公开(公告)号：WO2006127952A3

公开(公告)日：2007-07-19

申请号：PCT/US2006020346

申请日：2006-05-23

Applicant: SOUTHWEST SCIENCES INC ,  VAKHTIN ANDREI B ,  KANE DANIEL J ,  PETERSON KRISTEN A

Inventor： VAKHTIN ANDREI B ,  KANE DANIEL J ,  PETERSON KRISTEN A

IPC: G01B9/02

CPC classification number: G01J3/45 ,  G01B9/02004 ,  G01B9/0201 ,  G01B9/02044 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/45

Abstract: An apparatus and method for differential spectral interferometry comprising providing an interferometer comprising a light source; employing an element to provide a dithered relative phase shift between target and reference arms of the interferometer, detecting output from the interferometer, demodulating signals received from the detector at different multiples of the dither frequencies, generating more than one real-valued interferograms from demodulated signals, and using the real- valued interferograms to obtain the complex spectral interferogram.

Abstract translation: 一种用于差分光谱干涉测量的装置和方法，包括提供包括光源的干涉仪; 使用元件在干涉仪的目标和参考臂之间提供抖动的相对相移，检测来自干涉仪的输出，解调从抖动频率的不同倍数从检测器接收的信号，从解调信号产生多于一个的实数干涉图 ，并使用实数干涉图来获得复杂的光谱干涉图。

公开(公告)号：WO2005114094A1

公开(公告)日：2005-12-01

申请号：PCT/US2005/015558

申请日：2005-05-04

Applicant: MEDEIKON CORPORATION ,  ALPHONSE, Gerard, A.

Inventor： ALPHONSE, Gerard, A.

IPC: G01B9/02

CPC classification number: G01B9/02014 ,  A61B5/0066 ,  A61B5/14532 ,  A61B5/14558 ,  G01B9/0201 ,  G01B9/02074 ,  G01B9/0209 ,  G01B2290/70

Abstract: A method and system for determining a characteristic of an analyte in a bio­logical sample. Disclosed in several exemplary embodiments are high-sensi­tivity low coherence interferometric (LCI) systems (instruments) for optical metrology, which in an exemplary embodiment are miniaturized for use in a variety of sensing and monitoring applications, including medical sensing such as non-invasive glucose monitoring and others. The instrument is mini­aturized, using integrated optics components such as waveguides, splitters and modulators on a single substrate such as a LiNb03 (Lithium Niobate) chip. Exemplary embodiments may also involve the use of a "circulator" type of optical component, including a polarizing beam splitter and quaterwave plate, which can be combined with the light source and detector into a miniature module that prevents optical feedback into the light source while doubling the detected light. Alternatively, one or more isolators and a waveguide coupler may be employed in a similar module to accomplish the same purpose.

Abstract translation: 用于确定生物样品中分析物特征的方法和系统。 在几个示例性实施例中公开了用于光学测量的高灵敏度低相干干涉（LCI）系统（仪器），其在示例性实施例中被小型化以用于各种感测和监视应用，包括医学感测，例如非侵入性葡萄糖 监控等。 该仪器小型化，在诸如LiNbO 3（铌酸锂）芯片的单个衬底上使用诸如波导，分离器和调制器的集成光学部件。 示例性实施例还可以涉及使用“循环器”类型的光学部件，包括偏振分束器和四波形板，其可以与光源和检测器组合成微型模块，以防止光学反馈进入光源同时加倍 检测到的光。 或者，可以在相似模块中使用一个或多个隔离器和波导耦合器来实现相同的目的。

公开(公告)号：WO2004079294A3

公开(公告)日：2005-05-19

申请号：PCT/US2004007014

申请日：2004-03-08

Applicant: ZYGO CORP ,  DE GROOT PETER J ,  STONER ROBERT ,  DE LEGA XAVIER COLONNA

Inventor： DE GROOT PETER J ,  STONER ROBERT ,  DE LEGA XAVIER COLONNA

IPC: G01B9/02 ,  G01B11/06 ,  G01B11/24

CPC classification number: G01B9/0201 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/70

Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test objects, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform (eg. A Fourier transform) of a scanning interferometry signal corresponding to each of the models of the test object. In a second aspect the models correspond to a fixed surface height and they are parametrized by a series of characteristics different from the fixed surface height. In a third aspect the comparing comprises accounting for systematic contributions to the interferometry signal.

