公开(公告)号：US09651426B2

公开(公告)日：2017-05-16

申请号：US14788534

申请日：2015-06-30

Applicant: Agilent Technologies, Inc.

Inventor： Adam Kleczewski ,  Richard P Tella ,  Dower Cameron Bricker ,  Yang Han

IPC: G01J4/02 ,  H01S5/34 ,  H01S5/00 ,  H01S5/40 ,  G02B5/30 ,  G02B27/28 ,  G02B26/00

CPC classification number: G01J4/02 ,  G01N2021/217 ,  G01N2021/556 ,  G02B5/3058 ,  G02B26/00 ,  G02B27/286 ,  G02F1/0136 ,  H01S5/005 ,  H01S5/0071 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4075

Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.

公开(公告)号：US20170003170A1

公开(公告)日：2017-01-05

申请号：US14788534

申请日：2015-06-30

Applicant: Agilent Technologies, Inc.

Inventor： Adam Kleczewski ,  Richard P. Tella ,  Dower Cameron Bricker ,  Yang Han

IPC: G01J4/02 ,  H01S5/00 ,  G02B26/00 ,  G02B5/30 ,  G02B27/28 ,  H01S5/34 ,  H01S5/40

CPC classification number: G01J4/02 ,  G01N2021/217 ,  G01N2021/556 ,  G02B5/3058 ,  G02B26/00 ,  G02B27/286 ,  G02F1/0136 ,  H01S5/005 ,  H01S5/0071 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4075

Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.

Abstract translation: 公开了一种具有第一和第二线栅偏振器的光源和发射以传播方向为特征的线偏振光束的激光器。 第一线栅偏振滤光器的特征在于第一线性偏振光通过方向和第一致动器，用于使第一线偏振光通过方向相对于线偏振光束旋转。 第二线栅偏振滤光器的特征在于第二线偏振光通过方向，第二致动器用于使第二线偏振光通过方向相对于线偏振光束旋转。 A控制器设置第一和第二线性偏振通过方向以提供具有指定偏振方向的线偏振光。

公开(公告)号：US09354118B2

公开(公告)日：2016-05-31

申请号：US14173994

申请日：2014-02-06

Applicant: Film Sense, LLC

Inventor： Blaine D. Johs ,  Bruce A. Hadwiger

IPC: G01J4/02 ,  G01N21/21

CPC classification number: G01J4/02 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/215 ,  G01N2021/216

Abstract: A multiple wavelength ellipsometer system for use in thin film characterization is disclosed. The light source for the system may include sequentially scanned multiple light emitting diodes or laser diodes. The polarization state detector may comprise no moving parts, and utilizes economical uncoated glass plates as beam splitters. The system compensates for potential measurement errors induced by misalignment of the input beam angle to the polarization state detector via a paired arrangement of the beam splitters. To provide improved accuracy in the analysis of data acquired by the system, methods herein actively compensate for the relatively large bandwidth of a preferable light emitting diode source.

Abstract translation: 公开了用于薄膜表征的多波长椭偏仪系统。 该系统的光源可以包括顺序扫描的多个发光二极管或激光二极管。 偏振状态检测器可以不包括移动部件，并且使用经济的未涂覆玻璃板作为分束器。 该系统通过分束器的配对布置来补偿由输入光束角与偏振状态检测器的未对准而引起的潜在测量误差。 为了提供对由系统获取的数据的分析的改进的精度，本文中的方法主动地补偿优选的发光二极管源的相对大的带宽。

公开(公告)号：US20150323445A1

公开(公告)日：2015-11-12

申请号：US14706743

申请日：2015-05-07

Applicant: Theodore Peter Rakitzis

Inventor： Theodore Peter Rakitzis

IPC: G01N21/19 ,  G01N21/21

CPC classification number: G01N21/19 ,  G01J4/02 ,  G01J4/04 ,  G01J2004/001 ,  G01N21/21 ,  G01N2201/06113 ,  G01N2201/0636 ,  G01N2201/067

Abstract: A polarimeter for measuring chirality of a material comprising an optical ring cavity comprising a plurality of reflective elements configured to promote bi-directional propagation of a laser beam within the cavity, a laser-emitting device configured to introduce a first input laser beam and a second input laser beam into the ring cavity, and a Faraday rotator and a phase compensator configured to suppress a birefringent background as the first and second laser beams pass through the ring cavity, wherein the plurality of mirrors, Faraday rotator, and phase compensator are configured such that light from the first and second laser beams passes through a chiral material located within the cavity a sufficient number of times for a measurement of optical rotary dispersion (ORD) and circular dichroism (CD) of light transmitted through the chiral material to be obtained. Particular implementations include monolithic ring cavities or microresonators or use of intra-cavity gain media.

