公开(公告)号：CN107202760A

公开(公告)日：2017-09-26

申请号：CN201710342764.2

申请日：2017-05-16

Applicant: 同济大学

Inventor： 潘永东 ,  冯湾湾 ,  吴昊 ,  茹东恒

IPC: G01N21/17

CPC classification number: G01N21/1702 ,  G01N2021/1706 ,  G01N2021/1708 ,  G01N2201/06113 ,  G01N2201/106

Abstract: 本发明涉及一种激光激发表面波测量声弹性常数的方法，该方法包括以下步骤：1)通过数据线将检测装置的各部件连接完整并通电；2)使待检试样位于振镜扫描头的焦距处，使振镜扫描头扫描的有效区域位于待检试样的中心处，并使待检试样的激光扫描面平行于振镜扫描头平面；3)采用压电传感器获取在无应力状态下激光激发的超声表面波波速；4)对待检试样进行逐级加载，进行数据采集，并且获取不同载荷下的超声表面波波速；5)对不同载荷下的超声表面波波速数据进行线性拟合，拟合得到波速的相对变化随应力变化的直线方程。与现有技术相比，本发明具有激光激发压电传感接收、分辨率高、装置方法简单、测量精度高等优点。

公开(公告)号：EP3286780A1

公开(公告)日：2018-02-28

申请号：EP16783746

申请日：2016-04-20

Applicant: KLA-TENCOR CORP

Inventor： SULIVAN JAMIE ,  CAI WENJIAN ,  CAO KAI

IPC: H01L21/66 ,  G01N23/203

CPC classification number: G02B13/0095 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2201/106 ,  G01N2201/12

Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.

公开(公告)号：EP3295477A1

公开(公告)日：2018-03-21

申请号：EP16793208

申请日：2016-05-04

Applicant: KLA TENCOR CORP

Inventor： SULLIVAN JAMIE ,  CHURIN YEVGENIY

IPC: H01L21/66

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0635 ,  G01N2201/104 ,  G01N2201/105 ,  G01N2201/106 ,  G02B26/101 ,  G02B27/1086 ,  G02B27/123 ,  G02F1/33

Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.

公开(公告)号：EP0532927A2

公开(公告)日：1993-03-24

申请号：EP92114182.6

申请日：1992-08-20

Applicant: KLA INSTRUMENTS CORPORATION

Inventor： Whil,Mark Joseph ,  Fu,Tao-Yi

IPC: G01N21/88 ,  G03F9/00

CPC classification number: G01N21/95607 ,  G01N2021/558 ,  G01N2021/8861 ,  G01N2021/95615 ,  G01N2021/95676 ,  G01N2201/106

Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

Abstract translation: 一种自动化光掩模检查装置，包括用于在XY平面中的蛇形路径中传送被测试的基板的XY状态（12），包括激光器（30），透射光检测器（34）的光学系统（16） ，反射光检测器（36），限定参考光束路径的光学元件和激光器，衬底和检测器之间的照明光束路径，以及用于相对于照射和参考光束往复扫描照射和参考光束的声光束扫描器（40,42） 基板表面，以及用于控制台和光学系统的操作以及用于解释和存储由检测器输出的信号的电子控制，分析和显示系统。 该设备可以以管芯到管芯的比较模式或管芯到数据库模式工作。

公开(公告)号：US20190234911A1

公开(公告)日：2019-08-01

申请号：US16337339

申请日：2017-09-28

Applicant: THE REGENTS OF THE UNIVERSITY OF COLORADO A BODY CORPORATE

Inventor： Todd W. Murray ,  Peter Burgholzer ,  Markus Haltmeier

IPC: G01N29/44 ,  G01N29/24

CPC classification number: G01N29/4472 ,  G01N21/1702 ,  G01N21/4795 ,  G01N29/00 ,  G01N29/0672 ,  G01N29/2418 ,  G01N2021/1706 ,  G01N2021/479 ,  G01N2021/8444 ,  G01N2201/106

Abstract: A method for high resolution photoacoustic imaging in scattering media using structured illumination may include illuminating a sample of an absorption object with structured illumination, including illuminating the sample with multiple different speckle patterns at different times. The method may also include detecting multiple photoacoustic signals generated by the absorption object in response to illumination with the different speckle patterns to generate multiple photoacoustic responses. The method may also include reconstructing an absorber distribution of the absorption object by exploiting joint sparsity of sound sources in the plurality of photoacoustic responses.

