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公开(公告)号:JPH0927267A
公开(公告)日:1997-01-28
申请号:JP19796795
申请日:1995-07-12
Applicant: CANON KK
Inventor: HAMAMOTO YASUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a surface conduction type electron emitting element having a stable electron emitting characteristic and high electron emitting efficiency. SOLUTION: In this surface conduction type electron emitting element provided with a conductive film 3 having an electron emitting part 2 between electrodes 4, 5, a high-resistance area having a resistance value 0.2 to 5 times that of the electron emitting part 2 in case of electron emission is formed in part of the conductive film 3. Therefore, attraction of the emitted electrons into the high-potential side conductive film and the electrodes can be suppressed.
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公开(公告)号:JPH08329830A
公开(公告)日:1996-12-13
申请号:JP15408695
申请日:1995-05-30
Applicant: CANON KK
Inventor: HAMAMOTO YASUHIRO , SUZUKI HIDETOSHI , NOMURA ICHIRO , NAKAMURA NAOHITO , TAKEDA TOSHIHIKO , SAKANO YOSHIKAZU , IWASAKI TATSUYA
Abstract: PURPOSE: To enhance the electron emitting efficiency by furnishing an electroconductive film having an electron emission part on a light emitting body which emits light in the blue or ultraviolet region, and thereby performing light emission and electron emission with a low power consumption. CONSTITUTION: A phosphor layer 6 energized with a low-speed electron beam and emitting light in the blue or ultraviolet region is formed on a base board 1 which is throughly washed with a detergent, pure water, and organic solvent, and an element electrode material is deposited on the layer 6, followed by a photolithographic process so that element electrodes 4, 5 are formed. An organic metal solution containing as chief constituent the metal constituting a conductive film 3 is applied to the element electrodes 4, 5, dried, heated as a baking process, and subjected to a lift-off and etching process, and thus the conductive film 3 with patterning is produced. A current is fed to this film 3 so that the film 3 is locally destroyed, deformed, or denatured, and thus an electron emission part 2 is accomplished.
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103.
公开(公告)号:JPH08102250A
公开(公告)日:1996-04-16
申请号:JP25907494
申请日:1994-09-29
Applicant: CANON KK
Inventor: YAMAMOTO KEISUKE , YAMANOBE MASATO , HAMAMOTO YASUHIRO , TSUKAMOTO TAKEO
Abstract: PURPOSE: To provide a manufacturing method of a surface conduction-type electron emission element as an electron beam source with which the size of an image forming apparatus can be made wide and images with high quality can be provided. CONSTITUTION: Regarding a manufacturing method of a surface conduction-type electron emission element in which an electron emission part 2 is formed in a conductive thin film 3 bridging element electrodes 4, 5 on a substrate 1; the element electrodes 4, 5 are so formed on the substrate 1 as to make the height of the step part of each element electrode be different. After that the manufacturing process involves a process wherein an organometal solution containing component elements for the conductive thin film 3 is sprayed to the substrate 1 through the nozzle while potential being kept different between the substrate 1 and a nozzle. Consequently, even in the case the distance L between element electrodes is so made wide as to match with the level of an exposure technique for a large surface area, electron emission elements with high reproducibility of the shape and the position of the electron emission part and uniform electron emitting properties can be manufactured.
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104.
公开(公告)号:JPH08102247A
公开(公告)日:1996-04-16
申请号:JP18545195
申请日:1995-07-21
Applicant: CANON KK
Inventor: TSUKAMOTO TAKEO , IWASAKI TATSUYA , YAMAMOTO KEISUKE , HAMAMOTO YASUHIRO , YAMANOBE MASATO
Abstract: PURPOSE: To provide a surface conduction-type electron emission element having a stable electron emitting property and improved electron emission efficiency by forming a coating with a specified high melting point material in a gap between a conductive film. CONSTITUTION: An electron emission element has a conductive film 4 having a gap 5 and formed between electrodes 2, 3 and a film 6 made of mainly a material with higher melting point than the material for the conductive film 4 and formed in the gap 5. The film 6 is made of mainly a material which has a higher melting point than the material for the conductive film 4 and whose vapor pressure is l.3×10 Pa. Alloys containing elements selected from, for example, Mo, Hf, W, and Ni or their oxides are preferable as the high melting point material. It is also preferable that the film 6 consists of fine particles with 30nm or bigger average particle diameter.