Abstract translation: 一种用于测量包括光环腔的材料的手性的旋转计，包括配置成促进激光束在空腔内的双向传播的多个反射元件;激光发射器件，被配置为引入第一输入激光束和第二输入激光束 输入激光束进入环形腔，以及法拉第旋转器和相位补偿器，其构造成当第一和第二激光束通过环形空腔时抑制双折射背景，其中多个反射镜法拉第旋转器和相位补偿器被配置为 来自第一和第二激光束的光通过位于空腔内的手性材料足够多的次数，用于测量通过待获得的手性材料的光的旋转色散（ORD）和圆二色性（CD）。 具体的实施方式包括单片环腔或微谐振器或使用腔内增益介质。

公开(公告)号：US20150219497A1

公开(公告)日：2015-08-06

申请号：US14173994

申请日：2014-02-06

Applicant: Film Sense, LLC

Inventor： Blaine D. Johs ,  Bruce A. Hadwiger

IPC: G01J4/02

CPC classification number: G01J4/02 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/215 ,  G01N2021/216

Abstract: A multiple wavelength ellipsometer system for use in thin film characterization is disclosed. The light source for the system may include sequentially scanned multiple light emitting diodes or laser diodes. The polarization state detector may comprise no moving parts, and utilizes economical uncoated glass plates as beam splitters. The system compensates for potential measurement errors induced by misalignment of the input beam angle to the polarization state detector via a paired arrangement of the beam splitters. To provide improved accuracy in the analysis of data acquired by the system, methods herein actively compensate for the relatively large bandwidth of a preferable light emitting diode source.

Abstract translation: 公开了用于薄膜表征的多波长椭偏仪系统。 该系统的光源可以包括顺序扫描的多个发光二极管或激光二极管。 偏振状态检测器可以不包括移动部件，并且使用经济的未涂覆的玻璃板作为分束器。 该系统通过分束器的配对布置补偿由输入光束角与偏振状态检测器的未对准而引起的潜在测量误差。 为了提供对由系统获取的数据的分析的改进的精度，本文中的方法主动地补偿优选的发光二极管源的相对大的带宽。

公开(公告)号：US07961318B2

公开(公告)日：2011-06-14

申请号：US12305840

申请日：2007-06-27

Applicant: Peer Fischer ,  Ambarish Ghosh

Inventor： Peer Fischer ,  Ambarish Ghosh

IPC: G01J4/00

CPC classification number: G01J4/02 ,  G01N21/23

Abstract: A system and method for detection and measurement of circular birefringences in materials that exhibit the Faraday effect. The method and apparatus permit detection of optical activities via the difference in the directions of propagation the left- and the right-circularly polarized light (components). A beam of light is directed at an interface formed by the optically active medium and another medium such that a difference in the angles of refraction and/or reflection and/or diffraction between the left- and the right-circularly polarized components of the light beam can be detected. The difference in the propagation directions between the two circularly polarized light components is measured on a position sensitive detector and/or is detected as an intensity difference.

Abstract translation: 用于检测和测量呈现法拉第效应的材料中的圆形双折射的系统和方法。 该方法和装置允许通过左右偏振光（分量）的传播方向的差异来检测光学活动。 光束被引导到由光学活性介质和另一介质形成的界面，使得光束的左和右圆偏振分量之间的折射角和/或反射和/或衍射的差异 可以检测。 在位置敏感检测器上测量两个圆偏振光分量之间的传播方向的差异和/或被检测为强度差。

公开(公告)号：US20100231911A1

公开(公告)日：2010-09-16

申请号：US12305840

申请日：2007-06-27

Applicant: Peer Fischer ,  Ambarish Ghosh

Inventor： Peer Fischer ,  Ambarish Ghosh

IPC: G01J4/02

CPC classification number: G01J4/02 ,  G01N21/23

Abstract: A system and method for detection and measurement of circular birefringences in materials, such as optically active (chiral) liquids and materials that exhibit the Faraday effect. The method and apparatus permit the detection of optical activities via the difference in the directions of propagation the left- and the right-circularly polarized light (components). A beam of light is directed at an interface formed by the optically active medium and another medium such that a difference in the angles of refraction and/or reflection and/or diffraction between the left- and the right-circularly polarized components of the light beam can be detected. The difference in the propagation directions between the two circularly polarized light components is measured on a position sensitive detector and/or is detected as an intensity difference. The circular birefringence in isotropic liquids is a measure of their optical purity (enantiomeric excess) and hence the invention presents a method and apparatus to measure chirality. The invention is thus related to optical rotation (polarimetric) measurements, but has the advantage that it does not depend on path-length traversed through the sample.

