公开(公告)号：EP0333561B1

公开(公告)日：1993-05-12

申请号：EP89400656.8

申请日：1989-03-08

Applicant: CHEMUNEX

Inventor： van Hoegaerden, Michel

IPC: G01N21/64

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N15/1475 ,  G01N21/6428 ,  G01N2021/0162 ,  G01N2201/1053 ,  G01N2201/1087

公开(公告)号：EP0319797A2

公开(公告)日：1989-06-14

申请号：EP88119684.4

申请日：1988-11-25

Applicant: MITSUI MINING & SMELTING CO., LTD.

Inventor： Moriya, Kazuo

IPC: G01N21/88 ,  G06T7/60

CPC classification number: G06T7/0004 ,  G01N21/9505 ,  G01N2021/1785 ,  G01N2021/4735 ,  G01N2021/8887 ,  G01N2201/102 ,  G01N2201/1087 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: A method and apparatus for measuring a defect distribution comprising introducing a narrowed laser beam into an object to be observed, receiving scattering lights generated at the defect portions of the object by a photoelectric conversion element, and measuring automatically the density and density distribution of the defects inside the object on the basis of the output image data of the photoelectric conversion element.

Abstract translation: 一种用于测量缺陷分布的方法和装置，包括将窄的激光束引入待观察的物体中，通过光电转换元件接收在物体的缺陷部分处产生的散射光，并自动测量缺陷的密度和密度分布 基于光电转换元件的输出图像数据在物体内部。