公开(公告)号：JP2007537436A

公开(公告)日：2007-12-20

申请号：JP2007512332

申请日：2005-05-11

Applicant: レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company

Inventor： アーネスト リー ウィリアム

IPC: G01B9/02 ,  G01B11/00 ,  G01B11/02 ,  G01B11/26 ,  G01J9/02

CPC classification number: G01B9/02019 ,  G01B9/02056 ,  G01B2290/70 ,  G01J2009/0261

Abstract: 偏光ダブルパス干渉計は、偏光ビームスプリッタ（１６）と、基準ビーム（１４）の経路内の基準ミラー（２０）と、測定ビーム（１２）の経路内の可動測定ミラー（２６）と、を含む。 基準および測定ビームは、異なる偏光を有する。 ガラスウエッジつまりプリズム（３２）のような角度ビーム偏向装置は、一つの偏光の光の他の偏光の光の経路内への漏れによって生じるエラービーム（３０）を除去あるいは分離するように作用する。

公开(公告)号：JP2007198896A

公开(公告)日：2007-08-09

申请号：JP2006017561

申请日：2006-01-26

Applicant: Canon Inc ,  キヤノン株式会社

Inventor： SHIODE YOSHIHIRO

IPC: G01M11/02 ,  G01J4/04 ,  G01N21/23 ,  G01N21/45 ,  G03F7/20 ,  H01L21/027

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

Abstract: PROBLEM TO BE SOLVED: To provide a method for measuring a polarization optical property of an optics system under test more simply without using any optical element such as a wave plate, a polarizer or the like, in comparison with conventional methods. SOLUTION: The method which is employed to irradiate the optics system under test with light having a plurality of different polarization states and measures the polarization optical property including a double refraction amount R and a phase advance axis ϕ of the optics system under test comprises: a step of irradiating the optics system under test with light at an azimuth θ, and obtaining a gravity point value P of the light passing through the optics under test; and a step of obtaining the double refraction amount R and the phase advance axis ϕ by using following equation: P=-Rcos(2θ-ϕ) or Rcos(2θ-ϕ). COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：与传统方法相比，提供一种用于更简单地测量被测光学系统的偏振光学性质的方法，而不使用诸如波片，偏振器等的任何光学元件。 解决方案：用于用具有多个不同极化状态的光照射被测光学系统的方法，并测量包括被测光学系统的双重折射量R和相位超前轴的偏振光学性质 包括：通过在方位角θ处的光照射待测光学系统，并获得通过被测光学器件的光的重力点值P的步骤; 以及通过使用以下等式获得双重折射量R和相位超前轴φ的步骤：P = -Rcos（2θ-φ）或Rcos（2θ-φ）。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP3791975B2

公开(公告)日：2006-06-28

申请号：JP22409196

申请日：1996-08-26

Applicant: ジゴー コーポレーションZygo Corporation

Inventor： デ グルート ピーター

IPC: G01B9/02 ,  G01J9/02 ,  G01J4/00

CPC classification number: G01J9/02 ,  G01J2009/0261

公开(公告)号：JP2005338822A

公开(公告)日：2005-12-08

申请号：JP2005144360

申请日：2005-05-17

Applicant: Agilent Technol Inc ,  アジレント・テクノロジーズ・インクAgilent Technologies, Inc.

Inventor： BOCKMAN JOHN J ,  GOLYANSKAYA LUDMILA M ,  WAYNE KENNETH J ,  ZHU MIAO

IPC: G01B9/02 ,  G01J9/02 ,  G02B7/00

CPC classification number: G01B9/02057 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02049 ,  G01B9/02072 ,  G01B2290/70 ,  G01J2009/0261 ,  G02B7/006

