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公开(公告)号：JP2001250472A
公开(公告)日：2001-09-14
申请号：JP2000401332
申请日：2000-12-28
Applicant: CANON KK
Inventor： YAMANOBE MASATO , SUZUKI HIDETOSHI , KASANUKI YUJI , KAWADE ISAAKI , OSADA YOSHIYUKI , TAKEDA TOSHIHIKO , YAMAGUCHI EIJI , SUZUKI TOMOTAKE , TODOKORO YASUYUKI , TOSHIMA HIROAKI , ISONO SEIJI , NAKAMURA NAOHITO , SATO YASUE , MISHINA SHINYA , NOMURA ICHIRO , KANEKO TETSUYA
Abstract: PROBLEM TO BE SOLVED: To provide an electron source and an image forming equipped with a large number of surface-conductive electron emitting elements, with a simple composition capable of selecting an optional element according to the input signal and controlling the electron emission amount and with a new composition capable of easy manufacturing. SOLUTION: The electron source and picture producing device emit electrons according to the input signal. The electron source comprises a substrate, m wirings in the row direction and n wirings in the column direction laminated on the substrate through the insulated layer and a plural number of surface- conductive electron emitting elements with a thin film including the electron emitting part between the paired element electrodes. A plural number of surface- conductive electron emitting elements are laid in a matrix form by connecting the element electrodes, row direction wirings and column direction wirings with each other. The electron source is provided with a selection means to select an element row among a plural number of surface-conductive electron emitting elements and with modulating means to generate a modulating signal according to the input signal and to impress the modulating signal to the element row selected by the selection means.
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公开(公告)号：JP2000164131A
公开(公告)日：2000-06-16
申请号：JP33445798
申请日：1998-11-25
Applicant: CANON KK
Inventor： KAMIO MASARU , SATO YASUE , YAMASHITA MASATAKA , KAWADE ISAAKI
Abstract: PROBLEM TO BE SOLVED: To connect an evacuating tube independently of shape of an end surface of the evacuating tube while preventing the generation of crack in the evacuating tube at the time of connecting the evacuating tube. SOLUTION: In an evacuating method for vacuum vessel having at least a vacuum vessel main body 101 for holding the inside thereof at a pressure lower than the atmospheric pressure and an evacuating tube 103 for evacuating the inside of the vacuum vessel main body, a sealing material 104 is used for connection of the evacuating tube 103 and an evacuating tube connection part 105 connected to an evacuating system, and the sealing material 104 is heated for melting so as to seal for connection.
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公开(公告)号：JP2000048712A
公开(公告)日：2000-02-18
申请号：JP21150598
申请日：1998-07-27
Applicant: CANON KK
Inventor： KAWADE ISAAKI
Abstract: PROBLEM TO BE SOLVED: To quickly activate an electron source, and make electron emission characteristics of an electron emission element after activation uniform by grouping a plurality of surface conductive type electron emission elements contained in one line of an electron source board, and simultaneously activating surface conductive type electron emission elements contained in a plurality of lines, within the range of the maximum current capacity of an activation voltage source. SOLUTION: In the activation treatment of a control part 14, plural lines which are not yet activated or whose activation is not yet finished are selected from a plurality of lines on an electron source board 10, and a voltage pulse for activation is simultaneously applied to selected plural lines. Then element current for every line is measured with an ammeter 13, and surface conductive type electron emission elements contained in plural lines are simultaneously activated within the range where the total value of current is present within the maximum current capacity value of an activation voltage source 11. The time relating to activation treatment is shortened, and time required to activation of the electron source board 10 can be shortened.
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公开(公告)号：JPH08129783A
公开(公告)日：1996-05-21
申请号：JP29401894
申请日：1994-11-01
Applicant: CANON KK
Inventor： KAWAGISHI HIDEYUKI , TAKIMOTO KIYOSHI , KAWADE ISAAKI , KISHI ETSURO , TAKEDA TOSHIHIKO
Abstract: PURPOSE: To eliminate the delay in plural pieces of transmitted information by decreasing the number of electrical connections to the interior of a device or an external input device. CONSTITUTION: Respective units 2 have laminar constitution and light sitting diodes 4 are installed to face downward on an interface device 3 of the uppermost layer and face photovoltaic elements 13 on a lower silicon substrate 9 of a lower layer via windows of a light shielding mask 5 on the surface of a transparent substrate 6. The outputs of the photovoltaic elements 13 are impressed to divided plane electrodes 11 on a silicon substrate 9 with an operational amplifier 17 and are impressed on a recording medium 12 as potential differences from probe electrodes 1 on a cantilever 8 supported on the transparent substrate 6. The information inputted to an interface device 3 is transmitted as the light information from the light emitting diodes 4 to the photovoltaic elements 13 and is recorded on the recording medium 12.
