公开(公告)号：EP1631851A2

公开(公告)日：2006-03-08

申请号：EP04752112.5

申请日：2004-05-13

Applicant: Reflectivity Inc.

Inventor： PATEL, Satyadev, R. ,  HUIBERS, Andrew, G. ,  SPINDT, Christopher ,  HEUREUX, Peter

IPC: G02B26/00

CPC classification number: B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  C10L1/026 ,  G02B26/0841

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a preferably at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.

公开(公告)号：EP1555563A2

公开(公告)日：2005-07-20

申请号：EP05000603.0

申请日：2001-08-03

Applicant: Reflectivity Inc.

Inventor： Huibers, Andrew G. ,  Ilkov, Fedor ,  Patel, Satyadev ,  Richards, Peter W. ,  Stockton, John

IPC: G02B26/08 ,  G03B21/28

CPC classification number: G02B26/0841 ,  G02B27/0018

Abstract: A projection system for projection of a color image according to the invention, especially a front or rear projection TV according to the invention, comprises a light source for providing light to an array of micromirrors, especially an arc lamp; an array of micromirrors, each micromirror having a substantially four-sided shape; and a screen on which an image to be viewed is displayed. Light from the light source is incident on the array of micromirrors during operation and is directed as a rectangular image to the screen.The micromirrors are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on the screen. Each micromirror corresponds to a pixel in a viewed image on the screen. The viewed image has four sides and there are no pixel sides in the viewed image that are parallel to any image sides.

Abstract translation: 根据本发明的用于投影彩色图像的投影系统，特别是根据本发明的前投影电视或后投影电视，包括用于向微镜阵列，特别是弧光灯提供光的光源; 一组微镜，每个微镜具有基本上四边形的形状; 以及显示要被观看的图像的屏幕。 来自光源的光在操作期间入射到微镜阵列上，并作为矩形图像被引导到屏幕。微镜能够通过脉宽调制在OFF状态和ON状态之间移动，以实现灰度图像 屏幕。 每个微镜对应于屏幕上观看图像中的像素。 所观看的图像具有四个侧面，并且在所观看的图像中没有平行于任何图像侧的像素侧。

公开(公告)号：WO2005022886A3

公开(公告)日：2007-06-07

申请号：PCT/US2004027095

申请日：2004-08-19

Applicant: REFLECTIVITY INC ,  RICHARDS PETER

Inventor： RICHARDS PETER

IPC: G09G3/00 ,  G02B26/00 ,  G09G3/34 ,  G09G3/36 ,  G09G5/00 ,  H04N20060101

CPC classification number: G09G3/346 ,  G09G3/2014 ,  G09G3/2022 ,  G09G2300/08 ,  G09G2310/0235

Abstract: The present invention provides a method and apparatus of converting a stream of pixel data (120) in space and time into a stream of bitplane data. In particular, the presnt invention converts the pixel data (120) stream according to a predetermined output fromat. The apparatus of the present invention receives the pixel data (123) in a "real-time' fashion, and dynamically performs predefined permutations so as to accomplish the predeined trnspose operation. Alternatively, the pixel data are stroed in a storage medium (126), and the apparatus of the present invention retrieves the pixel data and performs the predefined permutation to accomplish the predefined transpose operation. The methods and apparatus disclosed herein are especially useful for processing a high-speed stream of digital dat in a flow-through manner and suitable for inplementation in a hardware video pipeline. The control signal fanout and gate count of this invention are reduced compared to currently available similar techniques for converting pixel data into bitplane data.

Abstract translation: 本发明提供一种将空间和时间中的像素数据流（120）转换成位平面数据流的方法和装置。 特别地，本发明根据预定的输出fromat转换像素数据（120）流。 本发明的装置以“实时”的方式接收像素数据（123），并动态地执行预定义的排列，以完成预先设定的掩蔽操作，或者，像素数据在存储介质（126）中被选择， 并且本发明的装置检索像素数据并执行预定义的排列以完成预定义的转置操作。这里公开的方法和装置对于以流通方式处理数字数据的高速流是特别有用的，并且 适用于在硬件视频流水线中的实现。与用于将像素数据转换为位平面数据的当前可用的类似技术相比，本发明的控制信号扇出和门数减少。

