a parameter of a sample (90) and coarse and fine stages (80,70) for causing relative motion between the sensor (60) and the sample (90). The coarse stage (80) has a resolution of about 1 micrometer and the fine stage (70) has a resolution of 1 nanometer or better. The sensor (60) is used to sense the parameter when both stages cause relative motion between the sensor assembly (60) and the sample (90). The sensor (60) may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing a long scan at a coarser resolution and short scans at high resolution using the same probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.