Abstract translation: 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中所述多个模型由所述测试对象的一系列特征参数化。 对应于多个模型的信息可以包括关于与测试对象的每个模型相对应的扫描干涉测量信号的变换的至少一个幅度分量（例如，傅里叶变换）的信息。 在第二方面，模型对应于固定的表面高度，并且它们由与固定表面高度不同的一系列特征参数化。 在第三方面，比较包括考虑对干涉测量信号的系统贡献。

公开(公告)号：WO2004068066A3

公开(公告)日：2005-01-20

申请号：PCT/US2004002449

申请日：2004-01-28

Applicant: ORAXION ,  ROSAKIS ARES J ,  OWEN DAVID ,  GLEDDEN STEPHEN ,  OLSON SEAN

Inventor： ROSAKIS ARES J ,  OWEN DAVID ,  GLEDDEN STEPHEN ,  OLSON SEAN

IPC: G01B9/02 ,  G01B11/24 ,  G01J9/02

CPC classification number: G01B9/02098 ,  G01B9/0201 ,  G01B11/2441 ,  G01B2290/35 ,  G01J9/0215

Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.

Abstract translation: 使用光学干涉仪获得表面的全场光学测量的技术和系统，例如平板的表面，晶片和衬底的图案化表面。 描述了用于测量表面的各种剪切干涉仪的应用。

公开(公告)号：WO2004102112A1

公开(公告)日：2004-11-25

申请号：PCT/CA2004/000730

申请日：2004-05-17

Applicant: OTI OPHTHALMIC TECHNOLOGIES INC. ,  PODOLEANU, Adrian, Gh. ,  JACKSON, David, A. ,  ROGERS, John, A. ,  DOBRE, George, M. ,  CUCU, Radu, G.

Inventor： PODOLEANU, Adrian, Gh. ,  JACKSON, David, A. ,  ROGERS, John, A. ,  DOBRE, George, M. ,  CUCU, Radu, G.

IPC: G01B9/02

CPC classification number: A61B3/102 ,  A61B5/0066 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/0203 ,  G01B9/02058 ,  G01B9/02063 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/23 ,  G01N21/4795

Abstract: OCT apparatus includes an interferometer, having an input beam splitter and a 50/50 output splitter. The splitting ratio of the input splitter may be optimized depending on the source power of light source and on the mismatch of the balanced receiver. The input splitter is a plate beam-splitter to minimize the stray reflected light in the interferometer and allow sequential operation of the apparatus in the OCT or in the confocal regime. The switching between the two regimes may be at will, or synchronous with the en-face scanning which results in quasi-simultaneous OCT/confocal imaging or in alternatives frames, confocal and OCT. By using polarization sensitive elements, two channels are provided in each regime, OCT and confocal. The two confocal polarization sensitive channels may allow adjustments of compensators prior to OCT measurements or OCT imaging.

Abstract translation: OCT设备包括具有输入分束器和50/50输出分离器的干涉仪。 输入分路器的分频比可以根据光源的功率和平衡接收机的不匹配进行优化。 输入分路器是平板分光器，以最小化干涉仪中的杂散反射光，并允许在OCT或共聚焦状态下对装置的顺序操作。 两种方案之间的切换可以是随意的，或者与进行准同时OCT /共聚焦成像或替代帧，共聚焦和OCT的en-face扫描同步。 通过使用极化敏感元件，在每个方案中提供了两个通道，OCT和共聚焦。 两个共焦极化敏感通道可以允许在OCT测量或OCT成像之前调整补偿器。

