公开(公告)号：US20100006762A1

公开(公告)日：2010-01-14

申请号：US12565324

申请日：2009-09-23

Applicant: Atsuya Yoshida ,  Hiroshi Horiuchi

Inventor： Atsuya Yoshida ,  Hiroshi Horiuchi

IPC: G01J1/42 ,  G01J1/58

CPC classification number: G01T1/202 ,  C09K11/613 ,  C09K11/7733 ,  G21K4/00 ,  G21K2201/06

Abstract: A reflective resin sheet is bonded to one face of a supporting substrate transmitting a radiation ray and a resin sheet of the same material as that of the reflective resin sheet to the other face of the supporting substrate. A phosphor layer converting a radiation ray into visible light is formed additionally on the reflective resin sheet formed on one face of the supporting substrate. The phosphor layer is enclosed with an additional moisture-proof layer and the reflective resin sheet. It is possible to obtain a scintillator panel higher in sensitivity characteristics, stabilized in quality and more cost-effective by placing the reflective resin sheet between the supporting substrate and the phosphor layer.

Abstract translation: 将反射树脂片粘合到支撑基板的一个面上，该支撑基板将与辐射线和与反射树脂片材相同的材料的树脂片材传送到支撑基板的另一个面。 在形成在支撑基板的一个面上的反射树脂片上另外形成将辐射线转换成可见光的荧光体层。 荧光体层被附加的防潮层和反射树脂片包围。 通过将反射树脂片放置在支撑基板和荧光体层之间，可以获得灵敏度特性更高，质量稳定，成本更高的闪烁体面板。

公开(公告)号：US07511902B2

公开(公告)日：2009-03-31

申请号：US11723554

申请日：2007-03-21

Applicant: Gerd Wings ,  Christian Hoffmann ,  Klaus Wulf ,  Carsten Michaelsen

Inventor： Gerd Wings ,  Christian Hoffmann ,  Klaus Wulf ,  Carsten Michaelsen

IPC: G02B7/02

CPC classification number: G02B7/1824 ,  G21K2201/06

Abstract: A device for adjusting optical elements, in particular, for X-ray analysis, comprising a holding device (2) for receiving the optical element and at least two adjusting units at least one of the two longitudinal ends of the holding device (2), wherein the adjusting units each comprise one plunger (6, 6a, 6b, 6c, 6d), characterized in that each adjusting unit comprises a rotatably disposed adjusting ring (4, 4a, 4b, 4c, 4d) with an eccentric recess, and the optical element is mechanically coupled to the inner surfaces (7) of the adjusting rings (4, 4a, 4b, 4c, 4d) via the plungers (6, 6a, 6b, 6c, 6d). The adjusting device is compact, can be flexibly used and provides simple adjustment of the optical element.

Abstract translation: 一种用于调整光学元件的装置，特别是用于X射线分析的装置，包括用于容纳光学元件的保持装置（2）和保持装置（2）的两个纵向端部中的至少一个的至少两个调节单元， 其中所述调节单元各自包括一个柱塞（6,6a，6b，6c，6d），其特征在于，每个调节单元包括具有偏心凹槽的可旋转地布置的调节环（4,4a，4b，4c，4d），并且 光学元件经由柱塞（6,6a，6b，6c，6d）机械耦合到调节环（4,4a，4b，4c，4d）的内表面（7）。 调节装置紧凑，可灵活使用，并提供光学元件的简单调整。

公开(公告)号：US07505561B1

公开(公告)日：2009-03-17

申请号：US11985649

申请日：2007-11-17

Applicant: Michael Keith Fuller

Inventor： Michael Keith Fuller

IPC: G01N23/201 ,  G01N23/20

CPC classification number: G01N23/223 ,  A61B6/00 ,  A61B6/4092 ,  A61B6/482 ,  A61B6/484 ,  G01N23/04 ,  G01N2223/076 ,  G21K2201/06