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公开(公告)号:JPH0869748A
公开(公告)日:1996-03-12
申请号:JP22611494
申请日:1994-08-29
Applicant: CANON KK
Inventor: TSUKAMOTO TAKEO , YAMAMOTO KEISUKE , HAMAMOTO YASUHIRO , YAMANOBE MASATO
Abstract: PURPOSE: To perform a foaming process quickly, uniformly, and with less heat emission by forming an electroconductive thin film which puts element electrodes in communication with each other, and forming an electron emission part by electric discharge of an electric charge accumulator in the electroconductive thin film produced between the element electrodes. CONSTITUTION: A changeover switch 404 is closed so that one 5 of a pair of element electrodes 4, 5 is connected with a common terminal. At this time, a changeover switch 403 is turned shut to the electric charge accumulator 401 side, and a power supply 402 is connected with the accumulator 401 so that electric charges are accumulated to make charging. Then the switch 403 is turned so that the electrode 4 and accumulator 401 are connected together. The energy of the accumulated electric charges in the accumulator 401 is consumed in the form of Joule's heat in an electroconductive thin film 3 consisting of a PdO film, and an electron emission part 2 is formed. According to these procedures, the foaming process can be ended quickly through a single cycle of operations.
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公开(公告)号:JP2000251728A
公开(公告)日:2000-09-14
申请号:JP4920399
申请日:1999-02-25
Applicant: CANON KK
Inventor: GOFUKU IHACHIROU , HASEGAWA MITSUTOSHI , HAMAMOTO YASUHIRO , SHIGEOKA KAZUYA , ARAI YOSHITAKA
IPC: H01J9/39
Abstract: PROBLEM TO BE SOLVED: To reduce deterioration of brightness with the elapse of time by arranging a plurality of non-evaporation getters on at least one substrate of two facing substrates, activating the non-evaporation getters, heating an entire air- tight container, and selectively heating the non-evaporation getters. SOLUTION: An electron source substrate 1 is provided with a plurality of electron emitting elements and with wiring. A rear plate 2, a support frame 3, and a face plate 4 forms an envelope 5. Non-evaporation getter films 9 are arranged on almost the entire surface on the upper wiring for Doxm in an image display region. Continuing exhaust of the envelope 5, an image forming device and a vacuum container are entirely held for 10 hours, for example, at 300 deg.C by a heating device. Subsequently, the entire image forming device is heated, for example, to 200 deg.C, and simultaneously, for example, 0.46 A current is made to flow through the upper wiring, temperature of the wiring is set to be 400 deg.C for 10 minutes, and thereby, the non-evaporation getter films 9 on the wiring are activated.
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公开(公告)号:JP2000251638A
公开(公告)日:2000-09-14
申请号:JP4922099
申请日:1999-02-25
Applicant: CANON KK
Inventor: HAMAMOTO YASUHIRO , TAMURA MIKI , YAMAMOTO KEISUKE
Abstract: PROBLEM TO BE SOLVED: To provide an element having high electron emitting efficiency by setting the elastic scattering probability to an electron having an energy within a specified range of a film which has carbon, which is arranged between a pair of electrodes arranged on a base body surface in opposition thereto with a prescribed clearance and electrically connected to the respective electrodes with a clearance as the boundary. SOLUTION: The energy of the electron is 5 eV or higher and 15 eV or lowever, and the elastic scattering probability is 0.1 or higher. When a voltage is applied between element electrodes 2 and 3, a strong electric field is generated in the vicinity of a crack formed between deposits composed manly of carbon. When the intensity of the elastic field reaches a fixed valued or more, a tunnel current is carried from the vicinity of the crack of the first deposit toward the vicinity of the crack of the second deposit, and the electron which has tunneled partially scattered in the vicinity of the crack of the second deposit. To provide an electron emitting efficiency of a certain fixed value or more, the elastic scattering probability to the electron on the deposit is important. An image forming device of high brightness and high quality with low power consumption can be realized.
