公开(公告)号：EP2602813A1

公开(公告)日：2013-06-12

申请号：EP11814649.7

申请日：2011-08-02

Applicant: Osaka University ,  EMD Corporation

Inventor： SETSUHARA, Yuichi ,  EBE, Akinori

IPC: H01L21/205 ,  C23C16/509 ,  H01L21/3065 ,  H05H1/46

CPC classification number: H01L21/02104 ,  C23C16/24 ,  C23C16/509 ,  H01J37/3211 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/32568 ,  H01J37/32623 ,  H01J37/32834 ,  H01J37/32899 ,  H01J37/32954 ,  H01L21/465 ,  H05H1/46 ,  H05H2001/4667

Abstract: The problem addressed by the present invention is to provide a plasma processing device capable of easily controlling the energy distribution of electrons in a cloud of plasma according to the kind of gas molecules or their dissociation energy. A plasma processing device 10 according to the present invention includes a plasma processing chamber 1l, a plasma producing chamber 12 communicating with the plasma processing chamber 11, a radio-frequency antenna 16 for producing plasma, a plasma control plate 17 for controlling the energy of electrons in the plasma, as well as an operation rod 171 and a moving mechanism 172 for regulating the position of the plasma control plate 17. In this plasma processing device 10, the energy distribution of the electrons of the plasma produced in the plasma producing chamber 12 can be controlled by regulating the distance between the radio-frequency antenna 16 and the plasma control plate 17 by simply moving the operation rod 171 in its longitudinal direction by the moving mechanism 172. Therefore, a plasma process suitable for the kind of gas molecules to be dissociated and/or their dissociation energy can be easily performed.

Abstract translation: 本发明解决的问题是提供一种等离子体处理装置，其能够根据气体分子的种类或其解离能容易地控制等离子体云中的电子的能量分布。 根据本发明的等离子体处理装置10包括等离子体处理室11，与等离子体处理室11连通的等离子体产生室12，用于产生等离子体的射频天线16，用于控制能量的等离子体控制板17 等离子体中的电子，以及用于调节等离子体控制板17的位置的操作杆171和移动机构172.在该等离子体处理装置10中，等离子体产生室中产生的等离子体的电子的能量分布 可以通过简单地通过移动机构172将操作杆171沿其纵向方向移动来调节射频天线16和等离子体控制板17之间的距离来控制。因此，适合于气体分子种类的等离子体处理 被解离和/或其解离能可以容易地进行。

公开(公告)号：EP2482447A1

公开(公告)日：2012-08-01

申请号：EP12158799.2

申请日：2006-11-29

Applicant: Asahi Kasei EMD Corporation

Inventor： Yamamoto, Tomoaki

IPC: H03B5/32 ,  H03B5/36

CPC classification number: H03B5/366 ,  H03B2200/0092 ,  H03C3/08

Abstract: The present invention provides a voltage controlled oscillator having a wide frequency variation range and an oscillation frequency that shows favorable linearity with respect to control voltage. The present invention includes an amplifier circuit 21, a piezoelectric element 22 connected in parallel to the amplifier circuit 21 and forming a feedback loop, variable capacitive elements 24 and 25 respectively connected to an input terminal and an output terminal of the amplifier circuit 21 and having a capacitance value that is dependent on control voltage, and an analog operation circuit 26 that generates a control voltage Vcs based on an inputted control voltage Vc. In this arrangement, the control voltage Vc is applied to the variable capacitive element 24 and the control voltage Vcs generated by the analog operation circuit 26 is applied to the variable capacitive element 25.

Abstract translation: 本发明提供了一种具有宽的频率变化范围和相对于控制电压具有良好线性度的振荡频率的压控振荡器。 本发明包括放大器电路21，与放大器电路21并联连接并形成反馈回路的压电元件22，分别连接到放大器电路21的输入端子和输出端子的可变电容元件24和25，并具有 取决于控制电压的电容值，以及基于输入的控制电压Vc产生控制电压Vcs的模拟运算电路26。 在这种布置中，控制电压Vc被施加到可变电容元件24，并且由模拟运算电路26产生的控制电压Vcs被施加到可变电容元件25。

公开(公告)号：EP1607849A3

公开(公告)日：2012-01-25

申请号：EP05011431.3

申请日：2005-05-27

Applicant: Asahi Kasei EMD Corporation ,  POLYMATECH CO., LTD.

