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公开(公告)号：US10184835B2
公开(公告)日：2019-01-22
申请号：US14863225
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yang Han
Abstract: An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.
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公开(公告)号：US20170082538A1
公开(公告)日：2017-03-23
申请号：US14863341
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yuri Beregovski , Richard P. Tella , Yang Han
CPC classification number: G01N21/552 , G01J3/0213 , G01J3/0229 , G01N21/35 , G01N21/3563 , G01N2021/399 , G01N2201/0633 , G01N2201/10 , G01N2201/101 , G02B13/14 , G02B17/006 , G02B17/0808 , G02B21/002 , G02B21/02 , G02B21/04 , G02B21/10
Abstract: A scanner and an attenuated total reflection (ATR) objective for use in such scanners are disclosed The ATR objective includes first and second optical elements and an input port. The input port receives an input collimated light beam that is focused to a point on a planar face of the first optical element by the second optical element such that substantially all of that portion is reflected by the planar face and no portion of the input beam strikes the planar face at an angle greater than the critical angle. The second optical element also generates an output collimated light beam from light reflected from the planar face that is characterized by a central ray that is coincident with the central ray of the input collimated light beam. A light beam converter receives the first collimated light beam and generates the input collimated light beam therefrom.
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Patent Agency Ranking
公开(公告)号：US09651426B2
公开(公告)日：2017-05-16
申请号：US14788534
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Adam Kleczewski , Richard P Tella , Dower Cameron Bricker , Yang Han
CPC classification number: G01J4/02 , G01N2021/217 , G01N2021/556 , G02B5/3058 , G02B26/00 , G02B27/286 , G02F1/0136 , H01S5/005 , H01S5/0071 , H01S5/3401 , H01S5/3402 , H01S5/4012 , H01S5/4075
Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.
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公开(公告)号：US20170003170A1
公开(公告)日：2017-01-05
申请号：US14788534
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Adam Kleczewski , Richard P. Tella , Dower Cameron Bricker , Yang Han
CPC classification number: G01J4/02 , G01N2021/217 , G01N2021/556 , G02B5/3058 , G02B26/00 , G02B27/286 , G02F1/0136 , H01S5/005 , H01S5/0071 , H01S5/3401 , H01S5/3402 , H01S5/4012 , H01S5/4075
Abstract: A light source having first and second wire-grid polarizers and a laser that emits a beam of linearly polarized light that is characterized by a propagation direction is disclosed. The first wire-grid polarization filter is characterized by a first linear polarization pass direction and a first actuator for causing the first linear polarization pass direction to rotate relative to the beam of linearly polarized light. The second wire-grid polarization filter is characterized by a second linear polarization pass direction and a second actuator for causing the second linear polarization pass direction to rotate relative to the beam of linearly polarized light. A controller sets the first and second linear polarization pass directions to provide linearly polarized light having a specified polarization direction.
Abstract translation: 公开了一种具有第一和第二线栅偏振器的光源和发射以传播方向为特征的线偏振光束的激光器。 第一线栅偏振滤光器的特征在于第一线性偏振光通过方向和第一致动器，用于使第一线偏振光通过方向相对于线偏振光束旋转。 第二线栅偏振滤光器的特征在于第二线偏振光通过方向，第二致动器用于使第二线偏振光通过方向相对于线偏振光束旋转。 A控制器设置第一和第二线性偏振通过方向以提供具有指定偏振方向的线偏振光。
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公开(公告)号：US09863877B2
公开(公告)日：2018-01-09
申请号：US14863341
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yuri Beregovski , Richard P. Tella , Yang Han
IPC: G01N21/552 , G01N21/35 , G02B13/14 , G02B17/00 , G02B17/08 , G01N21/3563 , G01N21/39 , G01J3/02
CPC classification number: G01N21/552 , G01J3/0213 , G01J3/0229 , G01N21/35 , G01N21/3563 , G01N2021/399 , G01N2201/0633 , G01N2201/10 , G01N2201/101 , G02B13/14 , G02B17/006 , G02B17/0808 , G02B21/002 , G02B21/02 , G02B21/04 , G02B21/10
Abstract: A scanner and an attenuated total reflection (ATR) objective for use in such scanners are disclosed. The ATR objective includes first and second optical elements and an input port. The input port receives an input collimated light beam that is focused to a point on a planar face of the first optical element by the second optical element such that substantially all of that portion is reflected by the planar face and no portion of the input beam strikes the planar face at an angle less than the critical angle. The second optical element also generates an output collimated light beam from light reflected from the planar thce that is characterized by a central ray that is coincident with the central ray of the input collimated light beam. A light beam converter receives the first collimated light beam and generates the input collimated light beam therefrom.
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公开(公告)号：US20170082490A1
公开(公告)日：2017-03-23
申请号：US14863225
申请日：2015-09-23
Applicant: Agilent Technologies, Inc.
Inventor： Charles Hoke , Christopher Ryan Moon , Andrew Ghetler , Yang Han
CPC classification number: G01J3/2823 , G01J3/0213 , G01J3/0224 , G01J3/108 , G01J3/28 , G01J3/42
Abstract: An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.
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7.发明授权公开(公告)号：US09546905B1
公开(公告)日：2017-01-17
申请号：US14683841
申请日：2015-04-10
Applicant: Agilent Technologies, Inc.
Inventor： Yang Han , Miao Zhu , Adam Kleczewski
CPC classification number: G01J3/42 , G01J3/0224 , G01J2003/425 , G01N21/21 , G01N21/39 , G01N21/55 , G01N2021/399 , G01N2021/556
Abstract: A method and apparatus for measuring diffuse and specularly reflected light from a sample to provide a reflection spectrum as a function of wavelength and as a function of position on a sample is disclosed. The apparatus includes a MIR light source that generates an illumination beam of linearly polarized light. An illumination system illuminates a location on a specimen with part of the illumination beam. A linear polarization filter characterized by a polarization axis that defines a direction of polarization of linearly polarized light that is reflected by the linear polarization filter, a first detector that measures an intensity of light leaving the linear polarization filter and a light collection system collects light reflected from the location on the specimen and directs that light to the linear polarization filter. A controller measures an output from the first detector for each of a plurality of different polarization axis positions.
Abstract translation: 公开了一种用于测量来自样品的漫反射和反射光的方法和装置，以提供作为波长的函数的反射光谱和作为样品上位置的函数的函数。 该装置包括产生线性偏振光的照明光束的MIR光源。 照明系统用部分照明光束照射样本上的位置。 线性偏振滤光器，其特征在于限定由线偏振滤光器反射的线偏振光的偏振方向的偏振轴，测量离开线偏振滤光器的光的强度的第一检测器，以及光收集系统收集反射的光 从样品上的位置引导光线到线偏振滤光片。 控制器针对多个不同的偏振轴位置中的每一个测量来自第一检测器的输出。
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