-
公开(公告)号：JPS60193533A
公开(公告)日：1985-10-02
申请号：JP4810484
申请日：1984-03-15
Applicant: Canon Inc
Inventor： MIYAZAKI TOSHIHIKO , HIRAI YUTAKA
Abstract: PURPOSE:To enable easy continuous accumulation of not only the same kind but also different kind of monomolecular films by providing a partition wall for segmenting the liquid surface on which molecules for film forming is spread to a plurality and a means for generating liquid flow. CONSTITUTION:A partition wall 8 for segmenting the liquid surface on which molecules for film forming are spread to a plurality and a means 7 for generating liquid flow are provided to a water tank 3 so that water is admitted by the device 7 into the partitioned blocks from near the center toward the outside periphery. For example, monomolecular films of different materials are preliminarily spread on the water surface in each block. The monomolecular films are accumulated on a substrate by using a vertical dipping method in certain block and thereafter the similar operation is repeated in another block, by which the hetero-accumulated films (the constituting molecules of the monomolecular films vary in the accumulating direction) are easily formed. As a result, the realization of the continuous accumulation and further the easy accumulation of the different kind of the monomolecular films are made possible.
Abstract translation: 目的：通过提供用于将其上形成分子的液面分割成多个的分隔壁和用于产生液体流动的装置，能够容易地连续积累不同种类的单分子膜。 构成：将用于成膜的分子分散到多个的液面的分隔壁8和用于产生液体流的装置7设置在水箱3上，使得装置7进入分隔块 从中心附近向外围。 例如，将各种不同材料的单分子膜预先铺展在各块的水面上。 通过使用一定程度的垂直浸渍方法将单分子膜堆积在基板上，其后在另一块中重复进行类似的操作，通过该块，异质积累膜（单分子膜的构成分子在累积方向上变化）为 容易形成。 结果，可以实现不同种类的单分子膜的连续积累和进一步的容易积累。
-
公开(公告)号：JPS60193532A
公开(公告)日：1985-10-02
申请号：JP4810384
申请日：1984-03-15
Applicant: Canon Inc
Inventor： MIYAZAKI TOSHIHIKO , HIRAI YUTAKA
IPC: C23C26/00 , B01J19/00 , B05C3/02 , B05D1/20 , G02F1/1337 , H01L21/368
Abstract: PURPOSE:To permit easy continuous accumulation of monomolecular films and to improve the attaining rate of accumulation by providing a means for generating liquid flow and a means for decelerating the liquid flow in a liquid tank in which molecules for film forming are spread. CONSTITUTION:A means 7 for generating liquid flow and a means for decelerating said liquid flow are provided in a liquid tank 3 in which molecules for film forming are spread. For example, the depth of a water tank in a region 11 including a dropping region 9 where the surface pressure of monomolecular films 2 are formed is made as shallow as 1cm and the depth of the water tank in an accumulating region 10 is made as deep as 10cm. As a result, even if the flow rate in the region 11 for forming the surface pressure is made to 20cm/sec, the flow rate in the region 10 is about 1/10 said flow rate. The yield is increased to 50-100% when the monomolecular films are accumulated on a substrate. The continuous accumulation of the monomolecular films is thus made easy and the attaining rate of the accumulation is improved as well.