Inventor： Takatsuka, Toshinori ,  Honmatsu, Yoshifumi

IPC: G06F3/033

CPC classification number: G06F3/0338

Abstract: Provided is a pointing device (10) that can be reduced in thickness even if a magnetic field sensor (5) is mounted to a front face of a printed circuit board (p). When a support portion (13a, 21a, 22f) laterally moves, a reverse face of a flexible portion is displaced while being guided away from the printed circuit board due to deformation of a mountain fold flexure portion (13i) as a directional deformation portion (13i, 22c). Therefore, a clearance between the reverse face of the flexible portion (13b, 22a) and the printed circuit board (P) increases, and the magnetic field sensor (5) can be mounted to the front face of the printed circuit board (P), thereby making it possible to reduce thickness of the pointing device (10). At the same time, the flexible portion (13b, 22a) would not be ruptured through sliding contact with the magnetic field sensor (5).

公开(公告)号：EP1615430B1

公开(公告)日：2011-08-10

申请号：EP04726023.7

申请日：2004-04-06

Applicant: Asahi Kasei EMD Corporation

Inventor： SASAHARA, Hideaki ,  UKAJI, Nobuyoshi ,  ISHIHARA, Ken

IPC: H04N5/52

CPC classification number: H04N5/52 ,  H03M1/183

Abstract: An AGC control section (110) has a first operation mode for controlling the gain of a variable gain amplifier (103) so that the amplitude of a synchronization signal measured by a synchronization signal amplitude measurement circuit (108) is maintained constant and a second operation mode not increasing the gain even if the amplitude of the synchronization signal measured by a video signal processing circuit (109) is smaller than a predetermined first reference value and reducing the gain of the variable gain amplifier (103) only when the video signal amplitude has become greater than a predetermined second reference value. Here, when the synchronization signal amplitude is smaller than the predetermined first reference value and the video signal amplitude is greater than the predetermined second reference value while the AGC control section (110) is operating in the first operation mode, the mode is switched to the second operation mode. On the other hand, when the synchronization signal amplitude has become smaller than the predetermined first value while the AGC control section (110) is operating in the second operation mode, the mode is switched from the second operation mode to the first operation mode.

公开(公告)号：EP2299789A1

公开(公告)日：2011-03-23

申请号：EP09750378.3

申请日：2009-05-21

Applicant: EMD Corporation ,  Ando, Yasunori

Inventor： ANDO, Yasunori ,  EBE, Akinori ,  WATANABE, Masanori

IPC: H05H1/46 ,  C23C16/507 ,  H01L21/3065

CPC classification number: H05H1/46 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32174 ,  H01J37/32183 ,  H01J37/3266

Abstract: A flange, which forms a portion of a vacuum container, has a rectangular opening surrounded by an insulating frame. A plate-shaped radio-frequency antenna conductor 13 is provided so as to cover the opening, with the insulating frame clamped thereby. In this structure, a radio-frequency power source is connected via a matching box to one end along the length of the radio-frequency antenna conductor, the other end is connected to ground, and electric power is supplied so that a radio-frequency current flows from one end of the radio-frequency antenna conductor to the other. By this method, the impedance of the radio-frequency antenna conductor can be lowered, and high-density plasma with a low electron temperature can be efficiently generated.

Abstract translation: 形成真空容器的一部分的凸缘具有由绝缘框架包围的矩形开口。 设置有板状射频天线导体13，以覆盖开口，绝缘框被夹持。 在这种结构中，射频电源通过匹配盒连接到沿着射频天线导体的长度的一端，另一端连接到地，并且提供电力使得射频电流 从射频天线导体的一端流向另一端。 通过该方法，可以降低射频天线导体的阻抗，能够有效地产生电子温度低的高密度等离子体。

公开(公告)号：EP2216804A1

公开(公告)日：2010-08-11

申请号：EP08848700.4

申请日：2008-11-12

Applicant: EMD Corporation ,  Evatech Co., Ltd.

Inventor： SETSUHARA, Yuichi ,  EBE, Akinori ,  INO, Eiji ,  ISHIHARA, Shinichiro ,  ASHIDA, Hajime ,  WATANABE, Akira

IPC: H01L21/205 ,  C23C16/509 ,  H01L21/3065

CPC classification number: C23C16/503 ,  C03C17/22 ,  C03C2217/28 ,  C03C2218/153 ,  C23C16/24 ,  C23C16/509 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32715

Abstract: The present invention aims at providing a plasma processing apparatus for performing a plasma processing on a planar substrate body to be processed, the apparatus being capable of generating the plasma with good uniformity and efficiently using the plasma, and having a high productivity. That is, the plasma processing apparatus according to the present invention includes: a vacuum chamber 11; one or plural antenna supporters (plasma generator supporters) 12 projecting into the internal space 111 of the vacuum chamber 11; radio-frequency antennas (plasma generators) 13 attached to each antenna supporter 12; and a pair of substrate body holders 16 provided across the antenna supporter 12 in the vacuum chamber 11, for holding a planar substrate body to be processed 21.

