RESET SWITCH FOR A MICROMACHINED DEVICE
    91.
    发明申请
    RESET SWITCH FOR A MICROMACHINED DEVICE 审中-公开
    用于MICROMACHINED设备的复位开关

    公开(公告)号:WO1997034155A1

    公开(公告)日:1997-09-18

    申请号:PCT/US1997004230

    申请日:1997-03-14

    CPC classification number: G01P15/125

    Abstract: In a circuit for use with a micromachined device having a movable mass (18) that forms an inner electrode (34) of a differential capacitor (40), oppositely phased square waves (52, 54) are applied to two outer electrodes (36, 38) of the differential capacitor. A reset voltage is applied to the inner electrode synchronously with the square waves to stabilize and control the potential on the inner electrode. The signal on the inner electrode is demodulated by sampling during a first half of the square wave and a second half of the square wave between applications of the reset pulse (57) to obtain a voltage that does not contain noise due to the reset switch (64).

    Abstract translation: 在与具有形成差分电容器(40)的内部电极(34)的可移动质量(18)一起使用的微加工装置的电路中,将相反方波(52,54)施加到两个外部电极 38)的差分电容。 复位电压与方波同步地施加到内部电极,以稳定和控制内部电极上的电位。 内部电极上的信号在复位脉冲(57)的应用之前在方波的前半部分和方波的后半部进行采样解调,以获得由于复位开关而不包含噪声的电压( 64)。

    OFFSET TRIMMING FOR A MICROMACHINED DIFFERENTIAL CAPACITOR
    92.
    发明申请
    OFFSET TRIMMING FOR A MICROMACHINED DIFFERENTIAL CAPACITOR 审中-公开
    用于微机电差分电容器的偏移调整

    公开(公告)号:WO1997034154A1

    公开(公告)日:1997-09-18

    申请号:PCT/US1997004229

    申请日:1997-03-17

    CPC classification number: G01P15/125 G01P1/006

    Abstract: A micromachined device has first (32), second (34), and third (36) electrodes forming a differential capacitor (30), and first and second drivers (40, 42) for providing clocked signals (44, 46) to the first and second electrodes (32, 34). The drivers (40, 42) each have supply leads (50, 52, 54, 56) coupled to first and second reference voltage supplies via fixed first and second resistors (R1, R3, R4, R6), and also coupled together with variable resistors (R2, R5) for trimming an offset so that electrostatic forces are balanced.

    Abstract translation: 微机械装置具有形成差分电容器(30)的第一(32),第二(34)和第三(36)电极,以及用于向第一和第二驱动器提供时钟信号(44,46)的第一和第二驱动器(40,42) 和第二电极(32,34)。 驱动器(40,42)各自具有通过固定的第一和第二电阻器(R1,R3,R4,R6)耦合到第一和第二参考电压源的电源引线(50,52,54,56),并且还与变量 电阻(R2,R5),用于修整偏移量,使静电力平衡。

    MICROMACHINED DEVICE WITH ENHANCED DIMENSIONAL CONTROL
    93.
    发明申请
    MICROMACHINED DEVICE WITH ENHANCED DIMENSIONAL CONTROL 审中-公开
    具有增强尺寸控制的MICROMACHINED DEVICE

    公开(公告)号:WO1997034153A1

    公开(公告)日:1997-09-18

    申请号:PCT/US1997004231

    申请日:1997-03-14

    Abstract: A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures. Such dimensional relationships are achieved through consistent spacing between desired operating structures and by adding new structures (i.e., dimensional control structures) which provide additional consistent spacing at desired locations within the micromachined device.