Abstract: PROBLEM TO BE SOLVED: To reduce polarization leakage in interferometer systems.
SOLUTION: The interferometer systems (200, 800) includes a plane mirror interferometer (230), a deflecting mirror (212), retardation plate assemblies (216, 816A) with retardation plates which can be fixed after adjustment, and retro-reflectors (214, 814). A light beam is propagated in a path consisting of the retardation plate assemblies and the retro-reflectors. The retardation assembly includes two or more bearings (306), rings (304) mounted on the bearings, the retardation plate (302), and plunger (308) for pressing the rings on the bearings. The retardation plate is fixed with an adhesive after it is determined in the direction of minimizing the polarization leakage of the interferometer systems.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：减少干涉仪系统中的极化泄漏。 干涉仪系统（200,800）包括平面镜干涉仪（230），偏转镜（212），具有可调节后固定的延迟板的相位差板组件（216,816A） 反射器（214,814）。 光束在由相位差板组件和反射器组成的路径中传播。 延迟组件包括两个或更多个轴承（306），安装在轴承上的环（304），延迟板（302）和用于压紧轴承上的环的柱塞（308）。 在将干涉仪系统的极化泄漏最小化的方向确定之后，用粘合剂固定相位差板。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：EP2180301A2

公开(公告)日：2010-04-28

申请号：EP09173968.0

申请日：2009-10-23

Applicant: Canon Kabushiki Kaisha

Inventor： Ishizuka, Ko

IPC: G01J9/02

CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detector (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to measure a wavelength shift using the plurality of interference signals.

Abstract translation: 本发明的波长偏移测量装置是测量从光源发射的光束的波长偏移的波长偏移检测器（WLCD1），并且包括分离从光发射的光束的分束器（BS2） 源多个光束并且在多个光束中合成两个光束以产生干涉光;隔离部件（SP），其被设置成使得由分束器分离的两个光束的光程长度差 PBS2）和多个光电传感器（PD），用于检测由分束器（BS2）产生的干涉光。 多个光电传感器（PD）基于干涉光输出具有彼此相移的多个干涉信号，以使用多个干涉信号测量波长偏移。

公开(公告)号：EP1411339A2

公开(公告)日：2004-04-21

申请号：EP04001628.9

申请日：1999-02-17

Applicant: Anritus Corporation ,  Nippon Telegraph and Telephone Corporation

Inventor： Otani, Akihito ,  Otsubo, Toshinobu ,  Takara, Hidehiko ,  Kawanishi, Satoki ,  Yamabayashi, Yoshiaki

IPC: G01M11/00 ,  G01J9/02

CPC classification number: G01M11/336 ,  G01J4/00 ,  G01J7/00 ,  G01J2009/0261 ,  G01M11/332 ,  G01M11/335

Abstract: A first tunable wavelength pulse light source (22) is driven by a reference signal to emit a first optical pulse. An optical demultiplexer (24) demultiplexes a first optical pulse emitted from the first pulse light source (22) into a reference optical pulse and an incident optical pulse to be sent into an object to be measured. An optical multiplexer (26) multiplexes the reference optical pulse and an outgoing optical pulse passing through the object to output multiplexed light. A second pulse light source (23) generates a second optical pulse which is synchronous with the first optical pulse and delays a predetermined time for each period of the first optical pulse. A sampling unit (27, 27a, 27b) receives the multiplexed light and the second optical pulse to obtain an optical pulse train signal proportional to the intensity of the multiplexed light obtained in synchronism with the second optical pulse. From the optical pulse train signal from the sampling unit (27, 27a, 27b), a signal processor (37) obtains an envelope formed by peaks of individual optical pulses forming the optical pulse train. The wavelength dispersion of the object is obtained by measuring the delay time of the outgoing optical pulse passing through the object on the basis of intervals between the peaks of the envelope.

Abstract translation: 第一可调波长脉冲光源（22）由参考信号驱动以发射第一光脉冲。 光解复用器（24）将从第一脉冲光源（22）发射的第一光脉冲解复用为参考光脉冲和入射光脉冲以发送到待测量对象中。 光学多路复用器（26）多路复用参考光脉冲和穿过物体的输出光脉冲以输出多路复用光。 第二脉冲光源（23）产生与第一光脉冲同步的第二光脉冲，并延迟第一光脉冲的每个周期的预定时间。 采样单元（27,27a，27b）接收多路复用光和第二光脉冲，以获得与第二光脉冲同步获得的多路复用光的强度成比例的光脉冲串信号。 信号处理器（37）根据来自采样单元（27,27a，27b）的光脉冲串信号获得由形成光脉冲串的各个光脉冲的峰值形成的包络线。 物体的波长色散是通过根据包络峰值之间的间隔测量通过物体的输出光脉冲的延迟时间而获得的。

公开(公告)号：EP0779719A3

公开(公告)日：2001-01-03

申请号：EP96308939.6

申请日：1996-12-10

Applicant: LITTON SYSTEMS, INC.