Abstract translation: 用于检测和测量材料中的圆形双折射的系统和方法，例如表现出法拉第效应的光学活性（手性）液体和材料。 该方法和装置允许通过左右右偏振光（分量）的传播方向的差异来检测光学活动。 光束被引导到由光学活性介质和另一介质形成的界面，使得光束的左和右圆偏振分量之间的折射角和/或反射和/或衍射的差异 可以检测。 在位置敏感检测器上测量两个圆偏振光分量之间的传播方向的差异和/或被检测为强度差。 各向同性液体中的圆形双折射是它们的光学纯度（对映体过量）的量度，因此本发明提出了一种测量手性的方法和装置。 因此，本发明涉及光学旋转（偏振）测量，但其优点在于它不依赖于穿过样品的路径长度。

公开(公告)号：US07136172B1

公开(公告)日：2006-11-14

申请号：US10858795

申请日：2004-06-02

Applicant: Blaine D. Johs ,  Christopher A. Goeden ,  Galen L. Pfeiffer ,  Martin M. Liphardt

Inventor： Blaine D. Johs ,  Christopher A. Goeden ,  Galen L. Pfeiffer ,  Martin M. Liphardt

IPC: G01B11/14 ,  G01B11/24

CPC classification number: G01J4/02 ,  G01B11/26 ,  G01N21/211

Abstract: System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.

Abstract translation: 在分析样品特征数据时，用于设置和补偿在椭偏仪和类似系统中的预期和实现的发生角（AOI）和发生平面（POI）设置之间的检测误差的系统和方法。

公开(公告)号：US07016040B2

公开(公告)日：2006-03-21

申请号：US10670103

申请日：2003-09-23

Applicant: Chungte W. Chen ,  David A. Ansley

Inventor： Chungte W. Chen ,  David A. Ansley

IPC: G01J4/00

CPC classification number: G01J4/02

Abstract: An imaging polarimeter sensor includes an achromatic beam-splitting polarizer that receives a polychromatic image beam of a scene and simultaneously produces a first polarized polychromatic image beam and a second polarized polychromatic image beam. The second polarized polychromatic image beam is of a different polarization than the first polarized polychromatic image beam and is angularly separated from the first polarized polychromatic image beam. The achromatic beam-splitting polarizer preferably includes a Wollaston prism through which the polychromatic image beam passes, and at least one grating through which the polychromatic image beam passes either before or after it passes through the Wollaston prism. An imaging detector receives the first polarized polychromatic image beam and the second polarized polychromatic image beam and produces an output image signal responsive to the first polarized polychromatic image beam and the second polarized polychromatic image beam.

Abstract translation: 成像偏振计传感器包括接收场景的多色图像束并同时产生第一偏振多色图像束和第二偏振多色图像束的消色差分束偏振器。 第二偏振多色图像束具有与第一偏振多色图像束不同的偏振，并且与第一偏振多色图像束成角度地分离。 非彩色分光偏振器优选地包括多色图像束通过的沃拉斯顿棱镜，以及至少一个光栅，多色图像光束在其穿过渥拉斯顿棱镜之前或之后通过该光栅。 成像检测器接收第一偏振多色图像束和第二偏振多色图像束，并响应于第一偏振多色图像束和第二偏振多色图像束产生输出图像信号。

公开(公告)号：US5790259A

公开(公告)日：1998-08-04

申请号：US628257

申请日：1996-04-05

Applicant: Shinji Mizuhata ,  Hayami Hosokawa ,  Arata Nakamura ,  Nobuharu Ishikawa ,  Hiroyuki Inoue ,  Satoru Shimokawa ,  Masahiro Kurokawa ,  Kohei Tomita ,  Norimasa Yamanaka

Inventor： Shinji Mizuhata ,  Hayami Hosokawa ,  Arata Nakamura ,  Nobuharu Ishikawa ,  Hiroyuki Inoue ,  Satoru Shimokawa ,  Masahiro Kurokawa ,  Kohei Tomita ,  Norimasa Yamanaka

IPC: G01J4/02 ,  G01N21/55 ,  G01J4/00

CPC classification number: G01N21/55 ,  G01J4/02

Abstract: Each of a detection sample object and a non-detection sample object is illuminated with S-polarization light, for instance. S-polarization light and P-polarization light reflected from each sample object are detected by different photodetecting elements. Glossiness values and light quantities of the detection and non-detection sample objects are judged based on detection outputs of the photodetecting elements, and a glossiness difference and a light quantity difference are calculated. An evaluation function having at least one of the glossiness and the light quantity as a variable is determined by using the glossiness difference and the light quantity difference. Thresholds for object discrimination are calculated based on evaluation function values of the detection and non-detection sample objects.

Abstract translation: 例如，以S偏振光照射检测样本物体和非检测样本物体中的每一个。 通过不同的光检测元件检测从每个样本物体反射的S偏振光和P偏振光。 基于受光元件的检测输出来判断检测和非检测样本物体的光泽度值和光量，并且计算光泽度差和光量差。 通过使用光泽度差和光量差来确定具有光泽度和光量中的至少一个作为变量的评价函数。 基于检测和非检测样本对象的评估函数值计算对象辨别阈值。