公开(公告)号：US09761340B2

公开(公告)日：2017-09-12

申请号：US15275430

申请日：2016-09-25

Applicant: Qing Qian

Inventor： Qing Qian

IPC: H01L31/08 ,  H01L31/18 ,  G01N23/207 ,  G21K1/00

CPC classification number: G21K1/00 ,  G01N23/2076 ,  G21K1/06 ,  G21K2201/062 ,  G21K2201/064 ,  G21K2201/067 ,  H01L31/085 ,  H01L31/1804

Abstract: A method of preparing two dimension bent X-ray crystal analyzers in strips feature is provided. A crystal wafer in strips is bonded to a curved substrate which offers the desired focus length. A crystal wafer in strips is pressed against the surface of the substrate forming curved shape by anodic bonding or glue bonding. The bonding is permanently formed between crystal wafer and its substrate surface, which makes crystal wafer has same curvature as previously prepared substrate.

公开(公告)号：US09746778B2

公开(公告)日：2017-08-29

申请号：US15070872

申请日：2016-03-15

Applicant: Carl Zeiss SMT GmbH ,  ASML Netherlands B.V.

Inventor： Norman Baer ,  Ulrich Loering ,  Oliver Natt ,  Gero Wittich ,  Timo Laufer ,  Peter Kuerz ,  Guido Limbach ,  Stefan Hembacher ,  Holger Walter ,  Yim-Bun-Patrick Kwan ,  Markus Hauf ,  Franz-Josef Stickel ,  Jan Van Schoot

IPC: G03F7/20 ,  G02B7/18 ,  G02B5/08 ,  G02B27/00 ,  G21K1/06 ,  B82Y10/00 ,  G02B17/06 ,  G02B3/00 ,  G03B27/54

CPC classification number: G03F7/7015 ,  B82Y10/00 ,  G02B3/00 ,  G02B5/08 ,  G02B5/0816 ,  G02B5/0891 ,  G02B7/1815 ,  G02B17/0647 ,  G02B27/0043 ,  G03B27/542 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70316 ,  G03F7/70825 ,  G03F7/70891 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064

Abstract: A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective surface for projecting an object field on a reticle onto an image field on a substrate if the projection lens is exposed with an exposure power of EUV light, wherein the bodies of at least two reflective optical elements comprise a material with a temperature dependent coefficient of thermal expansion which is zero at respective zero cross temperatures, and wherein the absolute value of the difference between the zero cross temperatures is more than 6K.

公开(公告)号：US20170197096A1

公开(公告)日：2017-07-13

申请号：US15414634

申请日：2017-01-25

Applicant: CONVERGENT R.N.R LTD

Inventor： Zeev BURSHTEIN ,  Zeev HAREL ,  Aharon BAR-DAVID ,  Donald M. KORN

IPC: A61N5/10 ,  G21K1/06 ,  G21K1/04 ,  A61B6/00 ,  A61B6/06

CPC classification number: A61N5/1049 ,  A61B6/06 ,  A61B6/4021 ,  A61B6/4035 ,  A61B6/483 ,  A61N5/1065 ,  A61N5/1077 ,  A61N5/1084 ,  A61N2005/1054 ,  A61N2005/1061 ,  A61N2005/1091 ,  A61N2005/1095 ,  G21K1/04 ,  G21K1/065 ,  G21K1/067 ,  G21K2201/064 ,  H05G1/70

Abstract: An X-ray system comprises: a source of an X-ray diverging beam having a central imaging portion and a peripheral treatment-portion; a lens transforming the peripheral treatment portion of the X-ray beam into a converging beam directed to a target; a shutter located between the X-ray source and the target in the central imaging portion of the X-ray radiation; and a detector of imaging radiation after interaction with the target and to provide imaging information of the target.

公开(公告)号：US09633753B2

公开(公告)日：2017-04-25

申请号：US15149395

申请日：2016-05-09

Applicant: X-RAY OPTICAL SYSTEMS, INC.

Inventor： Steven M. Pomerantz ,  John H. Burdett ,  Rory D. Delaney

IPC: H05G1/02 ,  G21F5/015 ,  G01N23/223 ,  G01N23/10

CPC classification number: G21F5/015 ,  G01N23/10 ,  G01N23/223 ,  G01N2223/074 ,  G01N2223/076 ,  G01N2223/301 ,  G01N2223/308 ,  G01N2223/309 ,  G21K2201/062 ,  G21K2201/064

Abstract: A mobile transport and shielding apparatus, which holds an x-ray analyzer for transport between operating sites, and also serves as a shielded, operational station for holding the x-ray analyzer during operation thereof. The x-ray analyzer is removably insertable into the apparatus and is operable either within the mobile transport and shielding apparatus, or outside of the apparatus. The apparatus may provide means to control, power, cool, and/or charge the x-ray analyzer during operation of the analyzer; and also means to transport the analyzer (e.g., a handle).