Abstract: A system for observing the internal features of an object, such that the object's internal absorption, refraction, reflection and/or scattering properties are visualized, is disclosed. An embodiment may include one or more beams of penetrating radiation, an object with internal features to be imaged, a single or an array of radiation optics, and a detection system for capturing the resultant shadowgraph images. The beam(s) of radiation transmitted through the object typically originate from a line-shaped source(s), which has high spatial purity along the narrow axis, and low spatial purity in the perpendicular, long axis. In the long axis, radiation optic(s) capture and focus diverging rays exiting from the object to form a high resolution image of the object, without which optic(s) the shadowgraph would have blurring in this axis. Such shadowgraph is naturally well defined in the opposite axis of narrow beam origin and can reveal an object's refraction, reflection and/or scattering properties along that axis. An embodiment may also include discriminators (stops, phase shifters, analyzer crystals, etc.) in the beam exiting the object. An embodiment may also include mechanisms for scanning whereby a two-dimensional or three-dimensional image of a large object is made possible. An embodiment may also include an image of an object's internal features being derived from an analysis of the radiation and/or radiation waveform exiting the object.

Abstract translation: 公开了一种用于观察物体的内部特征的系统，使得物体的内部吸收，折射，反射和/或散射特性被可视化。 一个实施例可以包括一个或多个穿透辐射束，具有要成像的内部特征的物体，单个或一组辐射光学器件，以及用于捕获所得到的阴影图像的检测系统。 透过物体的辐射束通常来源于沿着窄轴具有高空间纯度和垂直长轴的空间纯度低的线状源。 在长轴上，辐射光学器件捕获并聚焦从物体出射的发散光线，以形成物体的高分辨率图像，而没有这些光学元件的阴影图将在该轴上具有模糊。 这样的阴影图自然界定在窄波束起源的相反轴线上，并且可以沿着该轴显示物体的折射，反射和/或散射特性。 实施例还可以包括离开物体的光束中的鉴别器（停止点，移相器，分析器晶体等）。 一个实施例还可以包括用于扫描的机构，从而可以实现大对象的二维或三维图像。 实施例还可以包括物体的内部特征的图像，其从离开物体的辐射和/或辐射波形的分析得到。

公开(公告)号：US20090060144A1

公开(公告)日：2009-03-05

申请号：US11848700

申请日：2007-08-31

Applicant: Bonglea Kim

Inventor： Bonglea Kim

IPC: G21K1/02

CPC classification number: G03F7/7085 ,  G03F7/70008 ,  G21K1/02 ,  G21K2201/06

Abstract: A system for x-ray optical alignment. The system includes an x-ray source, an optic, a collimation element, and alignment sensors. The x-ray source generates an x-ray beam that is directed by the optic at a sample. The collimation element is located between the optic and the sample to define the profile of the x-ray beam. The sensors receive the x-ray beam from the optic and generated signal indicative of the system alignment. The sensors may be located on a surface of the collimation element facing the optic. The inner edge of the sensors may be located at equal intervals radially about the collimation element and may form an aperture having a symmetric shape.

Abstract translation: 一种用于x射线光学对准的系统。 该系统包括X射线源，光学元件，准直元件和对准传感器。 x射线源产生由光学元件在样本处引导的X射线束。 准直元件位于光学元件和样品之间以限定X射线束的轮廓。 传感器从光学器件接收X射线束并产生指示系统对准的信号。 传感器可以位于准直元件面向光学元件的表面上。 传感器的内边缘可以围绕准直元件径向相等的间隔定位并且可以形成具有对称形状的孔。

公开(公告)号：US07273289B2

公开(公告)日：2007-09-25

申请号：US11132783

申请日：2005-05-19

Applicant: Paul E. Denham

Inventor： Paul E. Denham

IPC: G02B7/182

CPC classification number: G02B7/1821 ,  G02B5/0891 ,  G02B26/101 ,  G03F7/70058 ,  G03F7/701 ,  G03F7/702 ,  G03F7/70825 ,  G03F7/70841 ,  G21K2201/06

Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Abstract translation: 具有高效率反射涂层的紧凑且真空兼容的电磁线圈驱动可倾斜平台可用作EUV应用中的扫描仪。 扫描仪的驱动电子设备完全可原地编程并可快速切换。

公开(公告)号：US07196342B2

公开(公告)日：2007-03-27

申请号：US11174442

申请日：2005-06-29

Applicant: Alexander I. Ershov ,  William F. Marx

Inventor： Alexander I. Ershov ,  William F. Marx

IPC: C25F1/00

CPC classification number: B82Y10/00 ,  G03F7/70033 ,  G03F7/70175 ,  G03F7/7085 ,  G03F7/70916 ,  G21K1/06 ,  G21K2201/06 ,  H05G2/001

Abstract: Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.