Inventor： Hall, David B.

IPC: H04B10/148

CPC classification number: H04B10/61 ,  G01J2009/0261 ,  H04B10/614 ,  H04B10/64

Abstract: A polarization diversity receiver system for yielding multiple heterodyne optical output signals from an incident optical beam having a p-polarized component and an s-polarized component comprises first and second sequentially-arrayed polarizing beamsplitters (42, 54), and three photodetectors (48, 58, 64), each of which receives a heterodyne optical signal. The polarization diversity receiver system tracks the largest of these three signals, and uses only this largest one for subsequent signal processing. There is a minimum for this largest signal that is dependent on the input polarizations of two optical fields whose beat note is the heterodyne signal, so that one can maximize the minimum of this largest of the three heterodyne signals. The first polarizing beamsplitter (42) ideally splits the incident beam into a transmitted beam portion (T), including approximately 100% of the p-polarized component and approximately 33% of the s-polarized component, and a reflected beam portion (R) including approximately 0% of the p-polarized component and approximately 67% of the s-polarized component. The reflected beam portion (R) exits from the first polarizing beamsplitter (42) as a first heterodyne optical output signal, and impinges on a first photodetector (48). The transmitted beam portion (T) exits from the first beamsplitter (42), and then undergoes an effective 45 o rotation of its polarization eigenstates around its axis of propagation, either prior to or during its passage through the second polarizing beamsplitter (54). The second beamsplitter (54) splits the rotated transmitted beam portion into second and third heterodyne optical output signals which respectively impinge upon second and third photodetectors (58, 64).

Abstract translation: 用于从具有p偏振分量和s偏振分量的入射光束产生多个外差光输出信号的偏振分集接收器系统包括第一和第二顺序排列的偏振分束器（42,44）和三个光电检测器（48， 58,64），其中每一个接收外差光信号。 极化分集接收机系统跟踪这三个信号中最大的信号，仅使用最大的信号进行后续的信号处理。 对于该最大信号的最小值取决于两个光场的输入极化，其中拍音是外差信号，从而可以使三个外差信号中最大的最小值最大化。 第一偏振分束器（42）理想地将入射光束分裂成透射光束部分（T），包括大约100％的p偏振分量和大约33％的s偏振分量，以及反射光束部分（R） 包括大约0％的p偏振分量和大约67％的s偏振分量。 反射光束部分（R）作为第一外差光输出信号从第一偏振分束器（42）离开，并且撞击在第一光电检测器（48）上。 发射光束部分（T）从第一分束器（42）离开，然后在其通过第二偏振分束器（54）之前或期间，在其传播轴线周围进行其偏振本征态的有效45°旋转 ）。 第二分束器（54）将旋转的透射光束部分分裂成分别照射到第二和第三光电检测器（58,64）上的第二和第三外差光输出信号。

公开(公告)号：EP0340577A3

公开(公告)日：1991-01-23

申请号：EP89107318.1

申请日：1989-04-22

Applicant: IOT ENTWICKLUNGSGESELLSCHAFT FÜR INTEGRIERTE OPTIK-TECHNOLOGIE MBH

Inventor： Fabricius, Norbert, Dr.Dipl.-Phys. ,  Ross, Ludwig, Dr.Dipl.-Chem. ,  Baumgart, Jörg ,  Oeste, Helmut, Dipl.-Ing. ,  Guttmann, H.-J., Dipl.-Ing. ,  Efstathiou, Charitos, Dipl.-Ing. ,  Götz, Helga, ,  Kluge, Jürgen

IPC: G01N21/41 ,  G01N21/45

CPC classification number: G01N21/45 ,  G01J2009/023 ,  G01J2009/0261 ,  G01N21/431 ,  G01N2021/1748

Abstract: Es wird ein Verfahren zur Bestimmung der Brechzahl n einer Substanz beschrieben, bei dem monochromatisches Licht einem in ein Substrat integrierten Monomode Wellenleiter zugeführt wird, der über einen Abschnitt vorbestimmter Länge mit der zu messenden Substanz in Kontakt gebracht wird. Dadurch wird die effektive Brechzahl in diesem Abschnitt des Wellenleiters ver­ändert. Dieser Effekt wird zur Messung der Brechzahl der Meßsubstanz verwendet. Die Änderung der effektiven Brechzahl verursacht eine Phasenverschiebung des durch den Meßabschnitt laufenden Lichtes. Diese Phasenverschiebung wird als Phasen­differenz zu einem von der Meßsubstanz nicht beeinflußten Lichtanteil gemessen, wobei diese Messung vorzugsweise inter­ferometrisch erfolgt.