公开(公告)号：WO2005010566A3

公开(公告)日：2007-01-18

申请号：PCT/US2004023139

申请日：2004-07-19

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV R ,  HUIBERS ANDREW G

Inventor： PATEL SATYADEV R ,  HUIBERS ANDREW G

IPC: G02B26/00 ,  G02B20060101 ,  G02B26/08 ,  G02F1/29 ,  H01L20060101 ,  H01L21/00

CPC classification number: G02B26/0841 ,  B82Y30/00

Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Abstract translation: 公开了一种空间光调制器，以及用于制造这种调制器的方法，该调制器包括微镜器件阵列。 根据所使用的光源确定中心到中心距离和相邻微镜器件之间的间隙，以优化光学效率和性能质量。 微反射镜装置包括形成在基底上的铰链支撑件和由铰链支撑件保持的铰链。 镜板通过触点连接到铰链，并且根据镜板的期望的最大旋转角度，相邻微镜之间的最佳间隙和间距来确定镜板和铰链之间的距离。 在制造这种空间光调制器的方法中，将一个牺牲层沉积在衬底上，随后形成镜板，并且另一牺牲层沉积在镜板上，随后形成铰链支架。 两个牺牲层通过具有自发气相化学蚀刻剂的相邻反射镜装置之间的小间隙去除。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：WO2005086877A3

公开(公告)日：2006-08-31

申请号：PCT/US2005007835

申请日：2005-03-10

Applicant: REFLECTIVITY INC ,  HUIBERS ANDREW

Inventor： HUIBERS ANDREW

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  H04N9/312 ,  H04N9/3182

Abstract: A method and apparatus are disclosed for increasing contrast in micromirror-based image display devices. As a result the displayed image is a more faithful reproduction of the original and is more pleasing to human perception than is possible with a low contrast display. The method and apparatus comprise a micromirror (110) design and a modulation scheme for driving micromirrors with a combination of analog and digital techniques to achieve partial and full micromirror deflection. The analog techniques permit the mirrors (110) to be deflected to positions intermediate between the resting position and the position of maximum deflection. These intermediate deflections appear as intermediate light levels in an image. Compared to digital modulation, the analog techniques provide an increase in the number of light levels that can be displayed by a system that is limited by its incoming data rate and maximum micromirror speed.

Abstract translation: 公开了一种用于增加基于微镜的图像显示装置中的对比度的方法和装置。 因此，显示的图像是对原始图像的更忠实的再现，并且比对比度低的显示可能更令人喜欢人的感知。 该方法和装置包括微镜（110）设计和用于通过模拟和数字技术的组合驱动微反射镜以实现部分和全部微镜偏转的调制方案。 模拟技术允许反射镜（110）偏转到静止位置和最大偏转位置之间的位置。 这些中间偏转在图像中显示为中间光级。 与数字调制技术相比，模拟技术可以增加受到其数据速率和最大微镜速度限制的系统可显示的光级数。

公开(公告)号：WO2005010571A3

公开(公告)日：2005-11-17

申请号：PCT/US2004024039

申请日：2004-07-26

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV R ,  HUIBERS ANDREW G

Inventor： PATEL SATYADEV R ,  HUIBERS ANDREW G

IPC: G02B26/08 ,  H04N5/74 ,  H01L31/0232 ,  G02B26/00 ,  H01L21/00

CPC classification number: B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support (218) formed on a substrate (210) and a hinge (22) that is held by the hinge support (218). A mirror plate (212) is connected to the hinge (222) via a contact (224), and the distance between the mirror plate (212) and the hinge (222) is determined according to desired maximum rotation angle of the mirror plate (212), the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate (210) followed by forming the mirror plates (212), and another sacrificial layer is deposited on the mirror plates (212) followed by forming the hinge supports (218). The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Abstract translation: 公开了一种空间光调制器，以及用于制造这种调制器的方法，该调制器包括微镜器件阵列。 根据所使用的光源确定中心到中心距离和相邻微镜器件之间的间隙，以优化光学效率和性能质量。 微镜装置包括形成在基底（210）上的铰链支撑（218）和由铰链支撑（218）保持的铰链（22）。 镜板（212）经由触点（224）连接到铰链（222），并且根据镜板的期望的最大旋转角度来确定镜板（212）和铰链（222）之间的距离 212），相邻微镜之间的最佳间隙和间距。 在制造这种空间光调制器的方法中，将一个牺牲层沉积在衬底（210）上，随后形成镜板（212），并且另一牺牲层沉积在镜板（212）上，随后形成铰链支架 （218）。 两个牺牲层通过具有自发气相化学蚀刻剂的相邻反射镜装置之间的小间隙去除。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：WO2005077037A2