Abstract translation: 公开了用于减少等离子体产生的碎片对EUV光源的内部部件的影响的系统和方法。 一方面，提供了一种EUV气象监测器，其可以具有加热器以将内部多层过滤镜加热到足以从反射镜去除沉积的碎屑的温度。 在另一方面，公开了一种用于从收集器反射镜上的不同区域处具有不同碎屑沉积速率的EUV光源收集镜去除等离子体产生的碎屑的装置。 在特定方面，EUV收集器镜系统可以包括氢源以与Li碎片结合以在收集器表面上产生LiH; 以及从收集器表面溅射LiH的溅射系统。 在另一方面，公开了一种用于从具有受控等离子体蚀刻速率的EUV光源收集镜的表面蚀刻碎片的装置。

公开(公告)号：US20060292457A1

公开(公告)日：2006-12-28

申请号：US11167560

申请日：2005-06-28

Applicant: Hendricus Johannes Meijer ,  Uwe Mickan ,  Marco Kluse

Inventor： Hendricus Johannes Meijer ,  Uwe Mickan ,  Marco Kluse

IPC: A47G1/12 ,  G03B27/62 ,  B05B5/053 ,  G03F1/14 ,  G21K5/00 ,  G03F1/00

CPC classification number: G03F7/70941 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/38 ,  G03F1/40 ,  G03F7/707 ,  G03F7/70708 ,  G21K2201/06

Abstract: A reticle includes an area provided with a conductive metal-based compound coating for electrically grounding the reticle. The reticle is suitable for use with a lithography apparatus whereby the reticle pattern is imaged using extreme ultra violet radiation. One or more conducting pins, held at zero potential, may be pressed against the conductive coating for electrically grounding the reticle either during patterning the reticle by electron beam writing or during use in the lithographic apparatus. The areas coated with the metal-based compounds are wear resistant which reduces the occurrence of particles due to damage caused by mechanical contact between the conducting pins and the conductive coating.

公开(公告)号：US07130370B2

公开(公告)日：2006-10-31

申请号：US10872777

申请日：2004-06-22

Applicant: Muradin Abubekirovich Kumakhov

Inventor： Muradin Abubekirovich Kumakhov

IPC: G01N23/22

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G21K2201/06

Abstract: Inventions related to the intra-vision means, designed for production of visually sensed images of the internal structure of an object, in particular, of a biological object, are aimed at higher accuracy of determining the relative density indices of the object's substance in the obtained image together with avoiding complex and expensive engineering; when used for diagnostic purposes in medicine, the dosage of tissues surrounding those that are examined is decreased. X-rays from source 1 is concentrated (for example, using X-ray lens 2) in the zone that includes the current point 4, to which the measurement results are attributed and which is located within the target area 7 of the object 5. Excited in this zone secondary scattered radiation (Compton, fluorescent) is transported (for example, using X-ray lens 3) to one or more detectors 6. By moving the said zone, the target area 7 of object 5 is scanned, and based upon population of the intensity values of the secondary radiation, which are obtained with the help of one or more detectors 6 and which are determined concurrently with coordinates of the current point 6, judgment on the density of the object's substance in this point is made. Density values together with respective coordinate values obtained using sensors 11 are used in the means 12 for data processing and imaging to build up a picture of substance density distribution in the target area of the object.