    Abstract translation: 提供了一种微机械装置,其建立微加工结构之间的选择尺寸关系,以实现这些结构之间的尺寸变化的相关性。 通过在期望的操作结构之间的一致的间隔以及通过添加在微加工装置内的期望位置处提供附加一致的间隔的新结构(即尺寸控制结构)来实现这种尺寸关系。

    MICROMACHINED DEVICE PACKAGED TO REDUCE STICTION
    94.
    发明申请
    MICROMACHINED DEVICE PACKAGED TO REDUCE STICTION 审中-公开
    包装减少的MICROMACHINED设备

    公开(公告)号:WO1997034151A1

    公开(公告)日:1997-09-18

    申请号:PCT/US1997003845

    申请日:1997-03-14

    Abstract: A micromachined device (48) is packaged to reduce stiction. In one embodiment, a level of moisture is introduced in the package (60) to create a very thin film over surfaces of the device (48). The device (48) can also be packaged with a vapor deposition of an organic material (108) after a wafer of devices has been separated into individual dies and the individual dies are placed in open containers (112). In another embodiment, a micromachined device is positioned in an open package (120) and a liquid (126) or solid organic material is disposed within the package so that when the device is sealed, the organic material vaporizes and coats portions of the die to reduce stiction.

    Abstract translation: 包装微机械装置(48)以减少静摩擦。 在一个实施例中,水分含量被引入到包装(60)中以在装置(48)的表面上产生非常薄的薄膜。 在将晶片的晶片分离成单独的模具并将各个模具放置在敞开的容器(112)中之后,装置(48)也可以与有机材料(108)的气相沉积封装。 在另一个实施例中,微加工装置定位在开放式包装(120)中,并且液体(126)或固体有机材料设置在包装内,使得当装置被密封时,有机材料将模具的部分蒸发并涂覆 减少粘滞

    INTEGRATED SURFACE MICROMACHINED MAGNETOMETER
    95.
    发明申请
    INTEGRATED SURFACE MICROMACHINED MAGNETOMETER 审中-公开
    集成表面微型磁铁计

    公开(公告)号:WO1997031274A1

    公开(公告)日:1997-08-28

    申请号:PCT/US1997002607

    申请日:1997-02-21

    Abstract: A micromachined magnetometer is built from a rotatable micromachined structure (10) on which is deposited a ferromagnetic material (54) magnetized along an axis parallel to the substrate (12). A structure rotatable about the Z-axis can be used to detect external magnetic fields along the X-axis or the Y-axis, depending on the orientation of the magnetic moment of the ferromagnetic material. A structure rotatable about the X-axis or the Y-axis can be used to detect external magnetic fields along the Z-axis. By combining two or three of these structures, a dual-axis or three-axis magnetometer is obtained.

    Abstract translation: 微机械强度计由可旋转的微加工结构(10)构成,其上沉积沿着平行于衬底(12)的轴线磁化的铁磁材料(54)。 可以使用围绕Z轴旋转的结构来检测沿着X轴或Y轴的外部磁场,这取决于铁磁材料的磁矩的取向。 可以使用围绕X轴或Y轴旋转的结构来检测沿着Z轴的外部磁场。 通过组合这些结构中的两个或三个,获得双轴或三轴磁力计。

    DIGITAL FILTERING SYSTEM
    96.
    发明申请
    DIGITAL FILTERING SYSTEM 审中-公开
    数字滤波系统

    公开(公告)号:WO1997029439A1

    公开(公告)日:1997-08-14

    申请号:PCT/US1997002222

    申请日:1997-02-11

    CPC classification number: G06F17/10

    Abstract: A digital filtering system (10) is fed by input signal and produces an output signal from either a relatively low bandwidth filter or a relatively wide bandwidth filter selectively in accordance with the time rate of change in the input signal. The output signal is produced by the relatively low bandwidth filter (26) when the input signal is slowly varying and the output signal is produced by the relatively wide bandwidth filter (28) when the input signal changes rapidly, after which the output is produced from the relatively low bandwidth filter when the input signal reverts to its more slowly varying characteristics.

