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    微小型结构及其制造方法
    1.
    发明授权
    微小型结构及其制造方法 失效

    公开(公告)号：CN1077300C

    公开(公告)日：2002-01-02

    申请号：CN93116450.8

    申请日：1993-08-21

    Applicant: 国际商业机器公司

    Inventor： 范龙身 ,  汉斯·赫尔姆特·扎普

    IPC: G03F7/00 ,  H01L21/02

    CPC classification number: G03F7/11 ,  B81B2201/035 ,  B81B2201/037 ,  B81C99/0085 ,  G03F7/00 ,  H02N1/008

    Abstract: 一种制造集成化独立式微小型结构的方法，选定一种衬底材料；在衬底材料表面上演积一层保护材料；将保护层刻成图案以规定一种形状；在保护层上淀积一层光敏抗蚀材料；用反差增强光刻法，将光敏抗蚀层刻成图案，以形成一个光敏抗蚀型模；在光敏抗蚀型模上，电镀上一层金属层材料，所述光敏抗蚀层被制成图案，以提供具有至少9∶1的纵横比的独立金属结构；以及应用蚀刻剂来溶去光敏抗蚀型模和保护层，以形成一个独立式的金属结构。

    METHODS AND SYSTEMS FOR MICRO MACHINES
    5.
    发明申请
    METHODS AND SYSTEMS FOR MICRO MACHINES 审中-公开
    微机械的方法与系统

    公开(公告)号：WO2007143623A3

    公开(公告)日：2008-02-21

    申请号：PCT/US2007070359

    申请日：2007-06-04

    Applicant: STALFORD HAROLD L

    Inventor： STALFORD HAROLD L

    IPC: B81B7/00

    CPC classification number: B81B3/0051 ,  B81B7/02 ,  B81B2201/035 ,  B81B2201/037 ,  F03G7/065 ,  F16C33/20 ,  F16C33/201 ,  F16C33/208 ,  F16C2223/60 ,  F16C2223/70 ,  H02N1/008 ,  H02N11/006

    Abstract: A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft. In accordance with other aspects of the disclosure methods and systems for micro transmissions for micro machines may be provided. Micro machines may include micro structures configured to move into engagement with other micro structures. A micro drive assembly may comprise a substrate, a micro shaft oriented in-plane with the substrate and at least one micro bearing to support rotation of the shaft. For example micro machines may include micro rotary machines and micro transport machines.

    Abstract translation: 微型机器可以在或小于微米域。 微型机器可以包括微型致动器和联接到微型致动器的微型轴。 微型轴可由微型执行器驱动。 工具联接到微轴并且可操作以响应于微轴的至少运动来执行作业。 根据公开的其他方面，可以提供用于微型机器的微型变速器的方法和系统。 微机器可以包括构造成移动成与其他微结构接合的微结构。 微驱动组件可以包括基板，与基板成平面定向的微轴和支撑轴的旋转的至少一个微轴承。 例如，微机器可以包括微型旋转机器和微型运输机器。

    METHODS AND SYSTEMS FOR MICRO MACHINES
    6.
    发明申请
    METHODS AND SYSTEMS FOR MICRO MACHINES 审中-公开
    微型机器的方法和系统

    公开(公告)号：WO2007143623A8

    公开(公告)日：2008-07-17

    申请号：PCT/US2007070359

    申请日：2007-06-04

    Applicant: STALFORD HAROLD L

    Inventor： STALFORD HAROLD L

    IPC: B81B7/00

    CPC classification number: B81B3/0051 ,  B81B7/02 ,  B81B2201/035 ,  B81B2201/037 ,  F03G7/065 ,  F16C33/20 ,  F16C33/201 ,  F16C33/208 ,  F16C2223/60 ,  F16C2223/70 ,  H02N1/008 ,  H02N11/006

    Abstract: A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft. In accordance with other aspects of the disclosure methods and systems for micro transmissions for micro machines may be provided. Micro machines may include micro structures configured to move into engagement with other micro structures. A micro drive assembly may comprise a substrate, a micro shaft oriented in-plane with the substrate and at least one micro bearing to support rotation of the shaft. For example micro machines may include micro rotary machines and micro transport machines.

    Abstract translation: 微型机器可以在微米范围内或小于微米范围。 微型机器可以包括微型致动器和联接到微型致动器的微型轴。 微型轴可操作以由微型致动器驱动。 工具联接到微型轴并且可操作以响应微型轴的至少运动来执行工作。 根据本公开的其它方面，可以提供用于微型机器的微型传输的方法和系统。 微型机器可以包括被配置成与其他微结构接合的微结构。 微型驱动组件可以包括基板，与基板在平面内定向的微型轴以及支撑轴的旋转的至少一个微型轴承。 例如，微型机器可以包括微型旋转机器和微型运输机器。

    MICRO-DEPLOYABLE DEVICES AND SYSTEMS
    7.
    发明申请
    MICRO-DEPLOYABLE DEVICES AND SYSTEMS 审中-公开
    微型可展开装置和系统