Abstract translation: 旨在用于生产对象的内部结构，特别是生物体的视觉感测图像的视觉内装置的发明旨在提高确定所获得物体物质的相对密度指数的精度 形象与避免复杂和昂贵的工程; 当在医学中用于诊断目的时，减少了被检查的组织周围的组织的剂量。 来自源1的X射线在包括当前点4的区域中被集中（例如，使用X射线透镜2），测量结果被归因于并且位于对象5的目标区域7内的区域。 在该区域激发二次散射辐射（康普顿荧光）被传送（例如，使用X射线透镜3）到一个或多个检测器6。 通过移动所述区域，对象5的目标区域7被扫描，并且基于通过一个或多个检测器6的帮助获得并且与第二辐射的坐标同时确定的二次辐射的强度值的总体 现在点6，就此对物体物质的密度进行判断。 在用于数据处理和成像的装置12中使用密度值以及使用传感器11获得的各个坐标值，以建立物体的目标区域中物质密度分布的图像。

公开(公告)号：US20060176547A1

公开(公告)日：2006-08-10

申请号：US11054040

申请日：2005-02-08

Applicant: Jose Sasian

Inventor： Jose Sasian

IPC: G02B5/08

CPC classification number: G03F7/702 ,  G02B17/0605 ,  G02B17/0615 ,  G02B27/0043 ,  G03F7/70175 ,  G21K2201/06

Abstract: A collector is described that comprises a laser produced plasma (LPP) extreme ultra violet (EUV) light source and a first optical path from the source to a mirror. The mirror is the first mirror that light emitted from the source and traveling along the first optical path impinges upon. The collector also includes a second optical path from the source to another mirror. The other mirror is the first mirror that light emitted from the source and traveling along the second path impinges upon. The mirror and the other mirror are oriented relative to the source such that light from the source traveling along the first optical path travels in a direction opposite to light traveling from the source along the second optical path. A collector having a discharge extreme ultra violet (EUV) light source is also described.

Abstract translation: 描述了一种收集器，其包括激光产生的等离子体（LPP）极紫外（EUV）光源和从源到反射镜的第一光路。 镜子是从光源发射并沿着第一光路行进的光照射的第一个反射镜。 收集器还包括从源到另一个反射镜的第二光路。 另一个镜子是从源头发出并沿着第二条路径行进的光线的第一个反射镜。 反射镜和另一个反射镜相对于光源定向，使得沿着第一光路行进的光的光沿与第二光路从光源行进的光相反的方向行进。 还描述了具有放电极紫外（EUV）光源的集电极。

公开(公告)号：US20060137614A1

公开(公告)日：2006-06-29

申请号：US11357827

申请日：2006-02-16

Applicant: Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

Inventor： Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

IPC: C23C16/00

CPC classification number: C23C14/081 ,  C23C14/0021 ,  C23C14/0694 ,  C23C14/08 ,  C23C14/083 ,  C23C14/10 ,  C23C14/14 ,  C23C14/32 ,  C30B23/02 ,  C30B29/02 ,  G02B5/0858 ,  G21K1/06 ,  G21K2201/06 ,  Y10T428/12174 ,  Y10T428/12736 ,  Y10T428/12896 ,  Y10T428/12993 ,  Y10T428/31678

Abstract: The metal film of the present invention is a dense film of a single crystal that has very low surface roughness and very good crystal orientation because an arithmetic mean roughness of the surface is not larger than 2 nm and a (111) peak intensity of X-ray diffraction is not less than 20 times the sum of all other peaks. Also the metal oxide film of the present invention is a dense film that includes less oxygen defects and almost no voids therein because a content of a non-oxidized metal is not higher than 1 mole % of a metal component that constitutes the metal oxide and a packing density is 0.98 or higher.

Abstract translation: 本发明的金属膜是具有非常低的表面粗糙度和非常好的晶体取向的单晶的致密膜，因为表面的算术平均粗糙度不大于2nm，并且（111）的X-射线衍射峰强度， X射线衍射不小于所有其他峰的总和的20倍。 另外，本发明的金属氧化物膜是由于非氧化金属的含量不高于构成金属氧化物的金属成分的1摩尔％而含有氧缺陷少，几乎无空隙的致密膜， 填充密度为0.98以上。