    Abstract translation: 数字滤波系统(10)由输入信号馈送,并且根据输入信号的时间变化率选择性地从相对低带宽滤波器或相对宽带宽滤波器产生输出信号。 当输入信号快速变化时,当输入信号缓慢变化并且输出信号由相对宽的带宽滤波器(28)产生时,输出信号由相对低带宽滤波器(26)产生,之后输出信号从 当输入信号恢复到其更缓慢变化的特性时,相对低带宽的滤波器。

    DYNAMIC PHASE SELECTOR PHASE LOCKED LOOP CIRCUIT
    97.
    发明申请
    DYNAMIC PHASE SELECTOR PHASE LOCKED LOOP CIRCUIT 审中-公开
    动态相位选择器相位锁定环路

    公开(公告)号:WO1997019513A1

    公开(公告)日:1997-05-29

    申请号:PCT/US1996018302

    申请日:1996-11-15

    Abstract: A dynamic phase selector phase locked loop circuit (20) includes: an A/D converter (24) for receiving an input signal (22) to be sampled; a phase detection circuit (26) for determining the phase error between the input signal (22) and a clock signal; a clock circuit (30), responsive to the phase detection circuit (26), for providing the clock signal to the A/D converter for timing the sampling of the input signal (22); the clock circuit (30) including a delay circuit having a number of delay taps; and a phase selector circuit (42), responsive to the phase detection circuit (26) for initially gating (43) the clock signals to the A/D converter from the clock circuit (30), and enabling one of the delay taps to dynamically adjust the phase of the clock signal and reduce the initial phase error.

    Abstract translation: 动态相位选择器锁相环电路(20)包括:A / D转换器(24),用于接收待采样的输入信号(22); 相位检测电路(26),用于确定输入信号(22)和时钟信号之间的相位误差; 响应于相位检测电路(26)的时钟电路(30),用于将时钟信号提供给A / D转换器,以对输入信号(22)的采样进行定时; 所述时钟电路(30)包括具有多个延迟抽头的延迟电路; 以及相位选择器电路(42),响应于所述相位检测电路(26),用于从时钟电路(30)首先将所述时钟信号选通(43)到所述A / D转换器,以及使所述延迟抽头之一动态地 调整时钟信号的相位并减少初始相位误差。

    CHARGE TRANSFER DEVICE INCLUDING CHARGE DOMAIN ANALOG SAMPLE-AND-HOLD CIRCUIT
    98.
    发明申请
    CHARGE TRANSFER DEVICE INCLUDING CHARGE DOMAIN ANALOG SAMPLE-AND-HOLD CIRCUIT 审中-公开
    充电传输装置,包括充电域模拟样品保持电路

    公开(公告)号:WO1997012371A1

    公开(公告)日:1997-04-03

    申请号:PCT/US1996015207

    申请日:1996-09-20

    CPC classification number: G11C27/026 G11C19/282

    Abstract: A charge transfer device which includes a reference charge generator that generates a reference charge signal in response to receiving a control signal, first and second charge signal channels arranged to receive portions of the reference charge signal, and a charge distributor which distributes the reference charge signal between the first and second charge signal channels in accordance with a ratio determined by a differential input signal. The reference charge generator includes a source diffusion and a pair of gates each having respective potential wells electrically coupled to one another. The pair of gates generate the reference charge signal by extracting a charge packet from the source diffusion in response to having the control signal applied thereto, the charge packet being divided between the wells. The potential wells each include high conductivity regions defined by selected diffusions. The charge distributor includes a pair of barrier gates which are driven with the differential input signal. In exemplary embodiments of the invention, the charge transfer device is configured as a charge domain sample-and-hold circuit, a discrete-time amplifier circuit, a comparator circuit for discrete-time inputs and a magnetic field sensor circuit.

