비편광 적외 반사율 분해를 통한 황사탐지 시스템 및 이를 이용한 황사탐지 방법
    101.
    发明公开

    公开(公告)号:KR1020110100968A

    公开(公告)日:2011-09-15

    申请号:KR1020100020073

    申请日:2010-03-05

    Inventor: 홍성욱

    CPC classification number: G01W1/08 G01J4/00 G01S17/95 G01W1/02 G06T2207/30192

    Abstract: 본 발명은 비편광 적외 반사율 분해를 통한 황사탐지 시스템에 관한 것이다. 특히 황사가 발생한 임의 해상 지역에서 정지궤도 위성의 적외선 채널 11㎛, 12㎛으로 각각 관측한 밝기 온도에 대한 위성영상 자료를 이용한다.
    더욱 상세하게 설명하면, 인공위성에서 관측되는 휘도 온도와 해수면 온도의 비율로써 방출율을 구하고, 그 방출율을 반사도로 변환한 다음에, 전자기파의 편광 성질을 이용하여 두 개의 반사도(Reflectivity)를 계산하고, 황사의 성분과 수증기나 구름의 성분이 다르다는 사실을 이용하여, 황사를 탐지하는 방법이다. 본 발명에 따르면, 이 분해된 두 반사도를 이용하고, 물질의 고유 성질인 굴절 지수가 황사와 수증기가 다르다는 것을 이용하면 바다 위의 황사를 탐지할 수 있다.

    評估裝置及評估方法
    103.
    发明专利
    評估裝置及評估方法 审中-公开
    评估设备及评估方法

    公开(公告)号:TW201022663A

    公开(公告)日:2010-06-16

    申请号:TW098137997

    申请日:2009-11-10

    IPC: G01N

    CPC classification number: G01J4/00 G01N21/21 G01N21/95607

    Abstract: 評估裝置(1)係使測光件(42)旋轉成測光件(42)之透射軸之方位相對偏光件(32)之透射軸成為90度�3度之傾斜角度,以各條件由攝影機(44)拍攝晶圓(10)之正反射像,影像處理部(50),係根據藉由攝影機(44)拍攝之兩片晶圓(10)之影像,評估反覆圖案之形狀以檢測劑量不良及聚焦不良。

    Abstract in simplified Chinese: 评估设备(1)系使测光件(42)旋转成测光件(42)之透射轴之方位相对偏光件(32)之透射轴成为90度�3度之倾斜角度,以各条件由摄影机(44)拍摄晶圆(10)之正反射像,影像处理部(50),系根据借由摄影机(44)拍摄之两片晶圆(10)之影像,评估反复图案之形状以检测剂量不良及聚焦不良。

    回転角測定装置
    106.
    发明专利
    回転角測定装置 有权
    旋转角度测量仪器

    公开(公告)号:JP2015049156A

    公开(公告)日:2015-03-16

    申请号:JP2013181501

    申请日:2013-09-02

    CPC classification number: G01B11/26 G01B11/14 G01D5/345 G01J4/00

    Abstract: 【課題】安価な角度測定が可能な回転角測定装置を提供する。【解決手段】固定部8と相対回転する可動部9とを具備し、前記固定部と前記可動部のいずれか一方に設けられた、検出光及び基準位置信号光を発する光源2と、検出光を偏光光にする偏光板4と、前記偏光光を前記光源の光軸7を中心に回転させる偏光光回転部と、前記偏光光の基準回転位置で発せられる基準位置信号光と、前記固定部と前記可動部のいずれか他方に設けられた前記偏光光の回転に対して静止する静止偏光板5と、前記固定部又は前記可動部に設けられ、前記静止偏光板を透過した前記偏光光及び前記基準位置信号光を受光する受光センサ6と、該受光センサからの信号に基づき光量変化の検出波形を演算すると共に前記基準位置信号光を検出し、該基準位置信号光検出時の前記検出波形の位相と所定の検出基準位相から前記固定部と前記可動部間の相対回転角を演算する演算部10とを具備した。【選択図】図1

    Abstract translation: 要解决的问题:提供能够以低成本进行角度测量的旋转角度测量仪器。解决方案:旋转角度测量仪器包括:固定部分8; 相对旋转的可移动部分9; 设置在所述固定部和所述可动部中的任一方的光源2,以发射检测光和基准位置信号光; 将检测光偏振成偏振光的偏光板4; 偏振光旋转部,其使偏振光围绕光源的光轴7旋转; 在偏振光的基准旋转位置处发射的基准位置信号光; 固定偏振片5,其设置在固定部分和可动部分中的另一个中,并且静止以便偏振光的旋转; 光接收传感器6设置在固定部分或活动部分中以接收透射通过静止偏振片的偏振光和基准位置信号光; 以及算术单元10,其基于来自光接收传感器的信号来计算光量变化的检测波形,并检测基准位置信号光,并根据该运算单元计算固定部分和可动部件之间的相对旋转角度 在检测基准位置信号光和规定的检测基准相位时检测波形的相位。

    Polarization analysis system
    107.
    发明专利
    Polarization analysis system 有权
    极化分析系统