Abstract translation: 本发明的目的在于提供一种等离子体处理装置，该等离子体处理装置用于对平面状的被处理基板进行等离子体处理，该等离子体处理装置能够良好地均匀地生成等离子体，并且能够高效率地使用等离子体，生产率高。 即，根据本发明的等离子体处理装置包括：真空室11; 伸入真空室11的内部空间111的一个或多个天线支撑件（等离子体发生器支撑件）12; 连接到每个天线支架12的射频天线（等离子体发生器）13; 以及一对基板主体保持件16，设置在真空室11中的天线支撑件12的两侧，用于保持平面的待处理基板主体21。

公开(公告)号：EP2200172A1

公开(公告)日：2010-06-23

申请号：EP09718472.5

申请日：2009-02-19

Applicant: Asahi Kasei EMD Corporation

Inventor： FUKUSHIMA, Takashi

IPC: H02P6/24 ,  H02P3/18

CPC classification number: H02P6/24 ,  H02P3/18

Abstract: In a motor control circuit which controls energization of a coil on the basis of a detection result of a rotor position, the control is performed so that the continuous rotation of the rotor due to its own inertia is suppressed and stopped in a short time, and that the reverse rotation of the rotor is prevented. When an external control signal CTL is changed from L to H, the normal rotation control is switched to reverse rotation control, so that a reverse brake state is effected. When motor rotation speed is monitored and reduced to a set rotation speed, a brake control signal SPSB is changed from L to H, so that a short brake state is effected. However, the motor continues to be rotated by its own inertia, and a position detection signal HALL is changed. Thus, reverse brake control is temporarily performed (only during a time period corresponding to a pulse width T RB ). The short pulse reverse brake control is intermittently performed until the motor is completely stopped. Therefore, it is possible to stop the motor in a shorter time as compared with the case where the motor is stopped only by the short brake control after the motor is decelerated to a rotation speed immediately before being stopped.

Abstract translation: 在基于转子位置的检测结果来控制线圈通电的电动机控制电路中，进行控制，使得转子在其自身惯性下的连续旋转在短时间内被抑制和停止，并且 防止了转子的反转。 当外部控制信号CTL从L变为H时，正常旋转控制切换到反向旋转控制，从而实现反向制动状态。 当电机转速被监测并降低到设定的转速时，制动控制信号SPSB从L变为H，从而实现短的制动状态。 然而，马达继续通过其惯性旋转，并且改变位置检测信号HALL。 因此，暂时执行反向制动控制（仅在对应于脉冲宽度T RB的时间段内）。 间歇地执行短脉冲逆向制动控制，直到电机完全停止。 因此，与马达在停止后马达减速到转速之后的马达仅通过短路制动控制的情况相比，可以在更短的时间内停止马达。

公开(公告)号：EP2110639A1

公开(公告)日：2009-10-21

申请号：EP08711031.8

申请日：2008-02-08

Applicant: Asahi Kasei EMD Corporation

Inventor： NAKAMURA, Takenobu ,  YAMASHITA, Masaya

IPC: G01B7/00 ,  G01B7/30

CPC classification number: G01B7/003 ,  G01D5/145

Abstract: The present invention relates to a spatial information detecting system that can conduct continuous measurement using an alternating magnetic field, and that has a high degree of freedom of frequency settings and a simple configuration. A magnetic sensor driving unit (23) drives a magnetic sensor (21) via a multiplexer unit (22). Signals of the magnetic sensor are converted from analog signals to digital signals, and are transmitted from a data transmitting unit (26) to an arithmetic unit (3) as magnetic data. A Fourier transform unit (32) calculates the amplitudes and phases of a plurality of frequency components of individual axes from the output signal of the magnetic data receiving unit (31). A magnetic field vector calculating unit (33) calculates signs of the amplitudes of the individual axes from phase relationships between the plurality of frequency components on the individual axes from the output signal from the Fourier transform unit (32), and calculates the magnetic field vector representing the direction and magnitude of the magnetic field from the signs and amplitudes. A direction calculating unit (34) calculates the direction of the information terminal (2).