公开(公告)号：US20160313256A1

公开(公告)日：2016-10-27

申请号：US15004331

申请日：2016-01-22

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Wenjian Cai ,  Kai Cao

IPC: G01N21/88 ,  G02F1/33 ,  G02B13/00 ,  G01N21/95

CPC classification number: G02B13/0095 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/95607 ,  G01N2201/106 ,  G01N2201/12

Abstract: A spot scanning imaging system with run-time alignment includes a beam scanning device configured to linearly scan a focused beam of illumination across a sample, one or more detectors positioned to receive light from the sample, and a controller communicatively coupled to the beam scanning apparatus, the sample stage, and the one or more detectors. The controller is configured to store a first image, transmit a set of drive signals to at least one of the beam scanning device, the sample stage, or the one or more detectors, compare at least a portion of the second sampling grid to at least a portion of the first sampling grid to determine one or more offset errors, and adjust at least one drive signal in the set of drive signals based on the one or more offset errors such that the second sample grid overlaps the first sample grid.

Abstract translation: 具有运行时间对准的点扫描成像系统包括：束扫描装置，其被配置为线性扫描横跨样本的聚焦光束，一个或多个检测器，定位成接收来自样品的光;以及控制器，其通信地耦合到光束扫描装置 ，样品台和一个或多个检测器。 所述控制器被配置为存储第一图像，将一组驱动信号发送到所述波束扫描设备，所述采样台或所述一个或多个检测器中的至少一个，将所述第二采样网格的至少一部分至少比较 第一采样网格的一部分以确定一个或多个偏移误差，并且基于所述一个或多个偏移误差来调整所述驱动信号集合中的至少一个驱动信号，使得所述第二采样网格与所述第一采样网格重叠。

公开(公告)号：US20100085561A1

公开(公告)日：2010-04-08

申请号：US12571791

申请日：2009-10-01

Applicant: Eiji KAMIYAMA ,  Takehiro TSUNEMORI ,  Kazuhiro YAMAMOTO ,  Kenji AOKI

Inventor： Eiji KAMIYAMA ,  Takehiro TSUNEMORI ,  Kazuhiro YAMAMOTO ,  Kenji AOKI

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2201/1045 ,  G01N2201/106

Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.

Abstract translation: 激光散射缺陷检查系统包括：台架单元，其使工件W旋转并沿一个方向输送工件W; 激光光源，其向安装在平台单元上的工件W发射激光束LB; 光学偏转器，其对从工件W上的激光光源发射的激光束LB进行扫描; 检测从工件W的表面散射的激光束LB的光检测器; 存储单元，其存储工件W的制造过程的每个检查步骤的缺陷检查条件，其中条件包括工件W的工件W的转速和移动速度，工件W上的扫描宽度和 扫描频率由光学偏转器; 以及控制单元，其读取存储单元中的每个检查步骤存储的缺陷检查条件，并且在条件下控制台单元和光偏转器的驱动。

公开(公告)号：US09939368B2

公开(公告)日：2018-04-10

申请号：US14490558

申请日：2014-09-18

Applicant: SAMSUNG MEDISON CO., LTD. ,  SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jong-kyu Jung ,  Dal-kwon Koh ,  Jung-ho Kim ,  Jung-taek Oh ,  Jae-kwang Lee

IPC: G01N21/17 ,  A61B5/00 ,  A61B8/00

CPC classification number: G01N21/1702 ,  A61B5/0062 ,  A61B5/0095 ,  A61B8/44 ,  A61B8/4427 ,  G01N2201/06113 ,  G01N2201/106

Abstract: Provided are a photoacoustic apparatus and method of operating the same. The photoacoustic apparatus includes: a laser module that generates laser light and transmits a laser state signal indicating a state of a laser module; a probe including an optical output unit for irradiating laser light generated by the laser module onto an object and a scanner for detecting a photoacoustic signal that is generated from the object; a scanner controller for controlling a position of the scanner; a sequence controller for controlling acquisition of the photoacoustic signal based on the laser state signal; a signal receiver that is controlled by the sequence controller to acquire the photoacoustic signal; and a photoacoustic image generator for generating a photoacoustic image based on the photoacoustic signal. The laser state signal includes a lasing ready state signal and a laser exposure state signal.

公开(公告)号：US07468507B2

公开(公告)日：2008-12-23

申请号：US11339044

申请日：2006-01-25

Applicant: Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

Inventor： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC: H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

Abstract: A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

Abstract translation: 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。

公开(公告)号：US20070133077A1

公开(公告)日：2007-06-14

申请号：US11339044

申请日：2006-01-25

Applicant: Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

Inventor： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC: G02B26/08

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

Abstract: A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

Abstract translation: 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。