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公开(公告)号：KR1020040108144A
公开(公告)日：2004-12-23
申请号：KR1020030038893
申请日：2003-06-16
IPC: G02B7/28
Abstract: PURPOSE: An auto focus control unit of a microscope is provided to perform an automatic focus control function within a short period of time by converting directly displacement of slit beams to distance information of a probe by using resultants obtained from a single image recognition unit. CONSTITUTION: An objective lens(11), an optical division tube(12), a zoom lens having a zoom motor, an image forming lens(14), and a light receiving element array(15) are arranged on the same optical axis. A light source(16) is installed at one side of the optical division tube. A slit beam generator(17) is installed on a focal length of the objective lens. A driving sensor(3) is used for sensing a driving motor(18) and a moving distance. An image/control unit(2) includes an image receiver(21) for receiving and processing digital signals of the light receiving element array, a drive controller(22) for controlling a driving state of a probe, a zoom drive controller(23) for controlling a zoom motor, a slit beam controller(24) for controlling intensity of the slit beam generator, and a coaxial illumination controller(25) for controlling intensity of coaxial illumination.
Abstract translation: 目的：提供显微镜的自动聚焦控制单元，通过使用从单个图像识别单元获得的结果直接将狭缝光束的位移直接转换为探针的距离信息，在短时间内执行自动聚焦控制功能。 构成：物镜（11），光分配管（12），具有变焦电机的变焦透镜，成像透镜（14）和光接收元件阵列（15）被布置在相同的光轴上。 光源（16）安装在光分配管的一侧。 狭缝梁发生器（17）安装在物镜的焦距上。 驱动传感器（3）用于感测驱动电机（18）和移动距离。 图像/控制单元（2）包括用于接收和处理光接收元件阵列的数字信号的图像接收器（21），用于控制探头的驱动状态的驱动控制器（22），变焦驱动控制器（23） 用于控制变焦电动机，用于控制狭缝光束发生器的强度的狭缝光束控制器（24）和用于控制同轴照明强度的同轴照明控制器（25）。
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公开(公告)号：KR100462071B1
公开(公告)日：2004-12-16
申请号：KR1020020005062
申请日：2002-01-29
Applicant: 한국과학기술원
IPC: G01B11/24
CPC classification number: G01B11/2441 , G01B11/25
Abstract: Disclosed are a method and a system for measuring the surface profile of an object having a large-area. The present invention relates to a method and a system for measuring a profile of a surface by obtaining and analyzing interference patterns generated on an object, the patterns of which are formed by installing two-point light sources to the object to be measured. The measuring system includes an optical path changing unit for controlling an optical path of one of the two optical beam sources installed in the optical probe, and a number of (three or six) optical probes disposed according to applied measurement algorithms, thereby measuring the profile of the object.
Abstract translation: 公开了一种用于测量具有大面积的物体的表面轮廓的方法和系统。 本发明涉及一种通过获得和分析在物体上产生的干涉图案来测量表面轮廓的方法和系统，所述干涉图案通过将二点光源安装到待测量物体而形成。 测量系统包括：光路改变单元，用于控制安装在光学探针中的两个光束源之一的光路;以及根据所应用的测量算法设置的多个（三个或六个）光学探针，从而测量轮廓 的对象。
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公开(公告)号：KR100457656B1
公开(公告)日：2004-11-18
申请号：KR1020020036183
申请日：2002-06-27
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B9/0201 , G01B2290/30 , G01B2290/35
Abstract: Disclosed is a phase-shifting diffraction grating interferometer using diffraction grating. When a light source incident to the diffraction grating is resolved into several diffraction lights, one of them having a diffraction element is selected as a reference light, and other part having the diffraction element or another light having other diffraction element is selected as a light directing to an object to be measured. The light directing to the object to be measured is reflected from the object and is incident to the diffraction grating and then diffracted, and object lights made by the diffraction generates the reference light and an interference pattern. When the diffraction grating is moved in a longitudinal direction, the object light or the reference light is phase-shifted, a number of interference patterns are obtained, and the interference patterns are analyzed to obtain a shape of the measured object. The present invention relates to an improved diffraction grating interferometer capable of being used in an optical metrology field, and the interferometer includes interferometers of various types, which is capable of measuring various kinds of objects to be measured. The phase-shifting diffraction grating interferometer includes a light source part, a beam splitter or a light direction controller, a phase-shifting generator, an interference pattern generator, an interference pattern obtaining part, a central processing unit and a result displaying part. The light source part includes a light source and a lens, a pinhole, a collimator or an optical fiber. The optical elements can be removed according to characteristics of this system or replaced by other optical elements.