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公开(公告)号:JP2000243223A
公开(公告)日:2000-09-08
申请号:JP4186199
申请日:1999-02-19
Applicant: CANON KK
Inventor: HAMAMOTO YASUHIRO , YAMAMOTO KEISUKE , TAMURA MIKI
Abstract: PROBLEM TO BE SOLVED: To provide a highly reliable electron emitting element by suppressing quantity reduction of electrons emitted with elapse of time and instability of emission. SOLUTION: This electron emitting element is driven preliminarily to stabilize a quantity of electrons emitted, before it is normally driven. That is, a the relation between an electric current I and a voltage V in a voltage range to cause electron emission from the electron emitting element is expressed by a function I=f(V), and when f'(V) is defined as the differential coefficient of f(V) at a voltage V, the electron emitting element is normally driven by a voltage V2 which satisfies the inequality f(V1)/[V1.f'(V1)-2f(V1)]>f(V2)/[V2.f'(V2)-2f(V2)], after the electron emitting element is driven in advance by a voltage V1.
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公开(公告)号:JP2000242219A
公开(公告)日:2000-09-08
申请号:JP4553099
申请日:1999-02-23
Applicant: CANON KK
Inventor: HAMAMOTO YASUHIRO , YAMAMOTO KEISUKE , TAMURA MIKI
Abstract: PROBLEM TO BE SOLVED: To reduce dispersion in emission luminance between adjacent pixels by applying a preliminary drive voltage after a stabilizing process being the highest voltage in the voltages applied after the stabilizing process and consisting of virtually the same voltage that a difference of the voltages applied to respective electron emission elements is within a specified value to all adjacent surface conductive type electron emission elements in an electron source. SOLUTION: The preliminary drive voltage Vpre is applied to respective SCE elements 74 constituting the electron source 71 after performed with a forming process, an activation process and the stabilizing process. The upper limit of the preliminary drive voltage Vpre is the voltage of an extent not destroying individual SCE element 74, and is the value variable by elemental constitution and manufacturing method or the like. Further, the lower limit of the preliminary drive voltage Vpre is the highest voltage in the voltages applied after the stabilizing process, and thus, is the value larger than the regular drive voltage Vdrv applied thereafter. Thus, the time when characteristic curve of each of elements is stable, becomes longer.
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公开(公告)号:JP2000200545A
公开(公告)日:2000-07-18
申请号:JP17931799
申请日:1999-06-25
Applicant: CANON KK
Inventor: KAWADE ISAAKI , YAMAMOTO KEISUKE , HAMAMOTO YASUHIRO , YAMANOBE MASATO , MITOME MASANORI
IPC: H01J9/02
Abstract: PROBLEM TO BE SOLVED: To provide the more even and stabilized electron emitting characteristic by applying the pulse-like voltage to a conductive film arranged on a substrate in the atmosphere including the reducing material, and forming the conductive film with an electron emitting part. SOLUTION: A flat surface transmission type electron emitting element is formed of a substrate 1, element electrodes 4, 5, a conductive film 3 and an electron emitting part 2. In a process for manufacturing this element, the board 1 provided with the element electrodes 4, 5 is coated with the organic metal solution so as to form an organic metal film, and thereafter, heating for burning is performed so as to form a conductive film 3 made of the metal oxide. Continuously, when the forming process for feeding the current from the predetermined power source is performed between the element electrodes 4, 5, the conductive film 3 is partially formed with a part, of which structure is changed by breakdown, deformation and deterioration. This part forms the electron emitting part 2. This electrical feeding forming process is performed in the atmosphere including the reducing material.
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