Abstract translation: 目的：为了容易地连续积聚单分子膜，并且通过提供用于产生液体流动的装置来提高积累的获得率，以及用于使液体槽中的液体流动减速的装置，其中用于成膜的分子被扩散。 构成：用于产生液体流动的装置7和用于使所述液体流减速的装置设置在其中用于成膜分子的扩散槽3中。 例如，将形成有单分子膜2的表面压力的滴下区域9的区域11中的水箱的深度设为浅1cm，将蓄积区域10内的水箱的深度设为深度 为10厘米。 结果，即使形成表面压力的区域11中的流量为20cm / sec，区域10中的流量为约1/10的流量。 当单分子膜堆积在基材上时，产率提高到50-100％。 因此，单分子膜的连续积累变得容易，并且积聚的获得率也提高。
-
公开(公告)号：JPS60193327A
公开(公告)日：1985-10-01
申请号：JP4811084
申请日：1984-03-15
Applicant: Canon Inc
Inventor： MIYAZAKI TOSHIHIKO , HIRAI YUTAKA
IPC: H01L49/02 , B01J19/00 , B05D1/20 , C23C26/00 , H01L21/312 , H01L21/368
Abstract: PURPOSE:To provide easily a monomolecular film cumulated continuously, by providing with liquid-flow generating means in the liquid bath for expanding film forming molecules, and by controlling surface pressure of the monomolecular film so as to attain a desired surface density. CONSTITUTION:On forming a thin film bearing optical functions which a logical device, a memory device and a photoelectric converting device, etc. have, the thin film consisting of organic molecules is formed with a monomolecular cumulation method. Water from a water flow generating means 7 is flowed into a water bath 3, the water surface is dammed by a barrier 8 being placed on the water bath 3 so as to overflow the excess water, and organic solution is dripped onto the water surface being dammed to form a film. That is to say, the solution of 0.1ml in which stearic acid is being melted in a solvent of chloroform at a rate of 1X10 M/l is dripped onto the dripping area 9 in the upstream surface pressure forming area 11 at a rate of 20cm/sec to produce a cumulated film on the cumulation area 10 in the monomolecular film 2 forming area near the barrier 8. Thereafter, the film 2 is transferred onto a substrate and then the cumulating operation is repeated.
Abstract translation: 目的：通过在用于扩展成膜分子的液槽中提供液体流动产生装置，并且通过控制单分子膜的表面压力以获得期望的表面密度，容易地连续累积单分子膜。 构成：在形成具有逻辑器件，存储器件和光电转换器件等的薄膜承载光学功能的情况下，由单分子累积方法形成由有机分子组成的薄膜。 来自水流产生装置7的水流入水浴3中，水面被放置在水浴3上的屏障8阻挡，以溢出多余的水，有机溶液滴在水面上 阻止了形成一部电影。 也就是说，将0.1ml其中硬脂酸在氯仿溶剂中以1×10 -3 M / l的速率熔化的溶液滴在上游表面压力形成区域11中的滴落区域9上， 速度为20cm / sec，以在屏障8附近的单分子膜2形成区域的累积区域10上产生累积膜。之后，将膜2转印到基板上，然后重复累积操作。
-
公开(公告)号：JPS60192328A
公开(公告)日：1985-09-30
申请号：JP4718184
申请日：1984-03-14
Applicant: Canon Inc
Inventor： TOMITA YOSHINORI , MATSUDA HIROSHI , NISHIMURA YUKIO , HIRAI YUTAKA
IPC: H01L49/02 , B01J19/00 , B05D1/20 , C23C26/00 , H01L21/312 , H01L21/368
Abstract: PURPOSE:To make small the rotation of molecular and improve accummulation rate at the time of transferring single molecular film from the liquid surface by providing a level difference to the liquid surface where molecular is developed and forming a single molecular film or single molecular accummulation film consisting of such molecular on a carrier. CONSTITUTION:In the case of using a partitioning plate 5 as a means for giving level difference to the liquid surfaces where single molecular film is developed, after a cylinder 2 is set, the liquids 3 and 4 are supplied from the poring hole to the cylinder 1 and the portions A and B of container 1 partitioned by the partitioning plate 5. For example, the liquid surface of liquid 3 in the part B of container 1 is set lower than the liquid surface of liquid 4 in the part A and the liquids 3, 4 are supplied, the single molecular film is developed on the respective liquid surfaces of liquids 3, 4 and the cylinder 2 is rotated counterclockwise. Thereby, a single molecular accummulated film consisting of single molecular film in the predetermined accummulation degree having the improved accummulation coefficient can be formed on the cylinder 2.