    Abstract translation: 一种电荷转移装置,其包括参考电荷产生器,其响应于接收到控制信号产生参考电荷信号,布置成接收参考电荷信号的部分的第一和第二电荷信号通道以及分配参考电荷信号的电荷分配器 根据由差分输入信号确定的比例在第一和第二充电信号通道之间。 参考电荷产生器包括源极扩散和一对栅极,每个栅极具有彼此电耦合的各个势阱。 响应于施加了控制信号,该对门通过从源扩散提取电荷分组来产生参考电荷信号,电荷分组在两个阱之间分配。 势阱各自包括由选择的扩散限定的高导电率区域。 电荷分配器包括用差分输入信号驱动的一对势垒门。 在本发明的示例性实施例中,电荷转移装置被配置为电荷域取样和保持电路,离散时间放大器电路,用于离散时间输入的比较器电路和磁场传感器电路。

    DATA ACQUISTION SYSTEM
    99.
    发明申请
    DATA ACQUISTION SYSTEM 审中-公开
    数据采集​​系统

    公开(公告)号:WO1996037963A1

    公开(公告)日:1996-11-28

    申请号:PCT/US1996007474

    申请日:1996-05-23

    Abstract: A computed tomography imaging method that includes receiving an analog beam intensity signal from a computed tomography scanner and converting it into a series of digital representations at successive points in time. An indication that a portion of the scanner has reached a certain position relative to the beam is received asynchronously with respect to these points in time, and the value of at least one of the digital representations is adjusted in response to the indication to obtain a corrected digital representation of the analog signal. A computed tomography imaging method that includes sigma-delta modulating an analog beam intensity signal to obtain a modulated version of the signal, and decimating it according to a rectangular time domain response with rounded rising and falling ends, which can be axially symmetrical. The method can also include another step of decimating that lasts a different amount of time, and/or another step of decimating that overlaps the step of decimating. A method of analog-to-digital conversion that can be used in computed tomography imaging, including actively deriving a first voltage from an analog current signal, dividing the first voltage into a second voltage, and converting the second voltage into a digital output.

    Abstract translation: 一种计算机断层摄影成像方法,包括从计算机断层摄影扫描仪接收模拟束强度信号,并在连续的时间点将其转换为一系列数字表示。 相对于这些时间点,扫描仪的一部分已经达到相对于光束的某个位置的指示被异步地接收,并且响应于指示来调整数字表示中的至少一个的值以获得校正的 模拟信号的数字表示。 一种计算机断层成像方法,其包括Σ-Δ调制模拟束强度信号以获得所述信号的调制版本,并且根据具有四舍五入的上升和下降端的矩形时域响应对其进行抽取,其可以是轴对称的。 该方法还可以包括另一步骤,其抽取持续不同的时间量,和/或抽取与抽取步骤重叠的另一步骤。 一种可用于计算机断层成像的模数转换方法,包括主动地从模拟电流信号导出第一电压,将第一电压分为第二电压,以及将第二电压转换为数字输出。

    SWITCHED CAPACITOR OFFSET SUPPRESSION
    100.
    发明申请
    SWITCHED CAPACITOR OFFSET SUPPRESSION 审中-公开
    开关电容器偏移抑制

    公开(公告)号:WO1996037951A1

    公开(公告)日:1996-11-28

    申请号:PCT/US1996007580

    申请日:1996-05-23

    Abstract: A switched-capacitor circuit that includes a first signal path disposed between a first input node and a first output node, and a second signal path disposed between a second input node and a second output node. The first and second switches can be alternately disposed within the first and second signal paths. An amplifier responsive to the switches can be provided, and its offset can be cancelled. The outputs of the amplifiers can be maintained, and this can involve buffering.

    Abstract translation: 一种开关电容器电路,包括设置在第一输入节点和第一输出节点之间的第一信号路径,以及设置在第二输入节点和第二输出节点之间的第二信号路径。 第一和第二开关可以交替地布置在第一和第二信号路径内。 可以提供响应于开关的放大器,并且其偏移可以被取消。 可以保持放大器的输出,并且这可以涉及缓冲。

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