    公开(公告)号:JP2013019812A

    公开(公告)日:2013-01-31

    申请号:JP2011154241

    申请日:2011-07-12

    Abstract: PROBLEM TO BE SOLVED: To provide an optical tomographic image forming system capable of achieving size reduction and cost reduction attendant thereon, and a detection unit used therein.SOLUTION: An optical tomographic image forming system 100 includes a detection unit 200 which comprises an optical polarization element 250 and detects polarization components at each wavelength while an interference polarized beam generated by causing an object reflected light beam and a reference reflected light beam to interfere with each other is separated at each wavelength. The optical polarization element 250 is configured such that the separated interference polarized beams at respective wavelengths are incident in parallel thereon in order of wavelength, and configured to have a birefringence characteristic having a first refractive index and a second refractive index that are provided with a predetermined condition, and while transmitting the incident interference polarized beam at each wavelength therethrough, to separate the interference polarized beam into polarization components and emit the separated polarization components at each wavelength in the same direction along different optical axes.

    Abstract translation: 要解决的问题:提供能够实现其尺寸减小和降低成本的光学断层图像形成系统及其中使用的检测单元。 解决方案:光学断层图像形成系统100包括检测单元200,其包括光学偏振元件250并且检测每个波长的偏振分量,而通过使物体反射光束和参考反射光束产生的干涉偏振光束 相互干扰在每个波长处分离。 光偏振元件250被配置为使得各波长处的分离的干涉偏振光束以波长的顺序并入入射,并且被配置为具有具有第一折射率和第二折射率的双折射特性,其具有预定的 条件,并且在每个波长穿过其中传输入射干涉偏振光束时,将干涉偏振光束分离成偏振分量,并沿着不同的光轴在相同方向上沿每个波长发射分离的偏振分量。 版权所有(C)2013,JPO&INPIT

    Polarization measuring device, ellipsometer and measuring technique for polarization status of light
    109.
    发明专利
    Polarization measuring device, ellipsometer and measuring technique for polarization status of light 审中-公开
    极化测量装置,ELLIPSOMETER和用于极化状态的测量技术

    公开(公告)号:JP2007256292A

    公开(公告)日:2007-10-04

    申请号:JP2007076669

    申请日:2007-03-23

    CPC classification number: G01J4/00 G01N21/211 G01N21/8422

    Abstract: PROBLEM TO BE SOLVED: To provide an ellipsometer, a polarized light measuring device, and a polarization status measuring technique capable of measuring polarization at higher speed and more effectively.
    SOLUTION: The polarization measuring device is equipped with a circular diffraction grating 140 that diffracts incident light so as to obtain polarization status of the light and a detector 150, displaying polarization status of the light by receiving the light diffracted with a circular diffraction grating 140. The circular diffraction grating 140 includes a grid formed by digging a fixed trench and adjusts the transmissivity, according to polarization direction of light by modulating spacing of the grid and depth of the trench. The circular diffraction grating 140 diffracts the incidence light in all directions. The detector 150 receives the diffracted light to detect it two-dimensionally. On the two-dimensional images detected with the detector 150, data can be directly extracted, measuring the degree of polarization of the incident light.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种能够以更高速度和更有效地测量偏振的椭偏仪,偏振光测量装置和极化状态测量技术。 解决方案:偏振测量装置配备有衍射入射光以获得光的偏振状态的圆形衍射光栅140和检测器150,通过接收以圆形衍射衍射的光来显示光的偏振状态 圆形衍射光栅140包括通过挖掘固定沟槽并根据光的偏振方向调节透射率而形成的栅格,通过调制栅格的间距和沟槽的深度。 圆形衍射光栅140在所有方向衍射入射光。 检测器150接收衍射光以二维检测。 在用检测器150检测的二维图像上,可以直接提取数据,测量入射光的偏振度。 版权所有(C)2008,JPO&INPIT

    Near field polarization measuring instrument
    110.
    发明专利
    Near field polarization measuring instrument 有权
    近场偏振测量仪器

    公开(公告)号:JP2006300708A

    公开(公告)日:2006-11-02

    申请号:JP2005122311

    申请日:2005-04-20

    Abstract: PROBLEM TO BE SOLVED: To provide a near field rotatory polarization measuring instrument having a spatial resolution of light diffraction limit or more. SOLUTION: This near field rotatory polarization measuring instrument 10 is provided with: a near field probe 14 having in its tip an opening smaller than a wavelength of light used in measurement, and for emitting a near field light of linear polarization from the opening to irradiate a sample with the near field light; a detecting means 22 for detecting the light transmitted through the sample; an analyzer 18 provided in a preceding stage of the detecting means; and an analyzer rotating means 20 for rotating the analyzer around an optical axis as the center, and for changing an angle of a transmission axis thereof, and measures an angle of rotation of the sample by rotating the analyzer with the analyzer rotating means. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有光衍射极限以上的空间分辨率的近场旋转极化测定仪。 解决方案:该近场旋转极化测量仪器10设置有:近场探针14,其尖端具有比测量中使用的光的波长小的开口,并且用于从线偏振的近场光发射 开放用近场光照射样品; 用于检测透过样品的光的检测装置22; 设置在检测装置的前级的分析器18; 以及用于使分析器围绕作为中心的光轴旋转并用于改变其透射轴的角度的分析器旋转装置20,并且通过用分析器旋转装置旋转分析器来测量样品的旋转角度。 版权所有(C)2007,JPO&INPIT

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