Abstract translation: 目的：为了使分子的旋转小，并通过向分子发展的液体表面提供水平差，形成单分子膜或单分子累积膜，从液体表面转移单分子膜时提高累积速率， 的这种分子在载体上。 构成：在使用分隔板5作为对显影单分子膜的液面给出水平差的手段的情况下，在气瓶2被设定之后，液体3和4从孔洞供给到气缸 容器1的部分A和B由分隔板5分隔开。例如，容器1的部分B中的液体3的液面被设定为低于部分A中液体4的液体表面，液体 3，4，单分子膜在液体3,4的各个液面上显影，并且气缸2逆时针旋转。 由此，可以在气缸2上形成具有提高累积系数的预定累积度的单分子膜的单分子累积膜。
-
公开(公告)号：JPS59183861A
公开(公告)日：1984-10-19
申请号：JP4024784
申请日：1984-03-02
Applicant: Commissariat Energie Atomique
Inventor： ANDORE BAROO , JIYAN RURUU
-
Patent Agency Ranking
公开(公告)号：EP1647334B1
公开(公告)日：2010-09-15
申请号：EP05090326.9
申请日：2003-05-12
Applicant: Nanometrix Inc.
Inventor： Picard, Gilles , Schneider, Juan
IPC: B05D1/20
CPC classification number: G11B5/842 , B01D69/122 , B05D1/00 , B05D1/20 , B05D1/204 , B05D1/206 , B05D2252/02 , B82Y30/00 , B82Y40/00 , H01L21/28185 , H01L23/49883 , H01L29/51 , H01L29/513 , H01L2924/0002 , H01L2924/00
-
公开(公告)号：EP0881000B1
公开(公告)日：2002-11-06
申请号：EP98109793.4
申请日：1998-05-28
Applicant: CANON KABUSHIKI KAISHA
Inventor： Albrecht, Otto , Matsuda, Hiroshi
IPC: B05D1/20
-
公开(公告)号：EP0366647B1
公开(公告)日：1993-03-17
申请号：EP90100016.6
申请日：1987-12-01
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Wakayama, Shigeru , Miura, Akira
-
109.发明授权
公开(公告)号：EP0252923B1
公开(公告)日：1992-08-19
申请号：EP86906107.7
申请日：1986-09-18
Applicant: MOLECULAR ELECTRONICS CORPORATION
Inventor： ALBRECHT, Otto , BARTUR, Meir , RODOV, Vladimir
Abstract: Method and apparatus for continuously forming and depositing a layer of monomolecular amphiphilic molecules on a substrate. The apparatus of the present invention includes static mechanical means comprising a pump which is supported outside the lower portion of the tank (310) and connected by conduits to compartment (310a) which is designed as a continuous chute around compartment (310b). It is in compartment (310b) that the compressed monomolecular layer films are deposited onto a substrate. The water flows in the direction indicated by arrows. The pump pulls the transport liquid through a conduit and out of compartment (310b), and pushes said liquid through other conduits and into compartment (310a) which is separated from compartment (310b) by continuous chute (310d). The compartment (310c) receives the monomolecular layer solution.
-
公开(公告)号：EP0305544B1
公开(公告)日：1991-07-03
申请号：EP88902556.5
申请日：1988-03-16
Applicant: SHINGIJYUTSU KAIHATSU JIGYOUDAN
Inventor： MIYATA, Seizou , KUMEHARA, Hideo
IPC: B05D1/20
Abstract: A movable barrier and an auxiliary movable barrier are disposed inside a trough and they can be driven freely with their interrelationship kept constant. The amount of a moving monomolecular film is the same for both of them to prevent disturbance of the flow of the monomolecular film and deposition on a substrate is carried out at a uniform molecular density. The width of the substrate is the same as the length of the movable barrier or the width of the auxiliary movable barrier.
-
-
-
-
-
-
-
-
-
Search Results
155
records
(took 0.019 seconds)
