Grazing incidence co-axial and confocal
    101.
    发明授权
    Grazing incidence co-axial and confocal 失效
    掠入射同轴和共焦

    公开(公告)号:US5592338A

    公开(公告)日:1997-01-07

    申请号:US397768

    申请日:1995-03-02

    Inventor: Oberto Citterio

    Abstract: Grazing incidence co-axial and confocal mirrors, used in particular for X-ray telescopes for astronomic observations, having a parabola/hyperbola double-cone truncated-cone structure, with polynomial sections or other geometric configurations, and consisting of an internal reflecting surface (15), in the form of a gold layer, an epoxy resin layer (14) and a supporting mechanical structural element (carrier) (11), formed of a ceramic material having physical-chemical properties improved compared to nickel and obtained according to the process of chemical vapor deposition (CVD) or other fabrication processes.

    Abstract translation: 用于特别用于用于天文观测的X射线望远镜的掠射入射同轴和共焦反射镜,具有抛物线/双曲线双锥截锥锥结构,具有多项式截面或其他几何构造,并且由内部反射表面 15),金层形式的环氧树脂层(14)和支撑机械结构元件(载体)(11),由具有与镍相比提高的物理化学性质的陶瓷材料形成,并且根据 化学气相沉积(CVD)或其他制造工艺。

    X-ray mirror, and x-ray exposure apparatus and device manufacturing
method employing the same
    102.
    发明授权
    X-ray mirror, and x-ray exposure apparatus and device manufacturing method employing the same 失效
    X射线镜,X射线曝光装置及其制造方法

    公开(公告)号:US5461657A

    公开(公告)日:1995-10-24

    申请号:US266749

    申请日:1994-06-28

    Abstract: An X-ray mirror has a silicon carbide substrate having a convex cylindrical surface, and a carbon layer coated on a surface of said substrate to a thickness ranging from 10 nm to 1 .mu.m by evaporation, such as CVD. In the X-ray mirror in which the carbon layer is coated thereon beforehand, changes in the intensity of reflected light, caused by a contaminating carbon layer attached to the surface of the mirror, can be restricted. When such a mirror is used in an X-ray lithographic apparatus, the number of times the intensity of X-rays is measured or corrected or the mirror is cleaned can be greatly reduced.

    Abstract translation: X射线镜具有具有凸圆柱形表面的碳化硅衬底和通过诸如CVD的蒸发在所述衬底的表面上涂覆至10nm至1μm的厚度的碳层。 在预先涂覆有碳层的X射线反射镜中,可以限制由附着在反射镜表面上的污染碳层引起的反射光强度的变化。 当在X射线光刻设备中使用这样的镜子时,可以大大减少测量或校正X射线强度或镜子被清洁的次数。

    Device for adjusting curvature of mirror while avoiding movement of central point of mirror, and mirror adjustment system comprising same
    103.
    发明授权
    Device for adjusting curvature of mirror while avoiding movement of central point of mirror, and mirror adjustment system comprising same 有权
    用于调节镜的曲率同时避免镜中心点的移动的装置,以及包括其的镜子调节系统

    公开(公告)号:US09435999B2

    公开(公告)日:2016-09-06

    申请号:US14008570

    申请日:2012-02-22

    Applicant: Kye Hwan Gil

    Inventor: Kye Hwan Gil

    Abstract: Disclosed is a device for adjusting the curvature of a mirror comprising: a base block; a pair of rotating blocks which are connected to the base block by one or more elastic bodies, respectively, and rotate around the connection portions between the base block and the elastic bodies or elastically return to through the application or release of external forces; a pair of support blocks which are disposed at the pair of rotating blocks, respectively, to support both ends of the mirror and apply bending moments to the both ends of the mirror by the rotation of the pair of rotating blocks; and a driving part for rotating the pair of rotating blocks.

    Abstract translation: 公开了一种用于调节反射镜的曲率的装置,包括:基座; 一对旋转块,分别通过一个或多个弹性体连接到基座,并且围绕基座和弹性体之间的连接部分旋转,或者通过外力的施加或释放弹性地返回; 一对支撑块,分别设置在一对旋转块上,以支撑反射镜的两端,并通过一对旋转块的转动将弯矩施加到反射镜的两端; 以及用于旋转所述一对旋转块的驱动部。

    X-ray intensifying screens including micro-prism reflective layer for exposing X-ray film, X-ray film cassettes, and X-ray film assemblies
    104.
    发明授权
    X-ray intensifying screens including micro-prism reflective layer for exposing X-ray film, X-ray film cassettes, and X-ray film assemblies 有权
    X射线增强屏幕,包括用于曝光X射线胶片的微棱镜反射层,X射线胶片盒和X射线胶片组件

    公开(公告)号:US09324469B1

    公开(公告)日:2016-04-26

    申请号:US14530426

    申请日:2014-10-31

    CPC classification number: G21K4/00 G21K2004/06 G21K2004/12 G21K2201/06

    Abstract: An intensifying screen for exposing X-ray film includes a screen support backing, a luminescent layer having a luminescent material that emits light in the presence of X-rays, and a reflective layer disposed between the luminescent layer and the screen support backing, the reflective layer including a plurality of micro-prisms that reflect light emitted by the luminescent material. An X-ray film cassette includes at least one intensifying screen and a housing surrounding the at least one intensifying screen.