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公开(公告)号：JPH0896700A
公开(公告)日：1996-04-12
申请号：JP25154794
申请日：1994-09-21
Applicant: CANON KK
Inventor： KAWADE ISAAKI , IWASAKI TATSUYA
Abstract: PURPOSE: To uniform the electric characteristics of surface conduction type electron emitting elements so as to facilitate control, and facilitate brightness adjustment and the like by applying a correcting waveform different from the waveform at an element driving time to at least one of the electron emitting elements in advance. CONSTITUTION: The electron emitting characteristics of respective surface conduction type electron emitting elements are measured in a correction process. For instance, paying attention to the electron emitting characteristic of one piece of the surface conduction type electron emitting elements, the correcting voltage of a larger waveform than the waveforms of the applied voltages in respective manufacturing processes and a driving voltage, to be concrete, the correcting waveform with a larger crest value than the maximum crest value of the driving waveform and/or the correcting waveform with a wider pulse width than the maximum pulse width the other surface conduction type electron emitting elements whose electron emitting characteristics deviate from that of the attention-paid surface conduction type electron emitting element. Thereby, the electron emitting characteristics of the respective surface conduction type electron emitting elements become uniform so that correction and the like at the driving time required before can not be required.
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Patent Agency Ranking
公开(公告)号：JPH07182973A
公开(公告)日：1995-07-21
申请号：JP34550593
申请日：1993-12-22
Applicant: CANON KK
Inventor： IWASAKI TATSUYA , KAWADE ISAAKI
Abstract: PURPOSE:To lessen the number of manufacturing processes by setting the temperature of a high temperature plate at lowest the oxidizing temperature of a center metal of an organometal in a patterning process of an organometal thin film. CONSTITUTION:An organometal solution is applied to the whole surface of an insulating substrate 1 on which element electrodes 5, 6 are formed and the substrate is left still to form an organometal thin film 7. Then, a high temperature plate 8 having a patterned shape of an electron emitting part forming thin film 2 is brought into contact with or set near the film 7 and the film 7 is partly heated and fired. At that time, the temperature of the plate 8 is so set as to raise the temperature of the film 7 to at lowest the oxidizing temperature of the center metal and to form a fine particle film consisting of mainly the center metal and its oxide after the treatment. Then, after the organometal in not fired parts is removed by cleansing with an organic solvent, etc., and the film 2 with a desiring pattern is formed, electric communication treatment is carried out between the electrodes 5, 6 to form an electron emitting part 3 with a changed structure at the position where the film 2 is formed. As a result, the number of the manufacturing processes is remarkably lessened.
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公开(公告)号：JPH07153125A
公开(公告)日：1995-06-16
申请号：JP21109894
申请日：1994-09-05
Applicant: CANON KK
Inventor： MATSUDA HIROSHI , KAWADA HARUNORI , SAKAI KUNIHIRO , KAWADE ISAAKI , MORIKAWA YUUKO , YANAGISAWA YOSHIHIRO , EGUCHI TAKESHI
Abstract: PURPOSE:To execute a recording and a reproducing with high density and high reproducibility by detecting a reference point from the change of a tunnelling current and performing the recording or the reproducing with probe electrodes while making a detected reference point to be the reference of positions. CONSTITUTION:Two sticks of probe electrodes are designed so as to be capable of a fine control in (X, Y) directions in a plane while being linked with each other and however can be finely controlled in a Z direction independently. Moreover, a recording medium 1 is placed on an X, Y stage 118 and is made movable to arbitrary positions (an X, Y rough moving mechanism). Further, X, Y directions of the rough moving mechanism can match with X, Y directions of a fine moving mechanism in the range of an error owing to an accuracy difference between respective moving mechanisms. In this case, the power consumption of this device is small because energy required for the reproducing is small.
