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    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION
    95.
    发明公开
    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION 有权
    用于高压操作的电离计量器

    公开(公告)号：EP2800960A4

    公开(公告)日：2015-07-08

    申请号：EP13746239

    申请日：2013-02-07

    Applicant: MKS INSTR INC

    Inventor： BRUCKER GERARDO A

    IPC: G01L21/32 ,  H01J41/04

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于离子化体积的末端，使得电子源暴露于从集电极和包络面喷出的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，并且可选地包括在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

    A method for self-cleaning of a photo-ionization detector for volatile gases
    99.
    发明公开
    A method for self-cleaning of a photo-ionization detector for volatile gases 有权
    Methode zur Selbstreinigung eines PhotoionisationsdetektorsfürflüchtigeGase

    公开(公告)号：EP1243921A2

    公开(公告)日：2002-09-25

    申请号：EP02011787.5

    申请日：1999-10-20

    Applicant: RAE SYSTEMS, INC.

    Inventor： Sun, Hong T. ,  Hsi, Peter C.

    IPC: G01N27/66

    CPC classification number: G01N33/0029 ,  G01N27/66 ,  G01N33/0047 ,  H01J41/02

    Abstract: The PID includes an ultraviolet lamp for transmitting UV light through an optical window into an ionization chamber to ionize volatile gases. The UV lamp comprises a sealed envelope containing inert gases and a pair of driving electrodes disposed outside the sealed envelope to induce a glow discharge of the inert gases. An ion detector is disposed in the ionization chamber to detect the produced ions.
    During operation of the PID, the effectiveness decreases due to contamination formed in the ionization chamber. To remove the contamination, the pump is turned off while maintaining the transmission of the UV lamp. Thus the UV light creates an ozone discharge which accumulates in the ionization chamber. Ozone is a strong oxidant which etches and removes the contamination from the ionization chamber.

    Abstract translation: PID包括紫外线灯，用于将UV光通过光学窗口传输到电离室中以电离挥发性气体。 UV灯包括含有惰性气体的密封外壳和设置在密封外壳外部的一对驱动电极，以引起惰性气体的辉光放电。 离子检测器设置在电离室中以检测所产生的离子。 在PID运行期间，由于电离室中形成的污染，效果会降低。 为了清除污染物，在保持UV灯的传输的同时关闭泵。 因此，UV光产生积聚在电离室中的臭氧排放物。 臭氧是一种强氧化剂，可以蚀刻和去除电离室的污染物。

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