Abstract translation: 公开了一种使用衍射光栅的移相衍射光栅干涉仪。 当入射到衍射光栅的光源被分解成多个衍射光时，其中一个具有衍射元件被选择作为参考光，而另一个具有衍射元件的部分或具有其他衍射元件的另一个光被选择为光导 到要测量的对象。 指向待测量物体的光从物体反射并入射到衍射光栅然后衍射，并且由衍射产生的物体光产生参考光和干涉图案。 当衍射光栅在纵向上移动时，物光或参考光被相移，获得多个干涉图案，并且分析干涉图案以获得被测物体的形状。 本发明涉及一种能够用于光学测量领域的改进衍射光栅干涉仪，并且该干涉仪包括能够测量各种待测量物体的各种干涉仪。 相移衍射光栅干涉仪包括光源部分，分束器或光方向控制器，相移发生器，干涉图样发生器，干涉图样获取部分，中央处理单元和结果显示部分。 光源部件包括光源和透镜，针孔，准直器或光纤。 光学元件可根据该系统的特性被移除或被其他光学元件取代。
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公开(公告)号：KR100415477B1
公开(公告)日：2004-01-24
申请号：KR1020010027878
申请日：2001-05-22
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B11/005 , G01B11/002
Abstract: Disclosed are a system and a method for determining coordinates of a three-dimensional measurer probe using a beam phase interference method. Two optical fibers are mounted inside the probe, and detecting means obtains an interference pattern generated by beam emitted from a point beam source mounted at ends of the optical fibers. After that, wave front of the interference pattern is measured and a location of the point beam source is determined through a nonlinear optimization from the wave front, and thereby the coordinates of the three-dimensional measurer probe are set. Because the two optical fibers of the inside of the probe to be measured are located in close vicinity to the three-dimensional object, the present measuring system and method can reduce a measurement error, make a structure of the system simple, and thereby reduce a manufacturing cost.
Abstract translation: 公开了一种使用波束相位干涉方法确定三维测量器探针的坐标的系统和方法。 两根光纤安装在探头内部，并且检测装置获得由安装在光纤端部的点光束源发射的光束产生的干涉图案。 之后，测量干涉图案的波前，并且通过波前的非线性优化来确定点波束源的位置，从而设置三维测量器探测器的坐标。 由于待测量探头内部的两根光纤位于三维物体附近，本测量系统和方法可以减少测量误差，使系统结构简单，从而减少 制造成本。
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公开(公告)号：KR1020030086020A
公开(公告)日：2003-11-07
申请号：KR1020020024361
申请日：2002-05-03
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B9/02074 , G01B9/02012 , G01B11/2441 , G01B2290/35 , G01D5/266
Abstract: PURPOSE: A point-diffractive interferometer by using an optical fiber light source and a measurement method thereof are provided to improve measuring preciseness while removing an error of the point-diffractive interferometer. CONSTITUTION: A point-diffractive interferometer includes a beam splitter for splitting beam radiated from a beam source into measuring beam and reference beam. A measuring beam optical fiber(26) is provided to transfer measuring beam and a reference beam optical fiber(28) is provided to transfer reference beam. An optical fiber mounting member(30) is provided to install the reference beam optical fiber(28) and an end of the measuring beam optical fiber(26). A phase converting device is provided to convert phase of measuring beam or reference beam. An image obtaining device(42) is provided to obtain an image of an interference pattern created by reference beam and measuring beam.
Abstract translation: 目的：提供使用光纤光源的点衍射干涉仪及其测量方法，以提高测量精度，同时消除点衍射干涉仪的误差。 构成：点衍射干涉仪包括用于将从光束源辐射的光束分解成测量光束和参考光束的分束器。 提供测量光束（26）以传送测量光束，并且提供参考光束光纤（28）以传送参考光束。 光纤安装构件（30）设置成安装参考光束（28）和测光束光纤（26）的一端。 提供相位转换装置以转换测量光束或参考光束的相位。 提供图像获取装置（42）以获得由参考光束和测量光束产生的干涉图案的图像。
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Patent Agency Ranking
公开(公告)号：KR100393429B1
公开(公告)日：2003-08-02
申请号：KR1020010018617
申请日：2001-04-09
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B11/0608 , G01B9/02007 , G01B9/02057 , G01B9/02084 , G01B9/0209
Abstract: This invention is on a measurement method and apparatus for measuring the accurate height of a very small step composed of two different flat materials. In this method, two wavelength-white light interferometry is used and the measuring error caused by the change in phase difference by two materials is compensated by a unique equation.
Abstract translation: 本发明涉及用于测量由两种不同的扁平材料组成的非常小的台阶的精确高度的测量方法和设备。 在这种方法中，使用两种波长 - 白光干涉测量法，并且由两种材料的相位差变化引起的测量误差通过独特的方程进行补偿。
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公开(公告)号：KR101895711B1
公开(公告)日：2018-09-07
申请号：KR1020170024194
申请日：2017-02-23
Applicant: 한국과학기술원
Abstract: 이차조화파펄스를사용한표면형상측정장치가개시된다. 일실시예에따른형상측정장치는대상체로부터반사된측정광과, 기준면으로부터반사된반사광을동일축에정렬하여출력하는 PBS와, 상기동일축에정렬된측정광및 반사광에기초하여이차조화파펄스를생성하는비선형광결정과, 상기이차조화파펄스에기초하여상기대상체의형상을획득하는검출기를포함한다.