公开(公告)号：US09612370B1

公开(公告)日：2017-04-04

申请号：US15284513

申请日：2016-10-03

Applicant: Kenneth C. Johnson

Inventor： Kenneth C. Johnson

IPC: A61N5/00 ,  G03B27/32 ,  G03B27/54 ,  G03B27/72 ,  G02B5/18 ,  H05G2/00 ,  G02B19/00 ,  G03F7/20

CPC classification number: G02B5/1838 ,  G02B5/122 ,  G02B19/0095 ,  G03F7/70033 ,  G03F7/7015 ,  G03F7/70158 ,  G03F7/70175 ,  G03F7/70191 ,  G03F7/70575 ,  G21K1/062 ,  G21K1/067 ,  G21K2201/064 ,  H05G2/008

Abstract: A plasma-generated EUV light source uses an EUV-diffracting collection mirror to channel spectrally pure in-band radiation through an intermediate-focus aperture and through EUV illumination optics. Out-of-band radiation is either undiffracted by the collection mirror or is diffractively scattered away from the aperture. The undiffracted portion, plus plasma-emitted radiation that does not intercept the collection mirror, can be efficiently recycled back to the plasma via retroreflecting mirrors, cat's-eye reflectors, or corner-cube reflectors, to enhance generation of in-band EUV radiation by the plasma.

公开(公告)号：US09541839B2

公开(公告)日：2017-01-10

申请号：US14637459

申请日：2015-03-04

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Erik Robert Hosler

IPC: H05G2/00 ,  G03F7/20

CPC classification number: G03F7/70033 ,  G03F7/70008 ,  G03F7/70208 ,  G03F7/70991 ,  G21K1/067 ,  G21K2201/064 ,  G21K2201/065 ,  H05G2/008

Abstract: Methods for receiving a high-energy EUV beam and distributing EUV sub-beams to photolithography scanners and the resulting device are disclosed. Embodiments include receiving a high-energy primary EUV beam at a primary splitting optical assembly; splitting the primary EUV beam into primary EUV sub-beams; reflecting the primary EUV sub-beams to beam-splitting optical arrays; splitting the primary EUV sub-beams into secondary EUV sub-beams; reflecting the secondary EUV sub-beams to EUV distribution optical arrays; and distributing simultaneously the secondary EUV sub-beams to scanners.

Abstract translation: 公开了用于接收高能EUV光束并将EUV子光束分布到光刻扫描仪和所得到的装置的方法。 实施例包括在主分裂光学组件处接收高能量的初级EUV光束; 将主EUV波束分为主EUV子波束; 将主要EUV子光束反射到分束光学阵列; 将主EUV子光束分成次级EUV子光束; 将次级EUV子光束反射到EUV分配光学阵列; 并且将次级EUV子光束同时分配到扫描仪。

公开(公告)号：US09513233B2

公开(公告)日：2016-12-06

申请号：US14354855

申请日：2012-10-29

Applicant: THE UNIVERSITY OF CHICAGO

Inventor： Patrick La Riviere ,  Yuxin Steve Wang ,  Darin Clark ,  Keith Cheng

IPC: A61B6/00 ,  G01N23/04 ,  G01N23/223 ,  G06T19/00 ,  G01N23/225 ,  B82Y10/00 ,  A61B6/03

CPC classification number: G01N23/04 ,  A61B6/032 ,  A61B6/482 ,  A61B6/508 ,  B82Y10/00 ,  G01N23/046 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/0766 ,  G01N2223/6126 ,  G06T19/00 ,  G06T2210/41 ,  G21K2201/061 ,  G21K2201/064

Abstract: Systems and methods are provided for staining tissue with multiple biologically specific heavy metal stains and then performing X-ray imaging, either in projection or tomography modes, using either a plurality of illumination energies or an energy sensitive detection scheme. The resulting energy-weighted measurements can then be used to decompose the resulting images into quantitative images of the distribution of stains. The decomposed images may be false-colored and recombined to make virtual X-ray histology images. The techniques thereby allow for effective differentiation between two or more X-ray dyes, which had previously been unattainable in 3D imaging, particularly 3D imaging of features at the micron resolution scale. While techniques are described in certain example implementations, such as with microtomography, the techniques are scalable to larger fields of view, allowing for use in 3D color, X-ray virtual histology of pathology specimens.

Abstract translation: 提供了用多个生物特异性重金属染色染色组织的系统和方法，然后使用多个照明能量或能量敏感检测方案，以投影或断层摄影模式进行X射线成像。 然后，所得到的能量加权测量可用于将所得图像分解成污渍分布的定量图像。 分解图像可能是假色的并重新组合以制作虚拟X射线组织学图像。 因此，这些技术允许两种或多种X射线染料之间的有效区分，其先前在3D成像中是不可实现的，特别是在微米分辨率刻度上的特征的3D成像。 虽然技术在某些示例实现中被描述，例如利用微影像技术，但是这些技术可以扩展到更大的视野，允许在3D颜色，病理标本的X射线虚拟组织学中使用。

公开(公告)号：US09411238B2

公开(公告)日：2016-08-09

申请号：US14372950

申请日：2013-01-10

Applicant: ASML Netherlands B.V.