    Abstract translation: 用于曝光X射线胶片的增强屏幕包括屏幕支撑背衬,具有在存在X射线的情况下发光的发光材料的发光层和设置在发光层和屏幕支撑背衬之间的反射层,反射 层包括反射由发光材料发射的光的多个微棱镜。 X射线胶片盒包括至少一个增强屏幕和围绕至少一个增强屏幕的壳体。

    Scintillator panel and radiation detector
    105.
    发明授权
    Scintillator panel and radiation detector 有权
    闪烁面板和辐射探测器

    公开(公告)号:US09158009B2

    公开(公告)日:2015-10-13

    申请号:US12565324

    申请日:2009-09-23

    Abstract: A reflective resin sheet is bonded to one face of a supporting substrate transmitting a radiation ray and a resin sheet of the same material as that of the reflective resin sheet to the other face of the supporting substrate. A phosphor layer converting a radiation ray into visible light is formed additionally on the reflective resin sheet formed on one face of the supporting substrate. The phosphor layer is enclosed with an additional moisture-proof layer and the reflective resin sheet. It is possible to obtain a scintillator panel higher in sensitivity characteristics, stabilized in quality and more cost-effective by placing the reflective resin sheet between the supporting substrate and the phosphor layer.

    Abstract translation: 将反射树脂片粘合到支撑基板的一个面上,该支撑基板将与辐射线和与反射树脂片材相同的材料的树脂片材传送到支撑基板的另一个面。 在形成在支撑基板的一个面上的反射树脂片上另外形成将辐射线转换成可见光的荧光体层。 荧光体层被附加的防潮层和反射树脂片包围。 通过将反射树脂片放置在支撑基板和荧光体层之间,可以获得灵敏度特性更高,质量稳定,成本更高的闪烁体面板。

    Arrangement and method for transporting radicals
    106.
    发明授权
    Arrangement and method for transporting radicals 有权
    自由基运输的安排和方法

    公开(公告)号:US09123507B2

    公开(公告)日:2015-09-01

    申请号:US14385802

    申请日:2013-03-20

    Abstract: The invention relates to an arrangement for transporting radicals. The arrangement includes a plasma generator and a guiding body. The plasma generator includes a chamber (2) in which a plasma may be formed. The chamber has an inlet (5) for receiving an input gas, and one or more outlets (6) for removal of at least one of the plasma and radicals created therein. The guiding body is hollow and is arranged for guiding radicals formed in the plasma towards an area or volume at which contaminant deposition is to be removed. The chamber inlet is coupled to a pressure device (40) for providing a pulsed pressure into the chamber so as to create a flow in the guiding body.

    Abstract translation: 本发明涉及一种输送自由基的装置。 该装置包括等离子体发生器和引导体。 等离子体发生器包括可以形成等离子体的腔室(2)。 腔室具有用于接收输入气体的入口(5)和用于去除其中产生的至少一种等离子体和自由基的一个或多个出口(6)。 引导体是中空的,并且被布置成用于将形成在等离子体中的自由基引导到要去除污染物沉积的区域或体积。 腔室入口联接到压力装置(40),用于向腔室提供脉冲压力,以便在引导体中产生流动。

    Non-parallel grating arrangement with on-the-fly phase stepping, X-ray system
    107.
    发明授权
    Non-parallel grating arrangement with on-the-fly phase stepping, X-ray system 有权
    非平行光栅布置,具有飞行相位步进,X射线系统

    公开(公告)号:US08848863B2

    公开(公告)日:2014-09-30

    申请号:US13514061

    申请日:2010-12-03

    CPC classification number: G21K1/06 A61B6/484 G21K2201/06 G21K2207/005

    Abstract: The present invention relates to X-rayimage acquisition technology in general. Employing phase-contrast imaging for X-rayimage acquisition may significantly enhance the visibility of structures in images acquired. However, phase-contrast information may only be obtainable in a small detector region with subsequent image acquisitions requiring individual phase stepping states to allow reconstruction of an X-ray image. Accordingly, a grating arrangement for phase-contrast imaging is provided which may allow on the fly phase stepping during a field of view scan. According to the present invention a grating arrangement (1) for phase-contrast imaging is provided, comprising a first grating element (8) and a second grating element (10). Each of the first grating element (8) and the second grating element (10) comprises a trench structure. The trench structure comprises at least one trench region (9) and at least one barrier region (3). The at least one trench region (9) and the at least one barrier region (3) are at least locally arranged in parallel. The first grating element (8) and the second grating element (10) are arranged such that the trench structure of the first grating element (8) and the trench structure of the second grating element (10) are non-parallel comprising an angle α.