公开(公告)号：EP0341960A3

公开(公告)日：1990-10-03

申请号：EP89304644.1

申请日：1989-05-08

Applicant: Hewlett-Packard Company

Inventor： Wayne, Kenneth.J.

IPC: G01J9/02 ,  G01B9/02

CPC classification number: G01B9/02041 ,  G01B9/02059 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261 ,  G01J2009/0284

Abstract: Method and apparatus for obtaining an enhanced clearer measurement signal with improved fringe contrast from a laser interferometer. The interferometer sends a laser beam (12) through atmospheric air to a polarizing or nonpolarizing beamsplitter (13) that sends one laser beam portion (14,16) to a fixed reference retroreflector (15) and another portion (19,21) to a movable measurement retroreflector (20). Both beams, upon retroreflection go back to the beamsplitter and are recombined to produce a combined beam (22) that is then sent to an aperture (30) such that only a small selected portion of that combined beam passes through the aperture, attenuating the energy of the combined beam but increasing its fringe contrast. This portion is sent to a detector (32) and is subsequently amplified by a high-gain amplifier.

Abstract translation: 用于从激光干涉仪获得具有改进的条纹对比度的增强的更清晰的测量信号的方法和装置。 干涉仪将激光束（12）通过大气引导到偏振或非偏振分束器（13），该分束器将一个激光束部分（14,16）发送到固定参考后向反射器（15），另一部分（19,21）发送到 可移动测量回射器（20）。 两个光束在逆反射时返回分束器并被重新组合以产生组合的光束（22），然后将组合的光束（22）发送到孔（30），使得只有该组合光束的小的选定部分通过孔径，衰减能量 的组合光束，但增加其条纹对比度。 该部分被发送到检测器（32），随后被高增益放大器放大。

公开(公告)号：EP0342885A2

公开(公告)日：1989-11-23

申请号：EP89304859.5

申请日：1989-05-12

Applicant: Hewlett-Packard Company

Inventor： Parker, David R. ,  Glievef, John H.

IPC: G02B5/28 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0261 ,  G02B27/28

Abstract: Apparatus for isolating optical feedback in a laser interferometer having a laser light source (12) from which a linear polarised outgoing laser beam (28) of certain polarisation orientation is derived. The interferometer also redirects the outgoing laser beam to form a return laser beam (29) directed to a receiver (13). The outgoing and the return laser beams are physically close and are substantially parallel. The linearly polarised outgoing laser beam is converted to circular polarisation. A portion of the circularly polarised return laser beam directed toward the laser light source is converted back to linear polarisation with polarisation orientation orthogonal to the polarisation orientation of the outgoing laser beam. A portion of the circularly polarised return laser beam directed toward the receiver converted back to linear polarisation with polarisation orientation being substantially the same as the polarisation orientation of the outgoing laser beam. The portion of the return laser beam with polarisation orientation orthogonal to the polarisation orientation of the outgoing laser beam is directed away from the laser light source, and the portion of the return laser beam with polarisation orientation of the outgoing laser beam is directed toward the receiver.

Abstract translation: 一种用于在具有激光光源（12）的激光干涉仪中隔离光学反馈的装置，从该激光光源（12）导出某些偏振取向的线偏振输出激光束（28）。 干涉仪还重定向输出激光束以形成指向接收器（13）的返回激光束（29）。 输出和返回的激光束物理上接近并且基本上平行。 线偏振输出激光束被转换为圆偏振。 朝向激光光源的圆偏振返回激光束的一部分被转换成具有与出射激光束的偏振取向正交的偏振方向的线偏振。 朝向接收器的圆偏振返回激光束的一部分转换回线偏振，其偏振方向基本上与输出激光束的偏振取向相同。 具有与出射激光束的偏振方向正交的偏振方向的返回激光束的部分被引导离开激光光源，并且具有输出激光束的偏振取向的返回激光束的部分被引导到接收器 。