Inventor： Andrei Mikhailovich Yakunin ,  Vadim Yevgenyevich Banine ,  Johannes Hubertus Josephina Moors ,  Jan Bernard Plechelmus Van Schoot ,  Martinus Cornelis Maria Verhagen ,  Olav Waldemar Vladimir Frijns ,  Vladimir Mihailovitch Krivtsun ,  Gerardus Hubertus Petrus Maria Swinkels ,  Michel Riepen ,  Hendrikus Gijsbertus Schimmel ,  Viacheslav Medvedev

IPC: H05G2/00 ,  G03F7/20 ,  G21K1/06

CPC classification number: G03F7/70033 ,  G03F7/70166 ,  G03F7/70191 ,  G03F7/70575 ,  G03F7/70916 ,  G21K1/067 ,  G21K2201/064 ,  H05G2/008

Abstract: A source-collector device includes a target unit having a target surface of plasma-forming material and a laser unit to generate a beam of radiation directed onto the target surface to form a plasma from said plasma-forming material. A contaminant trap is provided to reduce propagation of particulate contaminants generated by the plasma. A radiation collector includes a one or more grazing-incidence reflectors arranged to collect radiation emitted by the plasma and form a beam therefrom, and a filter is configured to attenuate at least one wavelength range of the beam.

Abstract translation: 源极 - 集电极器件包括具有等离子体形成材料的靶表面的靶单元和用于产生被引导到靶表面上的辐射束以形成来自所述等离子体形成材料的等离子体的激光单元。 提供污染物阱以减少由等离子体产生的颗粒污染物的传播。 辐射收集器包括一个或多个放射入射反射器，其布置成收集由等离子体发射的辐射并从其形成光束，并且滤光器被配置为衰减光束的至少一个波长范围。

公开(公告)号：US09335280B2

公开(公告)日：2016-05-10

申请号：US14349732

申请日：2012-10-03

Applicant: X-RAY OPTICAL SYSTEMS, INC.

Inventor： Steven M. Pomerantz ,  John H. Burdett ,  Rory D. Delaney

IPC: H05G1/02 ,  G01N23/10 ,  G01N23/223

CPC classification number: G21F5/015 ,  G01N23/10 ,  G01N23/223 ,  G01N2223/074 ,  G01N2223/076 ,  G01N2223/301 ,  G01N2223/308 ,  G01N2223/309 ,  G21K2201/062 ,  G21K2201/064

Abstract: A mobile transport and shielding apparatus, which holds an x-ray analyzer for transport between operating sites, and also serves as a shielded, operational station for holding the x-ray analyzer during operation thereof. The x-ray analyzer is removably insertable into the apparatus and is operable either within the mobile transport and shielding apparatus, or outside of the apparatus. The apparatus may provide means to control, power, cool, and/or charge the x-ray analyzer during operation of the analyzer; and also means to transport the analyzer (e.g., a handle).

Abstract translation: 一种移动式运输和屏蔽装置，其保持用于在操作现场之间运输的x射线分析仪，并且还用作在其操作期间保持x射线分析仪的屏蔽操作台。 X射线分析仪可移除地插入设备中，并且可在移动传输和屏蔽设备内或设备外部操作。 该装置可以提供在分析仪操作期间对x射线分析仪进行控制，供电，冷却和/或充电的装置; 并且还用于运送分析器（例如，手柄）。

公开(公告)号：US20160111177A1

公开(公告)日：2016-04-21

申请号：US14893911

申请日：2014-05-21

Applicant: David Alan Bates

Inventor： David Alan Bates

IPC: G21K1/06 ,  G01N23/227 ,  H05G1/02

CPC classification number: G21K1/067 ,  G01N23/2273 ,  G21K1/06 ,  G21K2201/062 ,  G21K2201/064 ,  H01J35/02 ,  H01J2235/163 ,  H05G1/02

Abstract: An X-ray source comprising: an elongate tubular housing adapted to be fitted into a port of and extend into a chamber containing a sample to be analysed, said housing containing: an electron gun and a target mounted in the housing, the electron gun being arranged to direct electrons to a point on the target such that the target radiates X-rays; and a monochromator arranged to focus X-rays radiated from the target to a focal point on a sample in the chamber; wherein the monochromator is positioned, and comprises a material selected such that the target, the monochromator and the focal point on the sample are substantially in-line within the envelope of the tubular housing.

Abstract translation: 一种X射线源，包括：细长管状壳体，其适于装配到容纳要分析的样品的腔室中并且延伸到容纳待分析样品的腔室中，所述壳体包含：电子枪和安装在壳体中的靶，电子枪为 被布置成将电子引导到目标上的点，使得目标辐射X射线; 以及单色仪，其被布置成将从所述目标辐射的X射线聚焦到所述腔室中的样品上的焦点; 其中所述单色仪被定位，并且包括选择的材料，使得所述样品上的所述靶，所述单色仪和所述焦点基本上在所述管状壳体的封套内成直线。