    Abstract translation: 本发明一般涉及X射线图像采集技术。 采用X射线图像采集的相位对比成像可以显着增强获得的图像中结构的可视性。 然而,相位对比度信息只能在小的检测器区域中获得,随后的图像采集需要各个相位步进状态以允许重建X射线图像。 因此,提供了用于相位对比成像的光栅装置,其可以在视野扫描期间在飞行阶段上进行步进。 根据本发明,提供了一种用于相位对比成像的光栅装置(1),包括第一光栅元件(8)和第二光栅元件(10)。 第一光栅元件(8)和第二光栅元件(10)中的每一个包括沟槽结构。 沟槽结构包括至少一个沟槽区(9)和至少一个势垒区(3)。 至少一个沟槽区域(9)和至少一个阻挡区域(3)至少局部地平行布置。 第一光栅元件(8)和第二光栅元件(10)被布置成使得第一光栅元件(8)的沟槽结构和第二光栅元件(10)的沟槽结构不平行,包括角度α 。

    Analysis method, radiation imaging apparatus using analysis method, and analysis program for executing analysis method
    108.
    发明授权
    Analysis method, radiation imaging apparatus using analysis method, and analysis program for executing analysis method 失效
    分析方法,辐射成像仪使用分析方法,分析程序执行分析方法

    公开(公告)号:US08520799B2

    公开(公告)日:2013-08-27

    申请号:US13060112

    申请日:2009-10-28

    Abstract: An analysis method for use in a radiation imaging apparatus employing intensity information of interference fringes of radiation rays that have passed through a detected object includes the steps of generating first phase information of the detected object wrapped into a range of 2π from the intensity information of the interference fringes; generating information on an absorption intensity gradient of the detected object from the intensity information of the interference fringes; generating a weighting function on the basis of an absolute value of a gradient in the information on the absorption intensity gradient; and generating second phase information by unwrapping the first phase information by using the weighting function.

    Abstract translation: 一种用于使用已经通过检测对象的辐射线的干涉条纹的强度信息的放射线成像设备的分析方法包括以下步骤:从被检测到的物体的强度信息生成包含在2pi范围内的检测对象的第一相位信息 干涉条纹; 根据干涉条纹的强度信息生成关于被检测物体的吸收强度梯度的信息; 基于关于吸收强度梯度的信息中的梯度的绝对值生成加权函数; 以及通过使用所述加权函数展开所述第一相位信息来产生第二相位信息。

    GRID FOR RADIATION IMAGING AND METHOD FOR PRODUCING THE SAME
    109.
    发明申请
    GRID FOR RADIATION IMAGING AND METHOD FOR PRODUCING THE SAME 有权
    用于辐射成像的网格及其制造方法

    公开(公告)号:US20120307976A1

    公开(公告)日:2012-12-06

    申请号:US13521725

    申请日:2011-03-18

    Inventor: Yasuhisa Kaneko

    Abstract: A conductive substrate (18) and an etching substrate (20) are bonded to each other. An etch mask (25) is formed on the etching substrate (20) using a photolithography technique. On the etching substrate (20), grooves (20a) and X-ray transmitting sections (14b) are formed by dry etching using Bosch process. The grooves (20a) are filled with Au (27) by an electroplating method using the conductive substrate (18) as an electrode. Thus, X-ray absorbing sections (14a) are formed.

    Abstract translation: 导电基板(18)和蚀刻基板(20)彼此接合。 使用光刻技术在蚀刻基板(20)上形成蚀刻掩模(25)。 在蚀刻基板(20)上,通过使用Bosch工艺的干蚀刻形成槽(20a)和X射线透过部(14b)。 通过使用导电性基板(18)作为电极的电镀方法将凹槽(20a)填充有Au(27)。 因此,形成X射线吸收部(14a)。

    RADIATION IMAGING SYSTEM
    110.
    发明申请
    RADIATION IMAGING SYSTEM 有权
    辐射成像系统

    公开(公告)号:US20120288056A1

    公开(公告)日:2012-11-15

    申请号:US13522010

    申请日:2011-02-02

    Abstract: An X-ray imaging system is provided with an X-ray source (11), first and second absorption gratings (31, 32), and a flat panel detector (FPD) (30), and obtains a phase contrast image of an object H by performing imaging while moving the second absorption grating (32) in x direction relative to the first absorption grating (31). The following mathematical expression is satisfied where p1′ denotes a period of a first pattern image at a position of the second absorption grating (32), and p2′ denotes a substantial grating pitch of the second absorption grating (32), and DX denotes a dimension, in the x-direction, of an X-ray imaging area of each pixel of the FPD (30). Here, “n” denotes a positive integer. DX≠n×(p1′×p2′)/|p1′−p2′|

    Abstract translation: X射线成像系统设置有X射线源(11),第一和第二吸收光栅(31,32)和平板检测器(FPD)(30),并且获得物体的相位对比图像 H,通过在相对于第一吸收光栅(31)的x方向上移动第二吸收光栅(32)的同时执行成像。 满足以下数学表达式,其中p1'表示第二吸收光栅(32)的位置处的第一图案图像的周期,p2'表示第二吸收光栅(32)的实质光栅间距,DX表示 在所述FPD(30)的每个像素的X射线成像区域的x方向上的尺寸。 这里,n表示正整数。 DX≠n×(p1'×p2')/ | p1'-p2'|

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