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公开(公告)号：JPH06300558A
公开(公告)日：1994-10-28
申请号：JP852494
申请日：1994-01-28
Applicant: CANON KK
Inventor： TAKIMOTO KIYOSHI , KAWADE ISAAKI , KISHI ETSURO , YANO KYOJI
IPC: G01B21/30 , G01B7/34 , G01Q20/04 , G01Q60/10 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B19/04 , H01J37/28
Abstract: PURPOSE:To obtain an accurate surface image at all times by applying AC voltage across a specimen and a probe, and detecting current flowing across the specimen and the probe at the preset case point of the AC voltage. CONSTITUTION:A probe 11 can be finely moved in X-axis, Y-axis and Z-axis directions with a Z-axis direction inching device 32 and an X- and Y-axis direction inching device 35. Also, bias voltage is applied across a probe 11 and a specimen 12 through a voltage application circuit 13, and current flowing across the probe 11 and the specimen 12 is detected with a current detecting circuit 14. Furthermore, a distance between the forward end of the probe 11 and the surface of the probe 12 is feedback controlled with the device 32, so as to keep the current constant. At this feedback control, the probe 11 is driven along the surface of the specimen 12 with the device 35, according to an output signal from an X and Y-axis direction control circuit 23. Thereafter, an image formation device 27 is made to perform an image formation process, using a control signal from a Z-axis direction drive circuit 31, synchronously with the motion of the probe 11 in X- and Y-axis directions, thereby obtaining the shape of specimen surface.
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公开(公告)号：JPH06258014A
公开(公告)日：1994-09-16
申请号：JP4550493
申请日：1993-03-05
Applicant: CANON KK
Inventor： TAKIMOTO KIYOSHI , KAWADE ISAAKI , KISHI ETSURO , YANO KYOJI
Abstract: PURPOSE:To obtain a plurality of types of observed image signal substantially concurrently by detecting current flowing between a probe and the surface of a sample when different bias voltages are applied to a plurality of different phase points. CONSTITUTION:A voltage applying circuit 14 applies an AC bias voltage between a probe 11 and the surface of a sample 12, detects 13 a current flowing therebetween, and sustains the current at a constant level by subjecting the distance therebetween to feedback control. During that interval, an imaging unit 26 images the surface profile of the sample 12 based on an output from a Z-axis drive circuit 31 in synchronism with the motion of the probe 11 in XY direction. In this regard, a timing circuit 15 outputs a timing signal at a designated phase point in synchronism with an output from the circuit 14. Signals corresponding to the surface profile of the sample 12 at respective bias voltages are sampled 2 by the circuit 31. The unit 26 then obtains different types of scanning tunnel microscopic image under different bias voltages substantially concurrently.
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10.发明专利
公开(公告)号：JPH06195774A
公开(公告)日：1994-07-15
申请号：JP34197792
申请日：1992-12-22
Applicant: CANON KK
Inventor： KAWADE ISAAKI , OGUCHI TAKAHIRO , SAKAI KUNIHIRO , YAMANO AKIHIKO , SHITO SHUNICHI , HATANAKA KATSUNORI
Abstract: PURPOSE:To obtain a small-sized control circuit of multi-probes having high accuracy by adjusting an output from a signal detector in response to the selected probe and controlling the operation of a selector circuit in response to the quantity of the output. CONSTITUTION:A plurality of probes 1011-101n constituting multi-probes 101 are connected to a selector circuit 102, and arranged oppositely to a medium 100, and bias voltage is applied. The circuit 102 selects either one such as a number (n) probe of each probe 1011-101n according to timing from a control CPU 114. A tunnel current signal In detected by the selected number (n) probe is converted, into a voltage valve and converted into a digital value In by an A/D converter 103. The digital value is changed into a linearized signal by a log amplifier 104, and compared with the set value of a servo circuit by a comparator 105, and an error signal is output. The CPU 114 obtains the quantity of adjustment from the error signal, and controls the circuit 102. Accordingly, the effect of the dispersion of the characteristics of the probes is prevented, thus stably controlling a position.
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