中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

120 records (took 0.027 seconds)

    High speed laser scanning inspection system
    91.
    发明申请
    High speed laser scanning inspection system 有权

    公开(公告)号：US20060132758A1

    公开(公告)日：2006-06-22

    申请号：US11317156

    申请日：2005-12-22

    Applicant: Daniel Some

    Inventor： Daniel Some

    IPC: G01N21/88

    CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

    High speed laser scanning inspection system
    92.
    发明申请
    High speed laser scanning inspection system 有权

    公开(公告)号：US20030227618A1

    公开(公告)日：2003-12-11

    申请号：US10386973

    申请日：2003-03-11

    Applicant: Applied Materials Israel Ltd

    Inventor： Daniel Some

    IPC: G01N021/00

    CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

    Method and apparatus for detecting foreign particle
    93.
    发明授权
    Method and apparatus for detecting foreign particle 失效
    用于检测外来颗粒的方法和装置

    公开(公告)号：US4965454A

    公开(公告)日：1990-10-23

    申请号：US298574

    申请日：1989-01-18

    Applicant: Toshihiko Yamauchi ,  Nobuyuki Akiyama

    Inventor： Toshihiko Yamauchi ,  Nobuyuki Akiyama

    IPC: G01N21/33 ,  G01N21/94 ,  G01N21/956 ,  G03F7/20

    CPC classification number: G03F7/70483 ,  G01N21/94 ,  G01N2021/4702 ,  G01N2021/473 ,  G01N2021/95676 ,  G01N21/33 ,  G01N2201/104

    Abstract: The present invention resides in a method and apparatus for detecting a foreign particle, wherein an ultraviolet light beam is radiated in the form of a spot to a sample having a protective film formed on a circuit pattern or a wiring pattern; the spot and the sample are scanned relative to each other; the ultraviolet light is absorbed by the protective film; diffracted light produced from a foreign particle present on the protective film is condensed by an integrating sphere; the thus-condensed light is sensed by an optoelectro transducer to convert it into an electric signal; and the foreign particle present on the protective film formed on the circuit pattern or the wiring pattern is detected on the basis of the electric signal provided from the optoelectro transducer.

    Abstract translation: 本发明涉及一种用于检测外来颗粒的方法和装置，其中将紫外光束以斑点的形式照射到具有形成在电路图形或布线图案上的保护膜的样品; 斑点和样品相对于彼此扫描; 紫外线被保护膜吸收; 存在于保护膜上的异物产生的衍射光被积分球冷凝， 这样聚光由光电转换器感测，以将其转换为电信号; 并且基于从光电转换器提供的电信号检测存在于形成在电路图案或布线图案上的保护膜上的异物。

    2D 어레이의 스폿을 이용한 경사 입사 스캐닝 시스템 및 방법
    94.
    发明公开
    2D 어레이의 스폿을 이용한 경사 입사 스캐닝 시스템 및 방법 审中-公开
    用二维阵列斑点进行斜入射扫描的系统和方法

    公开(公告)号：KR20180004239A

    公开(公告)日：2018-01-10

    申请号：KR20177035244

    申请日：2016-05-04

    IPC: G01N21/95 ,  G01N21/88 ,  G02B26/10 ,  G02B27/10 ,  G02B27/12 ,  G02F1/33

    CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0635 ,  G01N2201/104 ,  G01N2201/105 ,  G01N2201/106 ,  G02B26/101 ,  G02B27/1086 ,  G02B27/123 ,  G02F1/33

    Abstract: 경사각멀티빔 스폿스캐닝웨이퍼검사시스템에서복수의빔 라인을생성하는시스템은조명빔을스캔하도록구성된빔 스캐닝디바이스, 샘플의표면에대해경사각으로배향되고대물렌즈및 샘플상의제 1 스캐닝방향에수직인광축을갖는대물렌즈, 및대물렌즈와빔 스캐닝디바이스사이에배치된하나이상의광학요소를포함한다. 하나이상의광학요소는 2개이상의오프셋빔이제 1 방향에수직인적어도제 2 방향으로분리되도록빔을 2개이상의오프셋빔으로분할한다. 하나이상의광학요소는 2개이상의오프셋빔이스캔중에샘플에동시에포커싱되도록 2개이상의오프셋빔의위상특성을또한수정한다.