公开(公告)号：WO2003050590A1

公开(公告)日：2003-06-19

申请号：PCT/US2002/039581

申请日：2002-12-10

Applicant: UNIVERSITY OF PITTSBURGH ,  CARNEGIE MELLON UNIVERSITY

Inventor： PAN, Yingtian ,  FEDDER, Gary, K. ,  XIE, Huikai

IPC: G02B23/24

CPC classification number: G02B21/0072 ,  A61B1/0008 ,  A61B1/00096 ,  A61B1/00172 ,  A61B1/00183 ,  A61B5/0066 ,  A61B5/6852 ,  G01B9/02002 ,  G01B9/0201 ,  G01B9/0205 ,  G01B9/02091 ,  G01B2290/65 ,  G02B21/0028 ,  G02B21/0048 ,  G02B21/0056 ,  G02B21/0068 ,  G02B23/2415 ,  G02B23/2423

Abstract: A system and method for an endoscopic optical coherence tomography (OCT) system based on a CMOS-MEMS mirror to facilitate lateral light scanning. The laser scanning scope, adapted to the instrument channel of a commercially-available endoscopic sheath, allows for the real-time cross-sectional imaging of living biological tissue via direct endoscopic visual guidance. A conventional rod lens imaging system may be used for the visual guidance. The MEMS mirror is preferably actuated using either or both of a thermal-mechanical or electrostatic actuation system. More than one MEMS micromirror may be used in a single system for 3D imaging.

Abstract translation: 一种基于CMOS-MEMS镜的内窥镜光学相干断层扫描（OCT）系统和方法，用于促进横向光扫描。 适用于市售的内窥镜护套的仪器通道的激光扫描范围允许通过直接内窥镜视觉指导实时生物组织的实时横截面成像。 常规的棒状透镜成像系统可用于视觉指导。 MEMS反射镜优选地使用热机械或静电致动系统中的一个或两者来致动。 可以在单个系统中使用多于一个的MEMS微镜用于3D成像。

公开(公告)号：WO2002090880A1

公开(公告)日：2002-11-14

申请号：PCT/EP2002/003169

申请日：2002-03-21

Applicant: KUECHEL, Michael

Inventor： KUECHEL, Michael

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02022 ,  G01B9/02034 ,  G01B9/02057 ,  G01B9/02069 ,  G01B9/02072 ,  G01B9/02082 ,  G01B9/02098 ,  G01B2290/15 ,  G01B2290/30 ,  G01J9/02

Abstract: The invention provides interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferogram are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution to the combined interferogram is diluted.

Abstract translation: 本发明提供了用于减少干涉仪中相干伪像的影响的干涉仪装置和方法。 保留了干涉图中的边缘对比度，同时由于干涉图中产生的不想要的辐射的相干叠加而干涉图中存在的相干伪影被抑制。 使用照明和干涉测量成像架构，其从干涉仪中的照明的不同离轴位置的角度产生测试表面的所选特征的单独干涉图，然后将它们组合以保留条纹对比度，同时安排 人造物存在于不同的场地，使得它们对组合干涉图的贡献被稀释。

公开(公告)号：WO02004925A1

公开(公告)日：2002-01-17

申请号：PCT/AU2001/000737

申请日：2001-06-21

IPC: G01B9/02 ,  G01N21/47 ,  G01P5/22 ,  G01P5/26 ,  G01N21/00 ,  H03D1/22

CPC classification number: G01B9/02012 ,  G01B9/0201 ,  G01B9/02045 ,  G01B9/02091 ,  G01N21/4795 ,  G01P5/22 ,  G01P5/26

Abstract: The present invention relates to a method and apparatus (10) for determining the instantaneous value of one or more properties of a sample examined by means of an interference technique, such as optical coherence tomography. The apparatus (10) includes an interferometer (12) which produces an interferogram signal (14), a phase comparator (16), a voltage-controlled oscillator VCO (18) and a low-pass filter (22). The phase comparator (16), VCO (18) and low-pass filter (22) together form an feedback loop in the form of phase-locked loop (30) wherein an output (24) of the low-pass filter (22) is linearly related to a scatterer's velocity nu s in the sample. The apparatus also includes a phase shifter (32), a mixer (38) and a low-pass filter (42) which generate a reflectivity signal (44).

