MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
    101.
    发明申请
    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF 有权
    微电子机械装置及其制造方法

    公开(公告)号:US20130307030A1

    公开(公告)日:2013-11-21

    申请号:US13908688

    申请日:2013-06-03

    CPC classification number: H01L29/84 B81B2201/034 B81C1/00246 B81C2203/0742

    Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 在相同的步骤中,在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中,包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说,结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外,通过使用用作晶体管的栅电极,源电极和漏电极的导电层作为牺牲层来制造微结构。

    METHOD AND APPARATUS FOR HARVESTING ENERGY BASED ON THE RANDOM OCCURRENCE OF COMMON DIRECTION MOLECULES
    102.
    发明申请
    METHOD AND APPARATUS FOR HARVESTING ENERGY BASED ON THE RANDOM OCCURRENCE OF COMMON DIRECTION MOLECULES 有权
    基于通用方向分析的随机事件收集能量的方法和装置

    公开(公告)号:US20130134718A1

    公开(公告)日:2013-05-30

    申请号:US13308103

    申请日:2011-11-30

    Applicant: DAVID BRITZ

    Inventor: DAVID BRITZ

    Abstract: An energy collecting device is disclosed. For example, the energy collecting device comprises a plate layer having a plurality of perforations for receiving a plurality of molecules, a molecular energy collecting layer, coupled to the plate layer, having an impacting structure for receiving the plurality of molecules, and a substrate layer, coupled to the molecular energy collecting layer, having a conductor wire coil for collecting electrons that are generated when the plurality of molecules impacts the impacting structure.

    Abstract translation: 公开了一种能量收集装置。 例如,能量收集装置包括具有用于容纳多个分子的多个穿孔的板层,耦合到板层的分子能收集层,具有用于接收多个分子的冲击结构,以及基底层 耦合到分子能量收集层,具有用于收集当多个分子撞击冲击结构时产生的电子的导线线圈。

    MEMS Device and Methods for Manufacturing and Using Same
    105.
    发明申请
    MEMS Device and Methods for Manufacturing and Using Same 有权
    MEMS器件及其制造和使用方法

    公开(公告)号:US20120206785A1

    公开(公告)日:2012-08-16

    申请号:US13365087

    申请日:2012-02-02

    Abstract: A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.

    Abstract translation: 一种微机电系统(MEMS)装置,包括:转子,包括形成在至少两层绝缘体上硅(SOI)衬底中的第一多个转子齿和第二多个转子齿,其中每个转子齿 属于第一多个转子齿的第一多个转子齿形成在第一层中,并且第二多个转子齿的每个转子齿形成在第二层中; 以及定子,其包括形成在至少两层SOI衬底中的第一多个定子齿和第二多个定子齿,其中属于所述第一多个定子齿的每个定子齿形成在第一层中,并且每个定子 第二多个定子齿的齿形成在第二层中。

    Micro rotary machine and methods for using same
    106.
    发明授权
    Micro rotary machine and methods for using same 有权
    微型旋转机及其使用方法

    公开(公告)号:US08159107B2

    公开(公告)日:2012-04-17

    申请号:US11757331

    申请日:2007-06-01

    Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

    Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴,并且可由微型致动器旋转。 微型工具联接到微型轴,并且可操作以响应于微型轴的运动而执行工作。

    Micro electro mechanical device and manufacturing method thereof
    107.
    发明授权
    Micro electro mechanical device and manufacturing method thereof 有权
    微机电装置及其制造方法

    公开(公告)号:US08030651B2

    公开(公告)日:2011-10-04

    申请号:US12647704

    申请日:2009-12-28

    CPC classification number: H01L29/84 B81B2201/034 B81C1/00246 B81C2203/0742

    Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 在相同的步骤中,在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中,包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说,结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外,通过使用用作晶体管的栅电极,源电极和漏电极的导电层作为牺牲层来制造微结构。

    Shaped microcomponents via reactive conversion of biologically-derived microtemplates
    108.
    发明授权
    Shaped microcomponents via reactive conversion of biologically-derived microtemplates 失效
    通过生物衍生的微型模板的反应转化形成微型组件

    公开(公告)号:US07204971B2

    公开(公告)日:2007-04-17

    申请号:US10160292

    申请日:2002-05-30

    Abstract: The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).

    Abstract translation: 本发明集中在用于大规模生产三维微型组件的革命性的低成本(高度可扩展)方法:天然衍生的,生物催化衍生的和/或基因定制的三维微型模板的生物繁殖 (例如,硅藻的截头圆锥体,放射体的微骨架,软体动物的壳)具有所需的尺寸特征,随后将这种微模板反应转化成具有与起始微模板不同的所需组成的微组件,并具有与起始微模板类似的尺寸特征 微模板。 由于这些微型组件的形状可以通过微型模板的形状的遗传工程来定制,所以这种微复合材料被认为是基因工程材料(GEM)。

    Shaped microcomponents via reactive conversion of biologically-derived microtemplates
    110.
    发明申请
    Shaped microcomponents via reactive conversion of biologically-derived microtemplates 失效
    通过生物衍生的微型模板的反应转化形成微型组件

    公开(公告)号:US20030039693A1

    公开(公告)日:2003-02-27

    申请号:US10160292

    申请日:2002-05-30

    Abstract: The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).

    Abstract translation: 本发明集中在用于大规模生产三维微型组件的革命性的低成本(高度可扩展)方法:天然衍生的,生物催化衍生的和/或基因定制的三维微型模板的生物繁殖 (例如,硅藻的截头圆锥体,放射体的微骨架,软体动物的壳)具有所需的尺寸特征,随后将这种微模板反应转化成具有与起始微模板不同的所需组成的微组件,并具有与起始微模板类似的尺寸特征 微模板。 因为这些微型组件的形状可以通过微模板的形状的基因工程来定制,所以这种微复合材料被认为是基因工程材料(GEM)。

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