    Abstract translation: 倾斜角的多束斑扫描系统中的晶片测试，用于产生多个束线的系统中的倾斜角度的光束扫描装置的表面被定向，一个样品，用于扫描在垂直于物镜在所述第一扫描方向和所述样品光轴的光束 并且至少一个光学元件设置在物镜和光束扫描装置之间。 所述至少一个光学元件将所述光束分成两个或更多偏移光束，使得所述至少两个偏移光束现在在至少垂直于一个方向的第二方向上分离。 该至少一个光学元件还修改两个或更多偏移束的相位特性，使得两个或更多个偏移束在扫描期间同时聚焦在样本上。

    비전 검사 시스템 및 이것을 이용한 피검사체의 검사 방법
    95.
    发明授权
    비전 검사 시스템 및 이것을 이용한 피검사체의 검사 방법 有权
    视觉检查系统及使用其检查工作的方法

    公开(公告)号：KR100803046B1

    公开(公告)日：2008-02-18

    申请号：KR1020070030469

    申请日：2007-03-28

    Applicant: 에스엔유 프리시젼 주식회사

    Inventor： 안우정 ,  김정환 ,  유희욱

    IPC: G02F1/13

    CPC classification number: G01N21/88 ,  G01N21/8901 ,  G01N21/8903 ,  G01N2201/104

    Abstract: A vision inspection system and a method for inspecting a workpiece using the same are provided to obtain image data by simultaneously transferring the workpiece and a camera so as to be adjacent to each other through each operation of first and second transfer devices, thereby preventing generation of vibration by minimizing torque applied to an entire system of the camera, and significantly improving reliability of the image data. In upper both sides of a plate(20), first and second locations are provided. A first transfer unit(30) is installed in an upside of the plate, has a table(32) where a workpiece(2) is placed, and linearly moves the table between the first and second locations. A camera(40) is disposed in an upper part of the plate in order to photograph an image of the workpiece and output image data. A second transfer unit(50) is installed in the upside of the plate, and linearly moves the camera between the first and second locations. A computer(60) is connected to the first transfer unit, the camera and the second transfer unit and transfers the table from the first location to the second location by controlling operations of the first transfer unit. At the same time, the computer moves the camera from the second location to the first locations by controlling operations of the second transfer unit. In the computer, an image processing program for processing the image data inputted from the camera is installed.

    Abstract translation: 提供了一种视觉检查系统和使用其的工件的检查方法，以通过第一和第二传送装置的每次操作同时传送工件和照相机以彼此相邻来获得图像数据，从而防止产生 通过使施加到相机的整个系统的扭矩最小化，并显着提高图像数据的可靠性来进行振动。 在板（20）的上两侧设有第一和第二位置。 第一传送单元（30）安装在板的上侧，具有放置工件（2）的工作台（32），并且在第一和第二位置之间线性地移动工作台。 相机（40）设置在板的上部，以便拍摄工件的图像并输出图像数据。 第二传送单元（50）安装在板的上侧，并且在第一和第二位置之间线性移动照相机。 计算机（60）连接到第一传送单元，照相机和第二传送单元，并且通过控制第一传送单元的操作将表从第一位置传送到第二位置。 同时，计算机通过控制第二传送单元的操作将相机从第二位置移动到第一位置。 在计算机中，安装用于处理从相机输入的图像数据的图像处理程序。

    Fluorescence detector
    97.
    发明专利
    Fluorescence detector 有权
    荧光检测器

    公开(公告)号：JP2014002063A

    公开(公告)日：2014-01-09

    申请号：JP2012137988

    申请日：2012-06-19

    Applicant: Sharp Corp ,  シャープ株式会社

    Inventor： KAWAMUKI RYOHEI

    IPC: G01N21/64

    CPC classification number: G01N21/6456 ,  G01N21/6486 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/101 ,  G01N2201/104

    Abstract: PROBLEM TO BE SOLVED: To prevent an optical member from being easily affected by heat generation of a drive unit of an optical head.SOLUTION: A scan module 9 is disposed on an upper side of a first plate 32, and a first motor 39 for moving the scan module 9 in a second scan direction and a second motor 49 for moving the scan module 9 in a first scan direction are disposed on a lower side of the first plate 32. In such a manner, the first motor 39 and the second motor 49 to be a heat source are installed on the opposite side of the side of the scan module 9 with the first plate 32 as a boundary, and a transmission amount of heat from the first motor 39 and the second motor 49 to the scan module 9 is reduced. As a result, decline of fluorescence detection accuracy due to thermal distortion of a detection optical system inside the scan module 9 is prevented.

    Abstract translation: 要解决的问题：防止光学构件容易受到光学头的驱动单元的发热的影响。解决方案：扫描模块9设置在第一板32的上侧，第一马达39用于 在第二扫描方向上移动扫描模块9，并且在第一扫描方向上移动扫描模块9的第二马达49设置在第一板32的下侧。以这种方式，第一马达39和第二马达 作为热源的电动机49安装在扫描模块9侧的相对侧，第一板32作为边界，并且将来自第一电动机39和第二电动机49的热量传递到扫描模块 9减少。 结果，防止了由于扫描模块9内部的检测光学系统的热失真引起的荧光检测精度的下降。

Patent Agency Ranking