Abstract translation: 本发明涉及一种用于通过干涉技术（例如光学相干断层摄影）来确定检查的样本的一个或多个特性的瞬时值的方法和装置（10）。 该装置（10）包括产生干涉图信号（14）的干涉仪（12），相位比较器（16），压控振荡器VCO（18）和低通滤波器（22）。 相位比较器（16），VCO（18）和低通滤波器（22）一起形成锁相环（30）形式的反馈回路，其中低通滤波器（22）的输出端（24） 与样品中的散射体的速度nu线性相关。 该装置还包括产生反射信号（44）的移相器（32），混频器（38）和低通滤波器（42）。

公开(公告)号：WO01025721A1

公开(公告)日：2001-04-12

申请号：PCT/US2000/027343

申请日：2000-10-04

IPC: G01B9/02 ,  G01J9/02 ,  G01N21/45

CPC classification number: G01B11/2441 ,  G01B9/0201 ,  G01B9/02081 ,  G01B9/02087 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01N21/45

Abstract: Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront (66) an object wavefront (58) from an object and a reference wavefront (56). A wavefront-splitting element (80) splits the combined wavefront (66) into a plurality of sub-wavefronts (70a, 70b, 70c, 70d) in such a way that each of the sub-wavefronts (70a, 70b, 70c, 70d) is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element (80) may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts (70a, 70b, 70c, 70d) to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element (80) may then interfere the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms (74a, 74b, 74c, 74d). An imaging element (76) receives and images the phase-shifted interferograms (74a-d). A computer connected to the imaging element (76) measures various parameters of the objects based on the phase-shifted interferograms (74a-d). Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.

Abstract translation: 用于使用参考波阵面和物体波阵面分割，成像和测量波前的装置。 波前组合元件从对象和参考波阵面（56）接收并组合成组合波阵面（66）物体波前（58）。 波前分割元件（80）将组合波阵面（66）分成多个子波前（70a，70b，70c，70d），使得每个子波前（70a，70b，70c，70d ）基本上与至少一个其它子波前相邻。 波前分割元件（80）可以移动子波前（70a，70b，70c，70d）的参考波前和物体波前之间的相对相位，以产生相应的多个相移子波前。 然后，波前分割元件（80）可以干扰相移子波前的参考波和对象波前，产生相应的多个相移干涉图（74a，74b，74c，74d）。 成像元件（76）接收并成像相移干涉图（74a-d）。 连接到成像元件（76）的计算机基于相移干涉图（74a-d）来测量对象的各种参数。 测量的实例包括流动参数，例如所选气态物质的浓度，温度分布，颗粒和液滴分布，密度等。 除了流量参数之外，可以测量物体的位移（例如，振动）和轮廓。

公开(公告)号：WO99050615A1

公开(公告)日：1999-10-07

申请号：PCT/EP1999/001865

申请日：1999-03-19

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02007 ,  G01B2290/45

Abstract: According to the invention, a single laser (31) is time-sequentially stabilized on different wavelengths ( lambda 1, lambda 2) during constant, preferably linear transition between both wavelengths in order to measure absolute optical interferometric length. The number of interferences which pass through are counted in a measuring channel during the transition from one wavelength to the other wavelength. The length (L) of a measuring distance can be absolutely measured by using known and stabile wavelengths ( lambda 1, lambda 2) and by measuring the phases ( phi 1, phi 2) of both wavelengths. Compared to known methods, the invention considerably increases the preciseness of measurement and the resolution by using an active integrated optical system and by measuring the residual phases by compensating the integrated optical system so that differences in wave lengths of 10 lambda can be detected.

Abstract translation: 对于绝对光学干涉长度测量，单个激光器（31）是随着时间顺序地对不同波长（波长1，λ-2）稳定在两个波长之间的稳定，优选直链的过渡。 期间从一个到另一个波长的过渡，在测量信道连续干扰的数量进行计数。 在已知的和稳定的波长（波长1，λ-2）和测量的两种波长的相位（PHI 1，披2）的绝对可以被测量的测量部，所述长度（L）。 与已知方法相比用本发明获得的，使用有源集成光学和测量由补偿在集成光学残余相位，在测量精度和分辨率的显着增加，从而使10的波长差<-7>可以检测拉姆达。