公开(公告)日：2005-08-25

申请号：PCT/US2005/004009

申请日：2005-02-09

Applicant: REFLECTIVITY, INC. ,  CUTLER, Gregory ,  HUIBERS, Andrew

Inventor： CUTLER, Gregory ,  HUIBERS, Andrew

IPC: F21V1/00 ,  G02B6/00 ,  G02B6/42

CPC classification number: G02B6/4298 ,  G02B6/0001 ,  H04N9/315

Abstract: The present invention provides an illumination system having a light source for emitting light and a reflector having a reflective surface for collecting and reflecting the light from the light source.

Abstract translation: 本发明提供了一种具有用于发光的光源的照明系统和具有用于收集和反射来自光源的光的反射表面的反射器。

公开(公告)号：WO2004087563A3

公开(公告)日：2005-06-30

申请号：PCT/US2004009231

申请日：2004-03-24

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV R ,  DOAN JONATHAN

Inventor： PATEL SATYADEV R ,  DOAN JONATHAN

IPC: B81B7/00 ,  B81C20060101 ,  B81C1/00 ,  H01L21/00 ,  H01L21/76

CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

Abstract translation: 本文公开了一种用于处理微机电装置的方法。 该方法通过在连续的牺牲层和结构层之间提供选定的阻挡层来防止牺牲层与微机电器件的结构层之间的扩散和相互作用。

公开(公告)号：WO2005049481A2

公开(公告)日：2005-06-02

申请号：PCT/US2004/024206

申请日：2004-07-26

Applicant: REFLECTIVITY, INC. ,  PATEL, Satyadev, R. ,  HUIBERS, Andrew, G.

Inventor： PATEL, Satyadev, R. ,  HUIBERS, Andrew, G.

IPC: B81C

CPC classification number: B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors.In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Abstract translation: 公开了一种空间光调制器，以及用于制造包括微镜器件阵列的调制器的方法。 根据所使用的光源确定中心到中心的距离和相邻微镜器件之间的间隙，从而优化光学效率和性能质量。 微镜装置包括形成在基板上的铰链支撑件和由铰链支撑件保持的铰链。 镜板经由触点连接到铰链，并且镜板和铰链之间的距离根据镜板的期望最大旋转角度，相邻微镜之间的最佳间隙和间距来确定。在制造方法中， 这种空间光调制器，将一个牺牲层沉积在基板上，接着形成镜板，并且在镜板上沉积另一个牺牲层，随后形成铰链支撑件。 两个牺牲层通过相邻反射镜器件之间的小间隙用自发气相化学蚀刻剂去除。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微反射镜阵列上，投影光学器件用于投射从微反射镜阵列选择性反射的光 到目标上，以及一个控制器，用于选择性地启动阵列中的微镜。

公开(公告)号：WO2005022312A2

公开(公告)日：2005-03-10

申请号：PCT/US2004/027120

申请日：2004-08-19

Applicant: REFLECTIVITY, INC. ,  RICHARDS, Peter

Inventor： RICHARDS, Peter

IPC: G06F

CPC classification number: G09G3/346 ,  G09G3/2014 ,  G09G3/2022 ,  G09G2300/08 ,  G09G2310/0235

Abstract: Data processing methods and apparatus used in digital display system transpose pixel-by-pixel data into bitplane-by-bitplane data. The methods and apparatus are especially useful for dynamically transposing high-speed flowing-through pixel data in a “real-time” fashion. In a transpose process, a stream of pixel data is received by a plurality of input lines of the transpose apparatus. The received pixel data are delayed by a set of delay units and then permutated by one or more switches according to a predefined delay scheme and permutation rule. After permutation, the stream of data is delayed so as to finalize the transpose process.

Abstract translation: 数字显示系统中使用的数据处理方法和装置将逐像素数据转换成逐位平面数据。 该方法和装置对于以“实时”方式动态地转置高速流通像素数据特别有用。 在转置处理中，由转置装置的多条输入线接收像素数据流。 接收到的像素数据被延迟一组延迟单元，然后根据预定义的延迟方案和置换规则由一个或多个开关置换。 排列后，数据流被延迟，以便最终确定转置过程。