    公开(公告)号：WO2008121845A2

    公开(公告)日：2008-10-09

    申请号：PCT/US2008058705

    申请日：2008-03-28

    Applicant: UNIV UTAH RES FOUND ,  BOUTTE RONALD W ,  SOLZBACHER FLORIAN ,  HARVEY IAN R ,  HORN JUSTIN A ,  MEACHAM TAYLOR M ,  GASKIN NATHANIEL C ,  BAKER BRIAN W

    Inventor： BOUTTE RONALD W ,  SOLZBACHER FLORIAN ,  HARVEY IAN R ,  HORN JUSTIN A ,  MEACHAM TAYLOR M ,  GASKIN NATHANIEL C ,  BAKER BRIAN W

    IPC: B81B7/02

    CPC classification number: B81B3/0051 ,  B81B2201/037

    Abstract: A microelectromechanical systems (MEMS) device includes a generally planar outer frame defining an inner structural portion; a plurality of first multi-angular elements (MAEs), each having a proximal portion and a distal portion, wherein the proximal portions are operably coupled to the outer frame, and wherein the plurality of first MAEs extend from the outer frame into the inner structural portion; and a plurality of second MAEs, each having a proximal portion and a distal portion, wherein the distal portions of the first and second MAEs are operably coupled to define an aperture. A microcamera includes a microautofocus system configured to focus light, and a microaperture configured to control a light passage. The microautofocus system employs a MEMS device to actuate a shape of a lends. A method of fabricating and operating the MEMS is also provided.

    Abstract translation: 微机电系统（MEMS）装置包括限定内部结构部分的大致平坦的外部框架; 多个第一多角形元件（MAE），每个具有近侧部分和远侧部分，其中所述近侧部分可操作地联接到所述外框架，并且其中所述多个第一MAE从所述外框架延伸到所述内部结构 一部分; 以及多个第二MAE，每个第二MAE具有近端部分和远端部分，其中第一和第二MAE的远端部分可操作地连接以限定孔。 微摄像机包括被配置为聚焦光的微自动聚焦系统和被配置为控制光通道的微孔。 微自动聚焦系统采用MEMS器件来驱动借贷的形状。 还提供了制造和操作MEMS的方法。

    METHODS AND SYSTEMS FOR MICRO BEARINGS
    9.
    发明申请
    METHODS AND SYSTEMS FOR MICRO BEARINGS 有权
    微型轴承的方法和系统

    公开(公告)号：US20080042520A1

    公开(公告)日：2008-02-21

    申请号：US11757344

    申请日：2007-06-01

    Applicant: Harold L. Stalford

    Inventor： Harold L. Stalford

    IPC: H01L41/00

    CPC classification number: B81B3/0059 ,  B81B2201/037 ,  B81B2203/06 ,  Y10T29/49647 ,  Y10T29/49696

    Abstract: A micro drive assembly may comprise a substrate, a micro shall oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro bearing may be in or less than the micrometer domain.

    Abstract translation: 微驱动组件可以包括基板，与基板成平面定向的微轴和至少一个微轴承以支撑微轴的旋转。 微轴和微型轴承可以在微米范围内或更小。

    System and method for post-fabrication reduction of minimum feature size spacing of microcomponents
    10.
    发明授权
    System and method for post-fabrication reduction of minimum feature size spacing of microcomponents 失效
    微元件最小特征尺寸间距后制造的系统和方法

    公开(公告)号：US07240420B1

    公开(公告)日：2007-07-10

    申请号：US09884205

    申请日：2001-06-19

    Applicant: Matthew D. Ellis ,  Eric G. Parker ,  George D. Skidmore

    Inventor： Matthew D. Ellis ,  Eric G. Parker ,  George D. Skidmore

    IPC: B81B5/00

    CPC classification number: B81B3/0054 ,  B81B2201/037 ,  Y10T29/5313

    Abstract: A system and method are disclosed which enable post-fabrication reduction of minimum feature size spacing of microcomponents. A method for producing an assembly of microcomponents is provided, in which at least two microcomponents are fabricated having a separation space therebetween. At least one of the microcomponents includes an extension part that is operable to reduce the separation space. Such an extension part may include an extension member that is movably extendable away from its associated microcomponent to reduce the separation space between its associated microcomponent and another microcomponent. The extension part may be latched at a desired position by a latching mechanism. The extension part may be implemented such that the extension member eliminates the separation space, thereby resulting in such extension member engaging another microcomponent. Such engagement may be achieved without requiring power to be applied to the microcomponents. Certain embodiments are insensitive to etching inaccuracy encountered during fabrication.

    Abstract translation: 公开了一种系统和方法，其使后期制造减少了微型部件的最小特征尺寸间距。 提供了一种用于制造微组件组件的方法，其中制造了至少两个在其间具有分隔空间的微组件。 微组件中的至少一个包括可操作以减小分离空间的延伸部分。 这种延伸部分可以包括可移动地延伸远离其相关联的微型部件的延伸部件，以减小其相关的微型部件和另一微型部件之间的分离空间。 延伸部分可以通过闭锁机构锁定在期望的位置。 延伸部件可以被实现为使得延伸部件消除分离空间，从而导致这种延伸部件与另一个微型部件接合。 可以在不需要将功率施加到微型部件的情况下实现这种接合。 某些实施例对制造期间遇到的蚀刻不精确性不敏感。

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