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99.发明公开펨토초 레이저의 광빗을 이용한 대기 중의 위상 노이즈의 자동 보상을 통한 자유공간 가간섭 광통신 장치 및 방법 无效自由空间相干光通信的装置和方法，使用飞秒激光器的光梳自动补偿大气中的相位噪声
公开(公告)号：KR1020170008975A
公开(公告)日：2017-01-25
申请号：KR1020150100208
申请日：2015-07-15
Applicant: 한국과학기술원
IPC: H04B10/58 , H04B10/50 , H04B10/071 , H04B10/11
CPC classification number: H04B10/071 , H04B10/11 , H04B10/50 , H04B10/58
Abstract: 본발명은펨토초레이저의광빗을이용한대기중의위상노이즈의자동보상을통한자유공간가간섭광통신장치및 방법에관한것으로, 상세하게는펨토초레이저광빗으로부터생성된송신광의반사광으로부터대기외란에의한위상천이값을획득하고송신광을위상천이값에따라전치왜곡(pre-distortion)함으로써, 대기외란에의한위상노이즈를송신단에서미리보상하는펨토초레이저의광빗을이용한대기중의위상노이즈의자동보상을통한자유공간가간섭광통신장치및 방법에관한것이다. 본발명의일 실시예에따른펨토초레이저의광빗을이용한대기중의위상노이즈의자동보상을통한자유공간가간섭광통신장치는제1광원부, 제2광원부, 변조부, 보상부, 광송신부및 광수신부를포함할수 있다. 제1광원부는자유공간의대기외란을측정하는제1 레이저광을출력하고, 제2광원부는데이터를전송하는제2 레이저광을출력한다. 그리고, 변조부는기 설정된변조방식으로제2 레이저광을변조하여, 변조광을생성하며, 보상부는변조광과제1 레이저광이입력되고, 변조광과제1 레이저광을중첩한중첩광을전치왜곡(pre-distortion)하여송신광을생성한다. 마지막으로광송신부는송신광을자유공간을경유하여수신기에송신하고, 광수신부는송신광이수신기에반사되어입사되는반사광을수신한다. 여기서, 보상부는제1 레이저광과반사광이더 입력되고, 반사광과기준광을비교하여상기자유공간의대기외란을측정하고, 측정된상기대기외란에근거하여중첩광을전치왜곡한다.
Abstract translation: 本发明涉及一种通过使用飞秒激光的光梳对大气中的相位噪声进行自动补偿的自由空间相干光通信的装置和方法，更具体地，涉及一种用于自由空间相干的装置和方法 通过使用飞秒激光的光梳自动补偿大气中的相位噪声，其中由飞秒激光光梳产生的透射光的反射光获得由于大气扰动引起的相移值，并且 基于相移值预测传输光，从而在传输端对由于大气干扰引起的相位噪声进行预补偿。通过自相关光通信的装置，通过对 根据本发明的实施例，使用飞秒激光的光梳的气氛，c a包括第一光源单元，第二光源单元，调制单元，补偿单元，光传输单元和光接收单元。 第一光源单元用于输出用于测量自由空间的大气干扰的第一激光，并且第二光源单元用于输出用于发送数据的第二激光。 并且调制单元用于通过预设调制方案调制第二激光并用于产生调制光。 补偿单元具有调制光和第一激光的输入，并且用于通过预调制重叠的光来产生透射光，其中调制光和第一激光重叠。 最后，光传输单元用于经由自由空间将传输光发射到接收器，并且光接收单元用于接收具有从接收器反射的传输光的反射光并且在其上入射。 补偿单元还具有第一激光和反射光的输入，并且用于通过比较反射光和参考光来测量自由空间的大气干扰，并且用于基于测量的反射光来预重叠重叠的光 大气扰动
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100.发明公开
公开(公告)号：KR1020140052116A
公开(公告)日：2014-05-07
申请号：KR1020120116127
申请日：2012-10-18
Applicant: 한국과학기술원
IPC: H01S3/067
CPC classification number: H01S3/06704 , H01S3/0064 , H01S3/06725 , H01S3/1106
Abstract: The present invention relates to a high power optical fiber femtosecond laser resonator generated by the combination mode locking of nonlinear polarization rotation and saturable absorption. An optical fiber femtosecond laser resonator, which is an optical fiber based resonator of a ring-type structure, includes a nonlinear polarization rotation mode locking part which is formed on the resonator and generates an UHF pulse by pulse shaping, and a saturable absorption mode locking part which performs the nonlinear filtering of pulse amplitude, prevents the excess nonlinear phenomenon of the inner part of the resonator, generates an initial pulse, and removes a dispersive wave generated in a soliton pulse.
Abstract translation: 本发明涉及通过非线性偏振旋转和可饱和吸收的组合模式锁定而产生的高功率光纤飞秒激光谐振器。 作为环型结构的基于光纤的谐振器的光纤飞秒激光谐振器包括形成在谐振器上的非线性偏振旋转模式锁定部，并且通过脉冲整形产生UHF脉冲，并且可饱和吸收模式锁定 执行脉冲幅度的非线性滤波的部分防止谐振器内部部分的过量非线性现象产生初始脉冲，并去除孤子脉冲中产生的色散波。
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