Abstract translation: 本发明涉及一种空间信息检测系统确实可以进行使用简单的交变磁场连续测量，并做具有高度的频率设置和配置自由度。 一种磁传感器驱动部（23）驱动经由多路复用单元（22）的磁传感器（21）。 磁传感器的信号从模拟信号作为磁数据转换成数字信号，和为反式mitted从数据发送单元（26），以在计算单元（3）。 傅立叶变换单元（32）计算接收单元（31）从所述磁数据的输出信号各轴的频率分量的多个振幅和相位。 磁场矢量算出部（33）计算从来自输出信号的各轴从傅立叶变换单元（32）的频率分量的多元性之间的相位关系的各轴的振幅的符号，并且计算磁场矢量 表示从符号和振幅的方向和磁场的幅度。 A方向计算单元（34）计算的信息终端（2）的方向。

公开(公告)号：EP2006700A9

公开(公告)日：2009-07-29

申请号：EP07740148.7

申请日：2007-03-28

Applicant: Asahi Kasei EMD Corporation

Inventor： KATAOKA, Makoto ,  KAKUTA, Katsumi ,  YAMAGATA, Yo ,  KANAYAMA, Yuichi

IPC: G01R33/07 ,  H01L43/06

CPC classification number: G01R33/07 ,  G01R33/0011 ,  H01L27/22 ,  H01L43/06

Abstract: The present invention relates to a magnetic sensor with which magnetic characteristics are made extremely stable by consideration of an area of contact of a base layer of a magnetic substance and a semiconductor substrate. On a semiconductor substrate (111) a plurality of Hall elements (112a, 112b) are embedded so as to be coplanar to a top surface of the semiconductor substrate while being mutually spaced apart by a predetermined distance, and above the Hall elements and the semiconductor substrate, a base layer (114), having coefficient of thermal expansion differing from that of the Hall elements and partially covers a region of each Hall elements, is formed via a protective layer (113), and a magnetic flux concentrator (115), having an area larger than the base layer and with magnetic amplification, is formed on the base layer. An area of contact of the base layer of the magnetic substance and the semiconductor substrate is made small to lessen the generation of an offset voltage.

Abstract translation: 本发明涉及考虑到磁性体的基底层与半导体基板的接触面积而使磁特性极其稳定的磁性传感器。 在半导体衬底（111）上，多个霍尔元件（112a，112b）被嵌入，以便与半导体衬底的顶面共面，同时彼此间隔开预定的距离，并且在霍尔元件和半导体 衬底，通过保护层（113）和磁通量集中器（115）形成热膨胀系数不同于霍尔元件的热膨胀系数并部分地覆盖每个霍尔元件的区域的基层（114） 具有大于基极层并具有磁放大的面积的基极层形成在基极层上。 减小磁性物质基层与半导体衬底的接触面积以减小偏移电压的产生。

公开(公告)号：EP2058944A1

公开(公告)日：2009-05-13

申请号：EP07792993.3

申请日：2007-08-27

Applicant: Asahi Kasei EMD Corporation

Inventor： AIBA, Yusuke

IPC: H03G3/10 ,  H03F3/34 ,  H03F3/45

CPC classification number: H03G1/0029 ,  H03F1/3211 ,  H03F3/45179 ,  H03F3/45183 ,  H03F3/45188 ,  H03F2203/45052 ,  H03F2203/45066 ,  H03F2203/45101 ,  H03F2203/45292 ,  H03F2203/45356 ,  H03F2203/45394 ,  H03F2203/45481 ,  H03F2203/45586 ,  H03G1/0023 ,  H03G1/04

Abstract: Provided is a transconductance amplifier capable of suppressing variation in the range of a linear relationship between an input voltage and an output current depending on the magnitude of a tuning voltage Vctrl, thereby adjusting transconductance over a wider range of operating input voltages. The transconductance amplifier is configured by a differential pair formed of MOS transistors (111, 112) having a common source, MOS transistors (113, 114), amplifiers (106, 107), a voltage generator circuit (100), and a differential-pair input voltage generator circuit (120). An input differential common voltage Vcm of all differential signals inputted to the differential pair is adjusted so that a difference between Vcm and Vctrl is equal to a constant, in accordance with a change in the tuning voltage Vctrl that controls the transconductance. This enables keeping constant the range in which the transconductance amplifier can achieve good linearity.

Abstract translation: 提供了能够根据调谐电压Vctr1的大小来抑制输入电压和输出电流之间的线性关系的范围的变化的跨导放大器，由此在更宽的工作输入电压范围内调节跨导。 跨导放大器由具有公共源的MOS晶体管（111,112），MOS晶体管（113,114），放大器（106,107），电压发生器电路（100）和差分放大器构成的差分对构成， 对输入电压发生器电路（120）。 根据控制跨导的调谐电压Vctrl的变化，调整输入到差分对的所有差分信号的输入差分公共电压Vcm，使得Vcm和Vctr1之间的差等于常数。 这使得跨导放大器可以实现良好线性度的范围保持恒定。